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我处现有一台日本昭和900光学镀膜机转让，以下是机器的配置：% [* p! M4 m% Y1 p0 @2 j
Showa Optical Coating Machine Model: SGC-22SA-IAD
# }( b8 O6 p0 Q! e( s& h# n Year made: 2001
% R% }. t0 N- c7 C8 e+ T5 L6 R6 Y& g System area coverage 15 m2
- j+ ~+ T2 P( c6 e& g) u1 zChamber size: 900 mm9 d& x* L* _& @+ S1 {! L0 V
Low vacumm system: KP3000 + Rotary Pump+ULVAC PRC-012AS* t" N3 t6 C# [) [
High vacumm system: SHOWA SHINKU SFD-22C oil Diffusion Pump. 7 V6 P) y' X# a( @1 x
Polycold R2000 series: }& O. V; N5 P) F; F
One E-Beam Gun with 12” diameter ring crucible, one RH .) C# ?- Z2 m1 w; o
JEOL JST-10F EB-Source Power Supply& a* P) V3 n- w N+ T
Optical monitoring system. Wavelength monitoring range 300 nm ~ 2000 nm.
; D) h1 M1 u |, {. P2 lReflection type. OMS chip changer over 30 testing chips.
2 v8 M, H! V6 m& P/ ^/ e : W ~' `3 A0 p0 D' m
联系邮箱：fixcoater@eyou.com |
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发表于 2007-11-15 19:34:55
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