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发表于 2007-4-16 19:22:16
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膜厚仪附录
+ \/ U; ?8 ~" D8 p% s1 fFormula Density Z-ratio Material Name
/ k7 d& K# x0 _8 y9 z5 S7 YAg 10.500 0.529 Silver
& V+ V2 e9 Y2 e: E( lAgBr 6.470 1.180 Silver Bromide n, ?& M& ?; R) g0 H5 F1 h' d
AgCl 5.560 1.320 Silver Chloride' x- m0 a+ Y$ r0 H; G
Al 2.700 1.080 Aluminum" f! U' N( @ w8 I" ]0 a
Al2O3 3.970 0.336 Aluminum Oxide/ l& ^/ H$ Q) o2 p
Al4C3 2.360 *1.000 Aluminum Carbide
5 t- k6 F! g( \$ ?( fAlF3 3.070 *1.000 Aluminum Fluoride4 n- u) {/ [5 [% U* C( y9 v( u: _
AlN 3.260 *1.000 Aluminum Nitride
7 j" X2 f6 Y8 L5 D% c1 e" Q3 h5 `AlSb 4.360 0.743 Aluminum Antimonide. A$ x1 Z8 |4 F
As 5.730 0.966 Arsenic, S5 g9 u( ~ ~4 a/ l; @" ]
As2Se3 4.750 *1.000 Arsenic Selenide! J8 P1 ^" @. k* N" E2 ~% H0 U8 c
Au 19.300 0.381 Gold9 q3 N; `8 g9 m, ^" A
B 2.370 0.389 Boron
: p# F1 S/ v. ]; x) c; LB2O3 1.820 *1.000 Boron Oxide! a" p+ r2 J" [
B4C 2.370 *1.000 Boron Carbide
& S: L$ V% t% M/ X7 `7 \' uBa 3.500 2.100 Barium, ^1 b7 }. H* X" H! X7 F( Z
BaF2 4.886 0.793 Barium Fluoride# W6 E/ n; O8 R2 T
BaN2O6 3.244 1.261 Barium Nitrate- H1 n; K, w# b6 c
BaO 5.720 *1.000 Barium Oxide
, h6 U: a/ d9 T4 }BaTiO3 5.999 0.464 Barium Titanate (Tetr)
& ~4 K0 z; U2 @; k7 S3 gBaTiO3 6.035 0.412 Barium Titanate (Cubic)* q+ C5 \7 b/ x
Be 1.850 0.543 Beryllium$ Q/ S0 N+ z. V4 {" @
BeF2 1.990 *1.000 Beryllium Fluoride
7 P. a8 q* S' ~$ P8 m, S: x2 f+ @( qBeO 3.010 *1.000 Beryllium Oxide
8 Z* R$ \) y( h5 T' NBi 9.800 0.790 Bismuth
1 R0 H) }. ]! w" z; j9 Q- F1 x6 ZBi2O3 8.900 *1.000 Bismuth Oxide
1 ?1 T. p7 i" N. p5 R" i0 zBi2S3 7.390 *1.000 Bismuth Trisulphide, v3 S. O# q' N" V% G4 B
Bi2Se3 6.820 *1.000 Bismuth Selenide2 M1 o$ _8 R+ f: U- \8 [# q5 P
Bi2Te3 7.700 *1.000 Bismuth TeUuride
4 @( F) H# @+ J' LBiF3 5.320 *1.000 Bismuth Fluoride; l( c$ x) |4 d, p0 p3 s5 v
BN 1.860 *1.000 Boron Nitride# I7 @' `: k U* Y
C 2.250 3.260 Carbon (Graphite)5 [+ H s2 m6 {* Z% `1 B: f
C 3.520 0.220 Carbon (Diamond)- t, s' f- G3 W/ U% e
GaN 6.100 *1.000 Gallium Nitride
% i1 l8 B4 }$ F4 ^GaP 4.100 *1.000 Gallium Phosphide: X+ }4 Y- d- N5 i) i
GaSb 5.600 *1.000 Gallium Antimonide) G3 h, @; |; j$ g2 g# c( L
Gd 7.890 0.670 Gadolinium
8 Q1 U* X9 \ T( `Gd2O3 7.410 *1.000 Gadolinium Oxide# b8 g V4 ^5 i+ y- m% g
Ge 5.350 0.516 Germanium5 K" ~7 G5 U2 p& x- t0 z7 I) d: d
Ge3N2 5.200 *1.000 Germanium Nitride. v2 |9 b9 ?5 d2 v o6 ^/ \
GeO2 6.240 *1.000 Germanium Oxide/ ~* ]# C9 [+ |7 U
GeTe 6.200 *1,000 Germanium Telluride! e0 x! y: X4 J/ J; U6 g7 j5 H+ E! p
Hf 13.090 0.360 Hafnium/ ~! _1 \$ n. m$ T" A( l
HfB2 10.500 *1.000 Hafnium Boride3 v. H+ P, [" O) A" w6 s* F9 N
HfC 12.200 *1.000 Hafnium Carbide$ @% U6 \) z, _' m, N( v
HfN 13.800 *1.000 Hafnium Nitride
1 `- r. v& {& `9 J7 c6 q- ~! W/ PHfO2 9.680 *1.000 Hafnium Oxide
8 U h: O2 q7 f# Y7 ~+ Q9 r7 {HfSi2 7.200 *1.000 Hafnium Silicide
( Q" y+ g8 X# x& AHg 13.460 0.740 Mercury5 L* F" A: F9 }, z: ^9 \0 d6 j
Ho 8.800 0.580 Holminum/ b1 u: H4 j* }9 L0 R
Ho2O3 8.410 *1.000 Holminum Oxide$ l/ _ @# i! g/ N6 b ?
In 7.300 0.841 Indium4 i2 v. {- N+ m2 X k
In2O3 7.180 *1.000 Indium Sesquioxide- Q- ?- {' J+ } _- J8 N
In2Se3 5.700 *1.000 Indium Selenide
, o" o6 @; A) K& N% M- j- ]. AIn2Te3 5.800 *1.000 Indium Telluride* O, y) R. I- x4 @3 z
InAs 5.700 *1.000 Indium Arsenide
- e& F* w/ `5 SInP 4.800 *1.000 Indium Phosphide2 n' T7 H5 D) r6 K
InSb 5.760 0.769 Indium AntJmonide4 L" O) J$ F- s! R+ c
Ir 22.400 0.129 Iridium
! D( z% t6 H; mK 0.860 10.189 Potassium# \7 E6 T1 Z( }* f+ @; B6 @6 F
KBr 2.750 1.893 Potassium Bromide
( d% B3 V# @' b9 {8 {+ NKCI 1.980 2.050 Potassium Chloride6 A6 J( r: H- |- w0 M5 O' E
KF 2.480 *1.000 Potassium Fluoride4 `( O r4 q; P8 j9 K3 y, p
KI 3.128 2.077 Potassium Iodide7 f* B6 ]; |$ j4 A0 C c
La 6.170 0.920 Lanthanum
" i+ F# r5 J# x# h* Z0 D9 |" ~- l0 }La2O3 6.510 *1.000 Lanthanum Oxide7 ~1 c5 s! i) W$ h8 ? ~7 K
LaB6 2.610 *1.000 Lanthanum Boride
$ {8 l+ n) e: vLaF3 5.940 *1.000 Lanthanum Fluoride
, [+ r! U9 t) q- K$ S: I# ELaN5 8.770 0.360 Lanthanum Nickel
2 u$ a2 t0 |0 U2 d- n) {/ `Li 0.530 5.900 Lithium5 n; K+ C: F1 `) G4 \* i
LiBr 3.470 1.230 Lithium Bromide$ f) n1 `6 B: g7 M/ _2 O* C
LiF 2.638 0.778 Lithium Fluoride7 k0 z/ ~: ]# `. L4 R$ x
LiNbO3 4.700 0.463 Lithium Nlobate4 [/ }# K# d+ T
Lu 9.840 *1,000 Lutetium
+ k o% q# e$ `: v, b9 vMg 1.740 1.610 Magnesium
% ~ h% T' @$ jMgAl2O4 3.600 *1.000 Magnesium Aluminate
# w3 K5 Q1 G, v. y8 ]$ QMgF2 3.180 0.837 Magnesium Fluoride" u" y9 `& d* {- S; ]8 g0 g8 U6 O, I
MgO 3.580 0.411 Magnesium Oxide: t" F7 b- m' I* K
MgO3Al2O3 8.000 *1.000 Spinel
0 C$ ~% y/ q2 g( NMn 7.200 0.377 Manganese$ B+ ^% e( t9 _! L6 V
MnO 5.390 0,467 Manganese Oxide
9 u7 m9 }9 S- y3 L; k& N0 VMnS 3.990 0.940 Manganese (11) Sulfide4 N) j* r) g f, y
Mo 10.200 0.257 Molybdenum o( _* s( o5 Y" z
Mo2C 9.180 *1.000 Molybdenum Carbide
* B2 [( U* R- L% M( ?" @! gMoB2 7.120 *1.000 Molybdenum Boride+ w8 H# Q- f8 J
MoO3 4.700 *1.000 Molybdenum Trioxdide
6 i1 q' l5 w4 I' sMoS2 4.800 *1.000 Molybdenum Disulfide
# _6 d2 R" P5 h$ F! g" u, \Na 0.970 4.800 Sodium; _. d( E7 E a; @+ M6 F, v Z
Na3AlF6 2.900 *1.000 Cryolite
m ^. u" M+ ]) Q( x$ NNa5Al3F14 2.900 *1.000 Chiolite1 S+ ]9 f7 r/ O3 K( B
NaBr 3.200 *1.000 Sodium Bromide
5 ]/ n0 \) v% ]6 J* m- e7 `NaCl 2.170 1.570 Sodium Chloride
! \$ G, |+ }% j s! xNaClO3 2.164 1.565 Sodium Chlorate6 y% e! W; q9 W* [$ ]$ ?3 G3 `$ c
NaF 2.558 0.949 Sodium Fluoride! c/ P; R$ g- S( O3 [& O
NaNO3 2.270 1.194 Sodium Nitrate5 [3 B+ h$ Q9 Q+ q' f& |
Nb 8.578 0.492 Niobium (Columbium)& ]+ n: J4 n4 i, C
Nb2O3 7.500 *1.000 Niobium Trioxide' O7 P0 }: S! U6 m4 Z4 Z9 Q- U
Nb2O5 4.470 *1.000 Niobium (V) Oxide
+ c5 j3 P4 G! c* Z! n( kNbB2 6.970 *1.000 Niobium Boride( L: J* V* X3 r
NbC 7.820 *1.000 Niobium Carbide$ h1 O. N3 g, W4 [5 {
NbN 8.400 *1,000 Niobium Nitride
% ~3 R- ~ v1 l& L" ^# rNd 7.000 *1.000 Neodynium* E( @. L, L; d4 D- _
Nd2O3 7.240 *1.000 Neodynium Oxide5 v3 r" \: S" R7 n; S6 K S, W i
NdF3 6.506 *1.000 Neodynium Fluoride! {4 O; `' _( x8 ~" N. j
Ni 8.910 0.331 Nickel5 g9 v m. [+ z7 d q+ q9 x
NiCr 8.500 *1.000 Nichrome8 S9 |; q& [- t0 ?5 J
NiCrFe 8.500 *1.000 Inconel: X" t& r( V7 I) T5 f
NiFe 8.700 *1.000 Permalloy+ U4 K3 ^0 V, C% W. r
NiFeMo 8.900 *1.000 Supermalloy) S& s F2 T% l+ P6 E
NiO 7.450 *1.000 Nickel Oxide
- [/ T/ K( a: q/ c. AP3N5 2.510 *1.000 Phosphorus Nitride
% {5 Y8 Y3 a6 A+ n# q4 K1 O4 ZPb 11.300 1.130 Lead
& m9 M; a, r, C4 K8 {' i, t! A, wPbCl2 5.850 *1.000 Lead Chloride
1 [0 l9 u( l) N8 e! e# EPbF2 8.240 0.661 Lead Fluoride) m8 ~% s. p. r, \3 C) R
PbO 9.530 *1.000 Lead Oxide
) _, W* U/ h$ N6 C( }6 i( FPbS 7.500 0.566 Lead Sulfide
- x3 T! m& M# b- m" I$ NPbSe 8.100 *1.000 Lead Selenide
& A% O6 H p" w, b( qPbSnO3 8.100 *1.000 Lead Stannate% w8 j5 I- }1 I5 @- f
PbTe 8.160 0.651 Lead Telluride
$ P; m* G! N( ]9 u. ZPb2TiO3 7.500 1.160 Lead Titanate: w) }# h# s3 X4 {( n- }% i1 j
Pd 12.038 0.357 Palladium
* S9 \; h+ S1 ^0 M* q- ePdO 8.310 *1.000 Palladium Oxide
! Q! y. G+ X; F8 }; k4 n, lPo 9.400 *1.000 Polonium( s0 H: x9 ^: f; @6 j
Pr 6.780 *1.000 Praseodymium& g9 B) I/ O* g) b9 ]' [$ ]
Pr2O3 6.880 *1.000 Praseodymium Oxide
: ]' M' D5 k$ H% z+ ~1 nPt 21.400 0.245 Platinum! s5 z# X( Y4 H* m6 F, u- ^
PtO2 10.200 *1.000 Platinum Oxide
1 U0 Q# [& d0 a( G8 r. v" P$ H6 ?Ra 5.000 *1.000 Radium
+ m. d+ d5 F6 z# S* r2 E4 B7 F! P: oRb 1.530 2.540 Rubidium
8 D: A$ X2 R0 eRbl 3.550 *1.000 Rubidium Iodide* s9 q- f2 ?0 R& h) i
Re 21.040 0.150 Rhenium; ~7 S' r- Z, D! t/ J8 r
Rh 12.410 0.210 Rhodium
& `3 ?( M1 c- Y8 T* IRu 12.362 0.182 Ruthenium- F& l1 w5 P7 [8 ~4 |/ F% {
S8 2.070 2.290 Sulphur
6 c; A4 {: n$ X8 D* ~Sb 6.620 0.768 Antimony
; p- v4 ]4 @1 \. E% {( u" ` u$ _Sb2O3 5.200 *1.000 Antimony Trioxide
% Z; O( B0 @* wSb2S3 4.640 *1.000 Antimony Trisulfide
8 r0 o' @ e R2 f8 W, CSc 3.000 0.910 Scandium
. @6 y- U8 I- \, ~Sc203 3.860 *1.000 Scandium Oxide
5 @# @! h! _0 o* y! z/ L& TSe 4.810 0.864 Selenium
; P* i+ F# I$ Z, O% rSi 2.320 0.712 Silicon
5 b5 ]) {) Z3 p$ J5 _: y6 S; y! {' }( PSi3N4 3.440 *1.000 Silicon Nitride6 H# I3 Z' o/ c q1 e
SiC 3.220 *1.000 Silicon Carbide
1 q, f- i: Q9 E, oSiO 2.130 0.870 Silicon (II) Oxide2 M- y' E" ] [- ^( [" w, ^- `
SiO2 2.648 1.000 Silicon Dioxide
- e. o6 \/ T& K7 O2 _/ z* r- `Sm 7.540 0.890 Samarium* Z( I, s3 P. R! @6 M. u
Sm2O3 7.430 *1.000 Samarium Oxide- \- J* g' X% b6 ~7 u
Sn 7.300 0.724 Tin4 b; W( b5 D2 R2 V+ ^) W
SnO2 6.950 *1.000 Tin Oxide; v/ e% `; l% W. ~) Q
SnS 5.080 *1.000 Tin Sulfide
, Q) q, U. y' A. p( ESnSe 6.180 *1.000 Tin Selenide
% w: ~+ r+ c6 J( NSnTe 6.440 *1.000 Tin Telluride6 j( w; I2 {# l# X" O
Sr 2.600 *1.000 Strontium; ~* e2 @- a* x P9 r$ [' B" g+ N1 r
SrF2 4.277 0.727 Strontium Fluroide2 v# S# O: J! j7 {. b
SrTiO3 5.123 0.310 Strontium Trranate1 p3 Y2 [! S/ x6 ~& n
SrO 4.990 0.517 Strontium Oxide
$ e, p; }& G1 _/ eTa 16.600 0.262 Tantalum
6 t: {0 e. y0 I, l) P2 _; T$ qTa2O5 8.200 0.300 Tantalum (V) Oxide1 @7 G: L# m( e9 X* ], g, u
TaB2 11.150 *1.000 Tantalum Boride
$ @) S! b s$ g9 T GTaC 13.900 *1.000 Tantalum Carbide
1 G2 S: n9 m* STaN 16.300 *1.000 Tantalum Nitride
0 t- F0 o1 ]- l/ I' f1 zTb 8.270 0.660 Terbium# L/ E* v. ?" U6 [: S, c
Tc 11.500 *1.000 Technetium" \0 ~' E- E# D
Te 6.250 0.900 Tellurium
5 N" m! q& G3 eTeO2 5.990 0.862 Tellurium Oxide* F1 z8 `% @+ B4 h% S+ l
Th 11.694 0.484 Thorium
) p% ]% a8 D, D2 n( ~' ~ThF4 6.320 *1.000 Thorium (IV) Fluoride8 V3 w) ]- ~! x/ U% ]
ThO2 9.860 0,284 Thorium Dioxide
6 M8 [7 x/ ?% R0 J, h" {ThOF2 9.100 *1.000 Thorium Oxyfluoride
1 f" w, m* n' D1 F; M8 n% }5 }Ti 4.500 0.628 Titanium
- F( S$ r4 P% w' [/ _0 V1 }Ti2O3 4.600 *1.000 Titanium Sesquioxide* e+ i: x6 t) T3 y* O
TiB2 4.500 *1.000 Titanium Boride
* b/ J, k9 o3 o$ {TiC 4.930 *1.000 Titanium Carbide
# D, ~* b; M5 ^0 j0 E2 `TiN 5.430 *1.000 Titanium Nitride
) `0 {$ ?3 t$ J% v- E! nTiO 4.900 *1.000 Titanium Oxide
* }7 _* i+ [1 n' N; HTiO2 4.260 0.400 Titanium (IV) Oxide3 f5 h& V" V) k) h' Q" R4 s
TI 11.850 1.550 Thallium
$ |& }. a U( h. k2 q& b. ETIBr 7.560 *1.000 Thallium Bromide
" R( L' n) O c# j) [2 V3 z0 g5 ?* `TICl 7.000 *1.000 Thallium Chloride
* o. C( \! Q5 ]2 G6 E6 pTII 7.090 *1.000 Thallium Iodide (B)2 G( V% s8 K" {* E
U 19.050 0.238 Uranium- e! d. }% H; C& @# p" n* u. _
U4O9 10.969 0.348 Uranium Oxide& D7 r" U3 `& J5 Z1 b
UO2 10.970 0.286 Uranium Dioxide
4 z) _, z7 Y5 m# _) I& j/ ~7 u, RU3O8 8.300 *1.000 Tri Uranium Octoxide
r/ r! }# i, LV 5.960 0.530 Vanadium
9 Z% x! X* X( U6 D5 mV2O5 3.360 *1.000 Vanadium Pentoxide; I- t! T! I# j
VB2 5.100 *1.000 Vanadium Boride
& X0 F; p% s1 r( ~5 Z0 KVC 5.770 *1.000 Vanadium Carbide
9 J4 Y8 T! [/ z: rVN 6.130 *1.000 Vanadium Nitride
: w) h N5 S; o9 ^, K7 }VO2 4.340 *1.000 Vanadium Dioxide* |9 T' r) E( z9 v$ o
W 19.300 0.163 Tungsten/ N% r- m5 p* ?# @
WC 15.600 0.151 Tungsten Carbide( B' b3 j/ B* V
WB2 10.770 *1.000 Tungsten Boride
4 [9 F. G p# a' c% M3 A' h5 o" ~2 WWO3 7.160 *1.000 Tungsten Trioxide
" _+ |& R4 B2 rWS2 7.500 *1.000 Tungsten Disulphide7 Z# \7 q5 C4 f
WSi2 9.400 *1.000 Tungsten Silicide. P# Y U5 |. }9 l
Y 4.340 0.835 Yttrium6 M& U% }! r% Q. \
Y2O3 5.010 *1.000 Yttrium Oxide/ I: U7 n W3 l9 e1 r- h$ O
Yb 6.980 1.130 Ytterbium: g% b2 z. E' R( M* N% C
Yb2O3 9.170 *1.000 Ytterbium Oxide8 G3 y8 J* H- Y W
Zn 7.040 0.514 Zinc: Z' f: }7 M, b* `: ~ A
Zn3Sb2 6.300 *1.000 Zinc Antimonide
5 y. j8 K$ q. D! a; Q3 K3 q8 FZnF2 4.950 *1.000 Zinc Fluoride
3 o- k/ l& O. w3 C$ ^- C/ ~ZnO 5.610 0.556 Zinc Oxide
+ E$ P& u# Q3 ^4 ~ZnS 4.090 0.775 Zinc Sulfide- i+ A9 `2 f# S; l* j7 @, l; |& W& T
ZnSe 5.260 0.722 Zinc Selenide
+ J8 I8 N) B7 b6 ~. G/ W7 g: C# EZnTe 6.340 0.770 Zinc Telluride8 x1 E8 I8 D4 c+ ]% u
Zr 6.490 0.600 Zirconium
2 W7 _; R, T( u5 d4 d6 o# U5 M, BZrB2 6.080 *1.000 Zirconium Boride
# i$ ~% L$ T8 G A2 YZrC 6.730 0.264 Zirconium Carbide
1 o4 h' _$ i8 W$ c" T" [4 EZrN 7.090 *1.000 Zirconium Nitride1 H0 P$ Q2 j. M; p3 I8 J
ZrO2 5.600 *1.000 Zirconium Oxide |
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