重磅外文最新书籍：Optical Thin Films and Coatings

admin · 发表于 2019-10-20 13:33:05

Woodhead Publishing Series in Electronic
and Optical Materials
Optical Thin Films and
Coatings
From Materials to Applications
Second Edition
Edited by
Angela Piegari
Contents
Contributors ............................................................................................................xix
Preface to the First Edition ................................................................................. xxiii
Preface ................................................................................................................ xxvii
PART I DESIGN AND MANUFACTURING OF OPTICAL
THIN FILMS AND COATINGS
CHAPTER 1 Recent developments in deposition techniques
for optical thin films and coatings...............................3
H. Angus Macleod
1.1 Introduction.....................................................................................3
1.2 Early Processes for the Deposition of Optical Coatings ...............4
1.3 The Energetic Processes .................................................................6
1.3.1 Ion-Assisted Deposition........................................................6
1.3.2 Ion Plating.............................................................................8
1.3.3 Sputtering............................................................................10
1.4 Cathodic Arc Evaporation ............................................................15
1.5 Pulsed Laser Deposition ...............................................................15
1.6 Chemical Vapor Deposition .........................................................16
1.7 Atomic Layer Deposition .............................................................17
1.8 Sol-Gel Processes .........................................................................18
1.9 Etching ..........................................................................................18
1.10 Other Techniques..........................................................................19
1.11 Conclusion ....................................................................................19
References.....................................................................................20
CHAPTER 2 Design of complex optical coatings...........................25
Pierre G. Verly, Daniel Poitras
2.1 Introduction...................................................................................25
2.2 Modern Numerical Thin Film Synthesis Techniques ..................27
2.2.1 Fourier Transform Method.................................................27
2.2.2 Inhomogeneous Refinement ...............................................30
2.2.3 Needle Method ...................................................................32
2.2.4 Global Optimization ...........................................................34
2.3 Manufacturability Issues...............................................................37
2.4 Hybrid Design...............................................................................40
2.4.1 Waveguide Facet Coatings.................................................41
2.4.2 Structured Coatings ............................................................44
2.4.3 Solar Cells...........................................................................48
2.5 Conclusion ....................................................................................52
References.....................................................................................53
Further Reading ............................................................................64
CHAPTER 3 Optical monitoring strategies for optical coating
manufacturing .............................................................65
Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana
V. Amotchkina
3.1 Introduction...................................................................................65
3.2 Classification of Optical Monitoring Strategies ..........................67
3.3 Turning Point Optical Monitoring and Error Self-Compensation
Effect.............................................................................................69
3.4 Level Monitoring: Passive and Active Monochromatic
Monitoring Strategies ...................................................................75
3.5 Monitoring by Swing Values .......................................................85
3.6 Direct Broadband Optical Monitoring .........................................89
3.7 Indirect Optical Monitoring Strategies.........................................92
3.8 Conclusion ....................................................................................97
References.....................................................................................99
CHAPTER 4 Production strategies for high-precision optical
coatings .................................................................... 103
Henrik Ehlers, Detlev Ristau
4.1 Introduction.................................................................................103
4.2 Basic Concept of Deterministic Production...............................105
4.3 Optical Broadband Monitoring ..................................................107
4.4 Hybrid Thickness Monitoring Concepts ....................................112
4.5 Virtual Deposition System .........................................................114
4.5.1 Deposition System............................................................115
4.5.2 Online Measurement System............................................116
4.5.3 Process-Tracing Algorithm...............................................116
4.5.4 Application Example for a VDP Analysis .......................117
4.6 Direct Online Correction Tools..................................................118
4.7 Design Stability in Production Processes...................................120
4.8 Deposition Control of Coating Systems with Continuous
Refractive Index Variation .........................................................125
4.8.1 Production of Material Mixtures......................................126
4.8.2 Deposition Control of Rugate Filters ...............................132
4.9 Conclusion ..................................................................................135
References...................................................................................136
Further Reading ..........................................................................140
vi ContentsPART II UNCONVENTIONAL FEATURES OF OPTICAL THIN
FILMS AND COATINGS
CHAPTER 5 Complex materials with subwavelength inclusions
for optical thin film applications ............................. 143
Anna Sytchkova
5.1 Introduction.................................................................................143
5.2 Physics of Some Classes of Novel Materials with
Subwavelength Inclusions ..........................................................145
5.3 Ceramic Matrix With Embedded Nanostructures......................147
5.3.1 Materials With Quantum Dots .........................................148
5.3.2 Nanoclusters in Periodic Arrays (Metamaterials)............149
5.3.3 Effect of Small Random Disorders and Imperfections
in Metamaterials ...............................................................154
5.3.4 Composites of Random Elements ....................................154
5.3.5 Coatings Containing Thin and Ultrathin Metal Layers
and Coatings Containing Metasurfaces............................155
5.4 Searching for Alternative Materials for Resonating
Inclusions ....................................................................................156
5.4.1 Alloys and Intermetallics: Novel Metal Materials ..........157
5.4.2 Semiconductors and Dielectrics .......................................160
5.5 Characterization of Novel Materials with Subwavelength
Inclusions ....................................................................................162
5.5.1 Optical Characterization Techniques for Complex
Materials ...........................................................................163
5.5.2 Local Properties of Nanostructured Materials .................165
5.5.3 Effective Macroscopic Parameters...................................166
5.5.4 Complex Materials and Ultrathin Metals in Multilayers.168
5.6 Conclusions.................................................................................172
References...................................................................................173
CHAPTER 6 Scattering properties of random structures
in thin films............................................................... 187
Gerard Berginc, Alexei A. Maradudin
6.1 Introduction.................................................................................187
6.2 Numerical Solution of Reduced Rayleigh Equations
for Scattering of Light From Dielectric Films With 1D
Rough Surfaces...........................................................................189
6.2.1 A Film With a 1D Randomly Rough Vacuum-Dielectric
Interface Deposited on the Planar Surface of a Perfect
Conductor..........................................................................1906.2.2 A Film With a Planar Vacuum-Dielectric Interface
Deposited on a 1D Randomly Rough Perfectly
Conducting Surface ..........................................................196
6.3 Reduced Rayleigh equations for the scattering of P- and
S-Polarized Light From, and Its Transmission through, a Film
With Two 1D Rough Surfaces ...................................................200
6.3.1 p-Polarization....................................................................203
6.3.2 s-Polarization ....................................................................207
6.3.3 Results...............................................................................209
6.4 Numerical Solution of the Reduced Rayleigh Equation
for the Scattering of Light From a 2D Randomly Rough
Penetrable Surface ......................................................................213
6.5 Scattering of Light From a Dielectric Film With a 2D Randomly
Rough Surface Deposited on a Planar Metal Substrate.............216
6.5.1 Scattering of Light From a Dielectric Film With a 2D
Randomly Rough Surface Deposited on a Planar Metal
Substrate............................................................................218
6.5.2 A Dielectric Film With a Planar Interface With a
Dielectric Superstrate and a 2D Randomly Rough
Interface With a Dielectric Substrate...............................224
6.6 Analytical Methods for the Scattering From a 3D Film With
Randomly Rough Surfaces .........................................................229
6.6.1 Definition of the Scattering Matrix..................................230
6.6.2 The SSA and the SPM for a 2D Rough Surface .............233
6.6.3 The SSA and the SPM for Slabs With Randomly
Rough Boundaries ............................................................240
6.6.4 Conclusions.......................................................................247
6.7 Theoretical Methods for the Scattering of Polarized Light
From Randomly Rough Interfaces and Random Media............247
6.7.1 Specific Intensity and Cross Section................................248
6.7.2 Specific Intensity and Bethe-Salpeter Equations.............253
6.7.3 Effective Permittivity .......................................................255
6.7.4 Expression of the Intensity Operator P11 .........................256
6.7.5 Expression for the Incoherent Intensity and the Green
Tensors P11 .......................................................................259
6.7.6 Coherent Backscattering...................................................265
6.7.7 Conclusion ........................................................................273
6.8 Applications ................................................................................273
6.9 Conclusion ..................................................................................281
Appendix.....................................................................................281
viii ContentsA.1 Definitions of the Scattering Matrices for a Single Rough
Surface ................................................................................281
A.2 Mueller Matrix and Tensor ................................................282
Acknowledgments ......................................................................284
References...................................................................................284
Further Reading ..........................................................................289
CHAPTER 7 Optical properties of thin film materials at short
wavelengths .............................................................. 291
Juan I. Larruquert
7.1 Introduction.................................................................................291
7.2 Material Behavior Over the Spectrum .......................................291
7.3 Reflection and Transmission in Absorbent Materials ...............294
7.3.1 Roughness and Scattering ................................................296
7.4 The Optical Constants of Materials at Short Wavelengths .......299
7.4.1 Interaction Mechanisms Between Photons
and Matter.........................................................................299
7.4.2 Transparency Cutoff of Dielectrics ..................................300
7.4.3 Free Electron Metals ........................................................301
7.4.4 Tightly Bound Electrons: Atomic Scattering
Factors...............................................................................303
7.4.5 Absorption Edges..............................................................306
7.4.6 Optical Properties at Higher Energies..............................309
7.5 Link Between n and k: Kramers-Kronig Analysis.....................314
7.6 Experimental Determination of Optical Constants ....................315
7.7 Specifics of Optical Coatings at Short Wavelengths.................318
7.7.1 Transmission Filters .........................................................318
7.7.2 High-Reflectance Coatings...............................................321
7.7.3 Linear Polarizers and Phase Retarders.............................332
7.8 Conclusion ..................................................................................341
Acknowledgements.....................................................................342
References...................................................................................342
CHAPTER 8 Controlling thermal radiation from surfaces............ 357
Carl G. Ribbing
8.1 Introduction.................................................................................357
8.2 Blackbody Radiation ..................................................................359
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