|
|
CCD Image Sensors in Deep-Ultraviolet: h$ a! E# k7 k L
图片：
. |$ c( A8 Z- M; p
" @0 w; B3 s$ P! l, _ & G% K; | d2 V; [. k: n1 k
CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) - ?3 p1 S" K3 V, X7 S5 B6 `, p
by Flora Li and Arokia Nathan
. m& H) w( d" T$ x1 \, Q7 yHardcover: 231 pages + u: n+ W+ C8 }: [ ]9 S% d
Publisher: Springer; 1 edition (April 19, 2005) 5 c' z4 t/ Q2 B: H( o
Language: English
# d: N9 p* j& \ISBN-10: 354022680X
. F$ h1 F/ Q6 ?9 `4 vISBN-13: 97835402268029 d! l$ N% [( E5 l
Product Description
3 e# \2 X6 X8 PIn order to facilitate the inspection of deep sub-micron features in integrated circuits, a new generation of semiconductor inspection systems is being pushed to new limits to image at ever shorter wavelengths - using deep-UV (DUV) sensitive cameras. However, conventional CCD cameras have very poor responsivity in the DUV and their stability upon prolonged DUV exposure is a relevant concern. This book investigates the causes of CCD degradation and the damage mechanisms due to DUV exposure, as well as reporting new results for device performance at these wavelengths.% M- m) ^. }2 b( U& S
http://www.filesonic.com/file/22379257/354022680X.rar |
|
窥视卡
雷达卡
发表于 2010-10-4 00:25:55
提升卡
置顶卡
沉默卡
喧嚣卡
变色卡
抢沙发
显身卡
