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我处现有一台日本昭和900光学镀膜机转让，以下是机器的配置：* J; x2 S+ o, B
Showa Optical Coating Machine Model: SGC-22SA-IAD2 \! W: f5 ~% f' ?8 S8 N- f8 D
Year made: 2001 9 G1 ]( s; Y+ A$ ]) ]8 H
System area coverage 15 m2
h7 I6 C+ t7 o" eChamber size: 900 mm
( ?: O! z! Z2 U6 Q; MLow vacumm system: KP3000 + Rotary Pump+ULVAC PRC-012AS
# h( `0 W" n: LHigh vacumm system: SHOWA SHINKU SFD-22C oil Diffusion Pump. + p1 m" c( Y" Y [/ y9 y
Polycold R2000 series- G4 g: `: ^9 g! _( u/ h
One E-Beam Gun with 12” diameter ring crucible, one RH .
% y1 @' g6 o! K- S) b. T8 q8 T, s. GJEOL JST-10F EB-Source Power Supply
; S" q& ^4 L+ |& R+ BOptical monitoring system. Wavelength monitoring range 300 nm ~ 2000 nm.
$ W: b4 t `( s- T8 BReflection type. OMS chip changer over 30 testing chips.
0 }, G$ E- x2 P3 g 2 E3 Q0 _3 b. q) y/ @$ D% v
联系邮箱：fixcoater@eyou.com |
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发表于 2007-11-15 19:34:55
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