可见光＋1.54μm激光/长波红外分色片的设计和制备

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可见光＋1.54μm激光/长波红外分色片的设计和制备
章岳光 王颖 孙雪铮 沈伟东 刘旭 顾培夫浙江大学现代光学仪器国家重点实验室,浙江杭州310027摘　要:可见＋1.54μm激光/长波红外分色片分离可见光、激光和长波红外光,在多通道成像光学系统中起着重要的作用.分析了分色片基板和薄膜材料的选择,优化设计并用电子束蒸发法制备了该分色片,其反射率和透射率都达到了94%以上,已成功应用于实际光学系统.[著者文摘]
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关键词:光学薄膜 分色片 多通道成像技术
分类号:　TB443[著者标引]文献标识码：A文章编号：1001-9014（2009）04-0307-04栏目信息：
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( V0 C7 G; g/ \. H) W- u  uDESIGN AND FABRICATION OF VISIBLE ＋ 1.54μm LASER/ LONGWAVE INFRARED DICHROIC BEAMSPLITTERZHANG Yue-Guang, WANG Ying, SUN Xue-Zheng, SHEN Wei-Dong, LIU Xu, GU Pei-Fu State Key Laboratory of Modem Optical Instrumentation, Zhejiang University, Hangzhou 310027, ChinaAbstract:Visible ＋ 1.54μm laser/longwave infrared dichroic beamsplitters, which separate the incident spectrum into visible light, laser and longwave infrared light, take an important role in multichannel imaging spectrum technique. The choice of substrates and coating materials was discussed. Then the coating design of reflecting the visible（400 - 800nm） and laser （1540nm） light while transmitting the longwave infrared （8 - 12μm） spectrum was analysed, and the beamsplitter was manufactured by e-gun evaporation. The measured reflectivity and transmittance of the corresponding channel are all above 94% and the dichroic beamsplitters has been used in practical optical system successfully.[著者文摘]

Key wordsptical thin film ; dichroic beamsplitter; multichannel imaging spectrum technique