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7 I f& B7 P8 m<title>全国薄膜技术研讨会在甬胜利召开</title>* @8 _2 b: p- d* j4 x
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2 n! `+ ~7 j% a7 @! h$ G, { <p align="center"><strong><font size="5">硬质薄膜材料的最新发展及应用</font></strong></td>2 |# y; O2 q6 ^
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( E/ h1 q; `! z, o6 X# m, q4 ?
ZH-CN;mso-bidi-language:AR-SA">吴大维</span></td>
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<p class="MsoNormal" style="text-indent:21.0pt;mso-char-indent-count:2.0;3 X/ C2 k4 w$ t& t, r( r' B& r5 m
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) g! r, x& B, [+ }4 ^mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:"Times New Roman"">摘要：综述了硬质薄膜材料的最新研究状况。硬质薄膜的设计向着多元化、多层膜的方向发展。本征超硬薄膜材料，如：金刚石、</span><span lang="EN-US">C-BN</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";
2 }* A: m' T1 g$ L/ b, ]; t6 i$ Q' P1 y5 [
mso-hansi-font-family:"Times New Roman"">、</span><span lang="EN-US">B<sub>4</sub>C</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:
9 j7 E/ Z0 Q5 t& v v% {2 h" ^8 Q7 m; |& Y5 L/ I0 n1 z& B3 R; z& j
"Times New Roman"">、</span><span lang="EN-US">TiB<sub>2</sub></span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:
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* o& ^$ d/ ?1 j& @% c: V"Times New Roman"">、</span><span lang="EN-US">BC<sub>4</sub>N</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:
+ M9 x' t8 B! L1 G2 f, }- V& n u0 |6 M# f. W4 p5 K( O
"Times New Roman"">等的硬度可以达到</span><span lang="EN-US">50</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:
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6 Z# V1 m7 p, q# p0 G/ ]"Times New Roman"">－</span><span lang="EN-US">80GPa</span><span style="font-family:# r/ [* @! V+ {: T
( M% k. x9 e2 N& V% B' N宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:"Times New Roman"">。纳米超晶格薄膜和纳米晶复合膜两类新的超硬薄膜的硬度分别随超晶格的调制周期减小，纳米晶晶粒尺寸减小而增加，它们的硬度都能达到</span><span lang="EN-US">40</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";+ k3 |1 G0 a+ V$ |8 B
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mso-hansi-font-family:"Times New Roman"">－</span><span lang="EN-US">70
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GPa</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:! F# T! g0 @: R$ @0 Q" ?& q
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"Times New Roman"">。最高硬度的薄膜材料</span><span lang="EN-US">nc-TiN # h j" I! H1 i: q
8 r; J/ r1 P4 E$ x / a-Si<sub>3</sub>N<sub>4</sub></span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:8 m3 [* m+ ~- `7 d& G2 o
& y1 @% H5 e7 p7 c2 j"Times New Roman"">采用</span><span lang="EN-US">CVD</span><span style="font-family:
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9 @( c2 s3 X8 P! n2 u! _3 p. U宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:"Times New Roman"">方法制备，加载</span><span lang="EN-US">30mN</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";( V* q- m; j8 x, \. d
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mso-hansi-font-family:"Times New Roman"">测得塑性硬度（</span><span lang="EN-US">lastic
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. ]5 N8 u$ p4 G6 p4 l4 ]; P; u hardness</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";
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mso-hansi-font-family:"Times New Roman"">）</span><span lang="EN-US">H=110GPa</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:
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$ n* x* g; {" M' S" J0 E5 ]0 z/ ]0 Q S6 C"Times New Roman"">；</span> <span style="font-family:宋体;mso-ascii-font-family:/ k5 `( r) a+ R/ Z* X: F' b
. a- W9 ]2 x/ |! E, i& g"Times New Roman";mso-hansi-font-family:"Times New Roman"">加载</span><span lang="EN-US">70Mn</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";6 p2 C( ?) W4 I9 v: m ]
) @ S7 r s3 |- Qmso-hansi-font-family:"Times New Roman"">，</span><span lang="EN-US">H=80
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GPa</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:* S! g0 d+ u# c/ W0 e/ X8 W
/ F2 o' Y$ [- H- \' G( P; {"Times New Roman"">。本综述对硬质薄膜的应用前景做了展望。</span></font></p>
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mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:"Times New Roman""><font size="2">关键词：薄膜材料，超硬多层膜，超晶格薄膜，纳米晶复合膜</font></span></p>! Z' X" z; w2 o/ H% a4 T1 p
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mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:"Times New Roman"">中图分类号：</span><span lang="EN-US">TB430.45</span></font></p>+ T! G! Y; I9 k% U
6 ~: _! ~/ R' ^' k( x <h1 style="tab-stops:159.6pt"><span lang="EN-US"><font size="2">Recent - T! I3 Q1 ~& i" f5 l+ _
3 s% t, E$ }1 }: Z) M development and application of hard thin films</font></span></h1>
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<p class="MsoNormal" align="center" style="text-align:center;tab-stops:159.6pt"><span lang="EN-US"><font size="2">Wu
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Dawei<span style="mso-spacerun: yes"> </span></font></span></p>
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<p class="MsoNormal" align="center" style="text-align:center;tab-stops:159.6pt"><span lang="EN-US"><font size="2"><span style="mso-spacerun: yes"> </span>Wuhan
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) d2 P4 L/ y- U6 M+ s University Honor Advanced Material Co. Ltd</font></span></p>
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# g% G/ o& d1 q6 v) nmso-char-indent-size:10.45pt;tab-stops:159.6pt"><font size="2"><span lang="EN-US">Abstract:
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' Q$ F* D; u/ P5 ]% m# E; c The latest progress of hard thin films was reviewed in this article. # h" u3 b, q4 A7 Q4 _) o6 i% D
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The multielement and multiplayer is the important developing
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direction of hard thin film relently. The hardness of intrinsically 8 B) e/ s* k+ H8 X- @8 D6 u# h
: K! Z$ \0 A& h& V6 g; P super hard materials, Diamond, C-BN, B<sub>4</sub>C, TiB<sub>2</sub> C' [7 F8 G" k, \' ^" n
- T/ v3 ~2 K3 N" j, u and BC<sub>4</sub>N etc. can reach 50</span><span style="font-family:宋体;mso-ascii-font-family:"Times New Roman";mso-hansi-font-family:
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. B3 d& Z" P! e) B, W$ S/ O7 s+ R"Times New Roman"">－</span><span lang="EN-US">80GPa . The hardness 7 q& O# `# i' n5 \+ f$ g( w7 v
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nanocrystalline complex films, which can reach the value of 40</span><span style="font-family:宋体;mso-ascii-font-family:
+ }( k i0 }) v% {" ? e, _* S! o$ Q6 V# G/ s2 I- K& h! w
"Times New Roman";mso-hansi-font-family:"Times New Roman"">－</span><span lang="EN-US">70GPa : q7 n- G r0 O% [
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,increase with the reducing period of modulation and the minimizing 1 f4 A# B7 ^. `" E- c
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grain size of nanocrystalline,respectively. The plastic hardness of
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nc-TiN / a-Si<sub>3</sub>N<sub>4,</sub> which possess the highest , O8 K5 P/ o4 [
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hardness prepared by PCVD ,was measured in a value of 110 GPa at 4 t3 a' \" T* w3 |
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Furthermore, the applied prospection of hard films materials was & g: ~- t1 b# `4 a2 \
* V, A7 f3 B1 h& k$ Q7 l9 ]5 ` also discussed in the summary.</span></font></p>
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<p class="MsoNormal" style="text-indent:17.95pt;mso-char-indent-count:1.71;
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4 Q y: T4 n& k! D8 h: }: hmso-char-indent-size:10.45pt;tab-stops:159.6pt"><span lang="EN-US"><font size="2">Keywords:
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$ G7 q. f O, E H4 g thin film material, superhard multiplayer films, nanosuperlattice # D% [8 W1 u l
+ D! a1 [+ o5 c# y- ]! f films, nanocrystalline compolex materials.</font></span></p>
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