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[薄膜书籍] 重磅外文最新书籍:Optical Thin Films and Coatings

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发表于 2019-10-20 21:33:05 | 显示全部楼层 |阅读模式

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0 Z  ?8 K( w. ^3 L& pWoodhead Publishing Series in Electronic
( V1 }  M; G3 I" x: u# g( T+ Wand Optical Materials
6 l% V$ W" Y: C% BOptical Thin Films and
* E" F8 u' t7 F; y+ l( uCoatings! P' z! g/ p  ^# Y1 v0 O8 i" ?
From Materials to Applications! b6 |1 W9 b! U4 {8 W# w
Second Edition6 X$ d2 X0 C0 y) Z! X/ a
Edited by: G) Y  D4 n& G& D5 K
Angela Piegari
- b  E- n  c7 RContents
, J: _& e. F) h& {7 D4 QContributors ............................................................................................................xix
+ p. ~6 j% X1 E0 T" O$ fPreface to the First Edition ................................................................................. xxiii' H1 t4 ^4 y3 b% m, f3 ]- g5 m6 M
Preface ................................................................................................................ xxvii
8 v, ?- r) m- x& y5 A1 |6 H* [% O1 j" _PART I DESIGN AND MANUFACTURING OF OPTICAL
3 T$ h# \0 o4 D) k% g. LTHIN FILMS AND COATINGS
0 l) u4 L1 I, H9 }) w& eCHAPTER 1 Recent developments in deposition techniques
+ q+ M2 i  _9 \for optical thin films and coatings...............................3
# y, |0 F0 u8 q$ x) L  IH. Angus Macleod
0 I' m) d1 `1 \" u/ S1.1 Introduction.....................................................................................35 d% t3 @8 M# f% p3 I1 U* r
1.2 Early Processes for the Deposition of Optical Coatings ...............4
5 ]+ m' o8 t% X9 \( a: L1.3 The Energetic Processes .................................................................6: f$ G! \7 T+ V. o& y# y% v
1.3.1 Ion-Assisted Deposition........................................................6* L! P" p- V7 V  K6 l- W
1.3.2 Ion Plating.............................................................................8
7 h  J) {& A4 W9 a* P, s. P1.3.3 Sputtering............................................................................10  o* d3 f# P8 f0 m4 J; A; R
1.4 Cathodic Arc Evaporation ............................................................15
, P( X6 H; V( o1.5 Pulsed Laser Deposition ...............................................................15
2 ~, j' K. h0 A1 F) Z4 W1.6 Chemical Vapor Deposition .........................................................16% j! _0 {5 J3 T6 I: w
1.7 Atomic Layer Deposition .............................................................17! J* B% @. X3 B* r
1.8 Sol-Gel Processes .........................................................................18' g; w4 I' @) B- m6 e
1.9 Etching ..........................................................................................181 P0 b. N3 a  R3 Y% I
1.10 Other Techniques..........................................................................19+ E8 X% Y" P$ E3 D
1.11 Conclusion ....................................................................................19$ R9 r. j) \1 w( V
References.....................................................................................207 R9 ]3 _# Z$ R7 }" k8 P3 u8 ^
CHAPTER 2 Design of complex optical coatings...........................25$ {1 e/ F0 R8 J6 `  F3 L0 t
Pierre G. Verly, Daniel Poitras
0 Z( d# }. ^: O# u: @2.1 Introduction...................................................................................255 G6 G5 a! }) q* _) n4 I! I9 C
2.2 Modern Numerical Thin Film Synthesis Techniques ..................27% C! g' G/ s7 _2 S3 b+ I6 T  l
2.2.1 Fourier Transform Method.................................................27
8 H( ]" l2 T# |% ^, y% q- Y2 L2.2.2 Inhomogeneous Refinement ...............................................30& X3 R( {6 N7 V% _. p& `
2.2.3 Needle Method ...................................................................323 S7 ]$ @& J% W+ e2 h+ C4 M
2.2.4 Global Optimization ...........................................................34
' N. s( G- u% x, Y5 W* x- [2.3 Manufacturability Issues...............................................................37
: o# |$ L* W1 V. E2.4 Hybrid Design...............................................................................40* y. V' g; E; W6 D1 [
2.4.1 Waveguide Facet Coatings.................................................41* i) d8 H- f2 K6 D7 }
2.4.2 Structured Coatings ............................................................444 k* V* H1 e6 ~  C4 G
2.4.3 Solar Cells...........................................................................481 `0 K% A+ Z$ J  }' Y3 x; Z- b
2.5 Conclusion ....................................................................................52! V3 d4 }% f: g) x" C4 {
References.....................................................................................532 A7 d4 V3 }! P
Further Reading ............................................................................644 O3 t: Y$ B: R7 F; I5 U5 h0 ?
CHAPTER 3 Optical monitoring strategies for optical coating
0 i$ Y6 e  I7 ~9 s% f) t6 y, ]manufacturing .............................................................65
9 ]" y1 F& ~5 Z) y) @: `, EAlexander V. Tikhonravov, Michael K. Trubetskov, Tatiana
1 c; }/ O9 k$ D6 S( p7 qV. Amotchkina
  Q. V1 D' l. Y! D4 i# t" i) R0 S3.1 Introduction...................................................................................65
9 o& A6 H; w0 N. \, k( p' b3.2 Classification of Optical Monitoring Strategies ..........................67
& W% _: Q! \, j- y+ F3.3 Turning Point Optical Monitoring and Error Self-Compensation
" ^% s- w" m5 B1 a/ XEffect.............................................................................................69
0 J' D4 b. k8 F, w) K# o( e2 i3.4 Level Monitoring: Passive and Active Monochromatic
; F& p" s2 C2 B4 ~2 U" XMonitoring Strategies ...................................................................75, j4 m& d" H% e1 t
3.5 Monitoring by Swing Values .......................................................85
) `1 q6 q8 C+ X! K3.6 Direct Broadband Optical Monitoring .........................................89' C# R! n& y; ]0 ]
3.7 Indirect Optical Monitoring Strategies.........................................92
2 A' P/ c8 q! c3.8 Conclusion ....................................................................................97& E2 W) M  j6 z9 p1 c8 j* Q, h
References.....................................................................................99" Z/ e. b+ a  D. W( G3 o" V
CHAPTER 4 Production strategies for high-precision optical
# p3 J8 ~2 m! x" \& W: Scoatings .................................................................... 103
' N: ~& S8 O5 m. a1 u" p# iHenrik Ehlers, Detlev Ristau$ s) [8 P% T7 |& t4 `
4.1 Introduction.................................................................................103& b$ `7 I2 M/ H
4.2 Basic Concept of Deterministic Production...............................105
% X( N0 ?1 X$ ^, p5 X! n4.3 Optical Broadband Monitoring ..................................................107, H- `. Y4 c* C$ \4 H4 v8 M" M; _
4.4 Hybrid Thickness Monitoring Concepts ....................................112
& q! a  r( r. [6 C( P7 O4.5 Virtual Deposition System .........................................................1144 H" A* _0 G* Z9 Q$ M/ Q1 g
4.5.1 Deposition System............................................................115
( C! |% \6 L9 K- }' u- M$ s4.5.2 Online Measurement System............................................116
; o4 W& o7 L: ]3 a" u3 E4.5.3 Process-Tracing Algorithm...............................................116, o9 N# Z3 H  W$ c8 p
4.5.4 Application Example for a VDP Analysis .......................117# q+ u# ?3 E3 M8 x# u, K4 @% ]
4.6 Direct Online Correction Tools..................................................1187 R, J0 s9 ]) k. w* i0 }
4.7 Design Stability in Production Processes...................................120# `& r8 `) l/ k9 h( t5 o3 v, W0 g
4.8 Deposition Control of Coating Systems with Continuous
+ N# j$ u* h9 q& }( C* K$ S1 PRefractive Index Variation .........................................................125
! T# B- b/ e, {. F1 m4.8.1 Production of Material Mixtures......................................126$ }1 Y* Q2 N/ N  @4 q" V2 G
4.8.2 Deposition Control of Rugate Filters ...............................132  C- y+ O* b" Y6 M
4.9 Conclusion ..................................................................................135
3 G  [' H4 t, C% w7 f6 S; A% fReferences...................................................................................1363 `  Q0 Z+ ^9 a
Further Reading ..........................................................................140
& u8 t# M9 z. Q7 u" h9 T; w- cvi ContentsPART II UNCONVENTIONAL FEATURES OF OPTICAL THIN
+ C* b' q7 K) y. ]7 k) U: a; XFILMS AND COATINGS0 N( G- Z1 B* J, L9 X1 Z
CHAPTER 5 Complex materials with subwavelength inclusions
8 N5 m, ~  H% F. x3 Y4 Lfor optical thin film applications ............................. 143. w6 i1 ^& }+ j8 @6 A2 x$ B
Anna Sytchkova- h% X& [/ t& Q* j) j$ _0 p. Y; r7 P
5.1 Introduction.................................................................................143
3 _2 t* n$ I1 K: J$ m  l4 p1 O2 L8 v5.2 Physics of Some Classes of Novel Materials with' \: M- v% l3 N+ A& s5 V
Subwavelength Inclusions ..........................................................145
/ z( b6 G; T6 J( _5.3 Ceramic Matrix With Embedded Nanostructures......................147
5 y( h" @2 Q2 i, b' ]" ~& l$ B+ `5.3.1 Materials With Quantum Dots .........................................148$ u4 W, k, D4 S3 T
5.3.2 Nanoclusters in Periodic Arrays (Metamaterials)............149
# I. N$ w% ~# W9 t/ R( T9 Z5.3.3 Effect of Small Random Disorders and Imperfections1 q5 s7 S" f7 ?
in Metamaterials ...............................................................154
  _; z0 P  J8 K5.3.4 Composites of Random Elements ....................................154% ]3 F% W/ M7 A6 {: U0 k
5.3.5 Coatings Containing Thin and Ultrathin Metal Layers
3 @8 _, Z& A6 [( B/ hand Coatings Containing Metasurfaces............................1559 k/ ^9 u4 M$ F! R
5.4 Searching for Alternative Materials for Resonating3 s: u4 W5 B$ P1 \, a5 F6 t1 t2 o
Inclusions ....................................................................................156# e4 u0 z3 S: a" Z" q
5.4.1 Alloys and Intermetallics: Novel Metal Materials ..........157
5 }2 w3 ]8 N- I0 r0 k" [6 z2 L5.4.2 Semiconductors and Dielectrics .......................................160
" J7 f0 u- B: C1 X/ M- \( y5.5 Characterization of Novel Materials with Subwavelength
5 h& S8 {9 V7 P6 \( L7 {/ cInclusions ....................................................................................1628 G( t3 v9 E1 w5 N7 r1 x
5.5.1 Optical Characterization Techniques for Complex* e4 q2 W+ q( w6 M7 t2 C# ?
Materials ...........................................................................163" \& v5 B2 i1 r% b4 p8 }2 B" X2 o
5.5.2 Local Properties of Nanostructured Materials .................165" r" `7 a- v$ e1 v. G. q4 A
5.5.3 Effective Macroscopic Parameters...................................166
8 u4 B0 ^* S; `5.5.4 Complex Materials and Ultrathin Metals in Multilayers.1685 o8 j( L9 @( H) C* P# D. E3 b
5.6 Conclusions.................................................................................1729 Y& Z9 D& Q9 y) J; U9 d  A
References...................................................................................173
+ b! ^4 ]4 a1 c! |CHAPTER 6 Scattering properties of random structures: `) m4 A. z; A! ?1 I
in thin films............................................................... 187% h' m) e% e3 m# Z/ i5 I  M
Gerard Berginc, Alexei A. Maradudin, [9 t5 p  f$ i! I$ {5 F7 k
6.1 Introduction.................................................................................187! ]8 {3 s# i8 z. {. @
6.2 Numerical Solution of Reduced Rayleigh Equations
- [, P) w# o( X+ y$ _2 mfor Scattering of Light From Dielectric Films With 1D
4 L( \6 U5 h! Y7 V+ FRough Surfaces...........................................................................189- l0 P1 L2 c3 a( F# T( A! D! b  [
6.2.1 A Film With a 1D Randomly Rough Vacuum-Dielectric$ F' |  n/ ?" R
Interface Deposited on the Planar Surface of a Perfect
) G* G7 k) h7 _8 p" OConductor..........................................................................1906.2.2 A Film With a Planar Vacuum-Dielectric Interface5 N4 }/ D2 |1 W" J3 I; ~) C! ^
Deposited on a 1D Randomly Rough Perfectly
* S7 |8 d% g! DConducting Surface ..........................................................196
. r; r/ F8 d/ g( T& t6.3 Reduced Rayleigh equations for the scattering of P- and- M# g5 F7 J4 D; @  W3 b
S-Polarized Light From, and Its Transmission through, a Film
2 S9 D- A6 e, n/ `, g2 NWith Two 1D Rough Surfaces ...................................................200
# M0 q; @9 h+ y% }7 q6.3.1 p-Polarization....................................................................203
$ W% e+ ~! ~# B6.3.2 s-Polarization ....................................................................207$ C6 u0 Y/ ?8 Z9 Q5 F
6.3.3 Results...............................................................................209
5 n0 i+ w4 Q! v! D6.4 Numerical Solution of the Reduced Rayleigh Equation
3 W- C. S' }4 a1 V3 nfor the Scattering of Light From a 2D Randomly Rough
9 D& n- ^0 H# R9 ~Penetrable Surface ......................................................................213
" Z& e# y/ c9 Z6.5 Scattering of Light From a Dielectric Film With a 2D Randomly
" Q" S6 ^3 g* ?Rough Surface Deposited on a Planar Metal Substrate.............216: b- D- }" y; O/ P. t6 c( q- n2 j
6.5.1 Scattering of Light From a Dielectric Film With a 2D2 Q0 ]/ W1 [' T- O! y
Randomly Rough Surface Deposited on a Planar Metal
1 X0 }0 |+ A6 X, eSubstrate............................................................................2183 Z* F- d/ v) u
6.5.2 A Dielectric Film With a Planar Interface With a
' {, t+ Z; g' y: l/ q( K: A& y: SDielectric Superstrate and a 2D Randomly Rough2 K. d1 p, D* b( t5 {
Interface With a Dielectric Substrate...............................224
" o  r6 _2 K7 m: h$ l# P6.6 Analytical Methods for the Scattering From a 3D Film With
$ b1 _! e7 o4 c; x% c3 m8 B$ M3 qRandomly Rough Surfaces .........................................................229
8 k& l, d9 l# C( y( m( Y6 r6.6.1 Definition of the Scattering Matrix..................................230
" j6 |( ?. H- M; A! B6.6.2 The SSA and the SPM for a 2D Rough Surface .............233
% D5 g; t7 c+ W1 R9 w( V6.6.3 The SSA and the SPM for Slabs With Randomly
  f- g) _0 U* j- V) @0 W7 s1 \Rough Boundaries ............................................................240
1 q& @9 j/ b$ @# [2 g6.6.4 Conclusions.......................................................................247
3 P, @; w0 h( o! v$ ^0 |6.7 Theoretical Methods for the Scattering of Polarized Light/ h, j6 e- O0 K+ z. f3 B
From Randomly Rough Interfaces and Random Media............247
) ^8 R0 e. Y$ M. m/ G6.7.1 Specific Intensity and Cross Section................................2488 t4 K+ U" W) K/ l2 y, h% t
6.7.2 Specific Intensity and Bethe-Salpeter Equations.............253
8 D# s' {( [8 n6.7.3 Effective Permittivity .......................................................2559 n2 }9 j/ D2 @* ^* J( c
6.7.4 Expression of the Intensity Operator P11 .........................256$ J" G7 F: H0 k& p) K; a8 w3 q
6.7.5 Expression for the Incoherent Intensity and the Green* W9 \7 s1 q8 o1 U9 \) ^
Tensors P11 .......................................................................259/ M. R  ~+ e! N
6.7.6 Coherent Backscattering...................................................265- j3 [! r6 d" H1 ?3 q" g; R9 d
6.7.7 Conclusion ........................................................................2733 b( U+ s4 |9 {  `2 o! P7 C
6.8 Applications ................................................................................273
; [& v/ y2 b* }$ B7 _' j$ [6.9 Conclusion ..................................................................................281
! t) J' U8 v, [8 e1 R- ?Appendix.....................................................................................281
. I. D( C, R8 @' U6 A' j& ^: x8 Eviii ContentsA.1 Definitions of the Scattering Matrices for a Single Rough: p& H1 b; y4 @" G- J. g
Surface ................................................................................281
0 K, I* l4 f+ SA.2 Mueller Matrix and Tensor ................................................282( E  L! m/ \4 Y9 o$ Z0 C: m) W+ d1 i! A
Acknowledgments ......................................................................284
8 d* b- d4 V$ K5 V& Q8 XReferences...................................................................................284$ I! ~3 ^. m8 n# C1 F% o: O
Further Reading ..........................................................................289
- L! l/ o$ M. U7 t+ ], ]8 J4 UCHAPTER 7 Optical properties of thin film materials at short
  J9 f- u8 m9 ywavelengths .............................................................. 291
; H% f( `9 X3 o) y$ [4 iJuan I. Larruquert
/ e9 t# ]4 M4 u6 M7.1 Introduction.................................................................................291( R, l$ |! {; D
7.2 Material Behavior Over the Spectrum .......................................2911 ^2 _8 N4 n1 ~5 u
7.3 Reflection and Transmission in Absorbent Materials ...............294
/ I4 D* L* h, j2 O" e! a3 x7.3.1 Roughness and Scattering ................................................296
8 P2 |( M5 @, P7 Q- p+ x7.4 The Optical Constants of Materials at Short Wavelengths .......299( Y, p6 R  ^6 H, ^# g( b
7.4.1 Interaction Mechanisms Between Photons
. c& n* K7 j6 o+ @$ _" w2 dand Matter.........................................................................299, e% M  m. L7 R% x, J5 R' D8 C
7.4.2 Transparency Cutoff of Dielectrics ..................................300+ X3 d. U( C$ g1 i# |; f1 [" y
7.4.3 Free Electron Metals ........................................................301
5 X1 D; [- h, ?" ?5 H5 t9 @. g7.4.4 Tightly Bound Electrons: Atomic Scattering
6 w" S# r& ?8 f  {: {8 t" M7 rFactors...............................................................................303
% @. S9 R5 S' {# h+ p7.4.5 Absorption Edges..............................................................306# k& p& L' g, {! ]* w0 M
7.4.6 Optical Properties at Higher Energies..............................3097 b. y) b4 z# d4 |8 [: K
7.5 Link Between n and k: Kramers-Kronig Analysis.....................3149 e4 u8 Q7 A/ |0 X; I" R. s
7.6 Experimental Determination of Optical Constants ....................3150 n9 ]; L- J& u' P$ t- t9 X
7.7 Specifics of Optical Coatings at Short Wavelengths.................3189 [7 v! ]  G% o3 p
7.7.1 Transmission Filters .........................................................318
$ C2 y1 W# t! u5 s: U7.7.2 High-Reflectance Coatings...............................................3218 B' _" {; x7 F4 N; a
7.7.3 Linear Polarizers and Phase Retarders.............................332( |* ~+ d6 Q. h
7.8 Conclusion ..................................................................................341+ \8 m5 j2 v+ _' s
Acknowledgements.....................................................................3420 q2 ?7 C; U7 y. W9 k7 o6 t
References...................................................................................342
4 B, n: W3 B1 m! SCHAPTER 8 Controlling thermal radiation from surfaces............ 357
2 d: r- y6 P1 o/ dCarl G. Ribbing
/ J$ q5 z  s- H: o* t" S1 p8.1 Introduction.................................................................................3572 b+ @, V7 `; K0 J' v) s
8.2 Blackbody Radiation ..................................................................359% p1 T$ }9 Z: B* [5 [
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