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- Some Materials Science Aspects of PVD Hard Coatings
复制代码 Christian Mitterer1 and Paul H. Mayrhofer2; Y' ]5 F1 b* j( C7 `1 \
1 Materials Center Leoben, Department of Physical Metallurgy and Materials" v4 X( u: u# Z1 a5 X
Testing, University of Leoben
+ B* W! q- i/ Y5 NFranz-Josef-Strasse 18, A-8700 Leoben, Austria! E6 b& d" J" [8 b8 u
2 Department of Physical Metallurgy and Materials Testing, University of Leoben
# c2 K7 u$ k- D& n5 h: E' e4 aFranz-Josef-Strasse 18, A-8700 Leoben, Austria
7 \9 E& l5 a* K+ h9 bAbstract. Hard coatings deposited by Physical Vapor Deposition (PVD) based5 o; x3 Q7 C7 f% R# U; y1 N0 _
on the transition element nitrides are nowadays widely applied to reduce wear and; A6 R7 P' B) b: G4 ]
corrosion of tools. In the last two decades, tremendous advances have been achieved
6 r% T& ]' _: l. D! G8 {: |5 |" {in the development of deposition and application technology of hard coatings. The
7 D. w/ q/ h+ L' |5 p6 M5 Imethods to be applied to optimize coating properties are known from materials+ ~0 b2 Z+ P4 e; x
science, however, only in the last few years significant attempts have been made
* H! _& M$ o" K+ K/ H) Fto use them for designing coatings showing the properties required. The aim of
7 i. j1 x& [3 ?* gthis paper is to show the interrelationships between microstructural parameters1 q& h, \+ k) q; t' s" E4 C8 ^
like grain size or microstress and mechanical coating properties and their thermal" p; @* W! C8 b/ s" w
stability. This is demonstrated using conventional coating systems like TiN and
4 \( D: H2 N* q6 ]3 u4 Z$ j/ SCrN as well as nanocomposite coating systems like TiN–TiB2 and TiC–TiB2. |
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