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CCD Image Sensors in Deep-Ultraviolet
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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) 2 [& y$ x! B. [# G
by Flora Li and Arokia Nathan9 k& f7 S& e1 {1 b
Hardcover: 231 pages 7 h5 k+ [8 ^. L! T; i
Publisher: Springer; 1 edition (April 19, 2005) , K8 y/ `3 O. C. i1 V" ]4 I- H0 i
Language: English 7 Y- @" P: ?3 O# N, n
ISBN-10: 354022680X ( b+ A) m T, Y
ISBN-13: 9783540226802" K* \+ o9 D$ T! c+ d
Product Description
" T9 k: z1 q" E& r8 c* W' m% P9 {In order to facilitate the inspection of deep sub-micron features in integrated circuits, a new generation of semiconductor inspection systems is being pushed to new limits to image at ever shorter wavelengths - using deep-UV (DUV) sensitive cameras. However, conventional CCD cameras have very poor responsivity in the DUV and their stability upon prolonged DUV exposure is a relevant concern. This book investigates the causes of CCD degradation and the damage mechanisms due to DUV exposure, as well as reporting new results for device performance at these wavelengths." R7 B1 f4 d+ e" D
http://www.filesonic.com/file/22379257/354022680X.rar |
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