基于紫外-可见透过谱的薄膜厚度计算研究

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基于紫外-可见透过谱的薄膜厚度计算研究张海波[1] 康建波[2] 孙辉[2] 杨定宇[2] 朱兴华[2][1]成都信息工程学院网络工程学院,四川成都610225 [2]成都信息工程学院光电技术学院,四川成都610225摘　要:测试和控制薄膜的厚度是制备高质量薄膜材料的重要步骤之一。本文根据光谱透过率波动曲线与薄膜厚度间的内在联系,基于曲线拟合方法设计开发了一款计算软件,该程序能读取测试光谱数据并自动计算出薄膜厚度和折射率,程序计算结果与台阶仪测试结果吻合较好,证明本文所开发的软件是正确有效的。[著者文摘]

6 ?% E- }+ ?6 X# ~6 o关键词:紫外-可见透过谱 薄膜厚度 曲线拟合 程序设计
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8 v8 i) f4 V; W& J分类号:　TN304[著者标引]
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* z" t6 G$ j" D+ Q- _文章编号：1673-159X（2010）06-0070-03
栏目信息：材料科学
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Research on the Calculation of Film Thickness Based on UV-visible SpectrumZHANG Hai-bo,KANG Jian-bo,SUN Hui,YANG Ding-yu,ZHU Xing-hua1.School of Network Engineering,Chengdu University of Information Technology,Chengdu 610225 China;2.School of Optoelectronic Technology,Chengdu University of Information Technology,Chengdu 610225 ChinaAbstract:The measurement and control of thickness are important steps in the deposition of high-quality films.At present,the film thickness obtained by UV-visible spectra is widely used as a non-invasive method.According to the inherent relationship between the interference fluctuation of UV-Vis transmission and the film thickness,a kind of software was designed based on certain algorithm and fitting method,which can read data of UV-Vis spectra then automatically calculate and output film thickness and refractive index.It is found that the procedure result is in good agreement with the measurement of surface profile,showing considerable reliability.[著者文摘]
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Key words:UV-visible spectrum; film thickness; curve fitting; program designing

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