关于类金刚石膜

风往南吹213

  那位大侠有关于类金刚石膜的制备工艺 例如在锗片上
非常感谢！

fanyushan

我有，问题是你的设备是什么设备，用什么方法镀制

xx_912

金刚石薄膜生长速度研究王传新[1,2] 汪建华[1] 满卫东[1,2] 马志斌[1] 王升高[1] 傅朝坤[3] 李克林[3] 康志成[2][1]武汉化工学院湖北省微波等离子体化学与新材料重点实验室,武汉430073 [2]中国科学院等离子体物理研究所,合肥230031 [3]自贡硬质合金有限公司,自贡643011摘　要:在电子辅助热丝CVD中，研究刀具预处理对金刚石薄膜生长速度的影响。在保持生长条件不变的前提下，经酸腐蚀处理的刀具的侧、背面镀铜能使金刚石薄膜的生长速度从没有镀铜时的4μm／h增加到镀铜后的10．6μm／h。镀铜处理提高了刀具的电导率，使得热丝发射的电子在偏压电场的作用下，在刀具表面附近聚集，加速氢气和丙酮的裂解，从而提高金刚石薄膜生长速度。SEM和Raman测试结果表明，高速生长的金刚石薄膜仍然具有很高质量。[著者文摘]

关键词:金刚石薄膜 生长速度 镀铜 硬质合金
分类号:　O484.1[著者标引]文献标识码：A文章编号：1007-4252（2005）04-0427-04栏目信息：论文
相关文献:主题相关

Growth of CVD diamond thin films with high growth rateWANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, MA Zhi-bin, WANG Sheng-gao, FU Chao-kun, LI Ke-lin, KANG Zhi-cheng 1. Province Key Laboratory of Plasma Chemical ＆ Advanced Materials, Wuhan Institute of Chemical Technology, Wuhan 430073, China; 2. Institute of Plasma Physics the Chinese Academy of Sciences, Hefei 230031 ,China; 3. Zigong Cemented Carbide Corp, Ltd, Zigong 643011, ChinaAbstract:The effects of the pretreatment of cutting tools substrate on the growth rate of diamond film were studied by using electron assisted hot filament chemical vapor deposition. The growth rate of diamond film on the flank and back of the cutting tools can be improved from 4.0μm/h only with acid etching pretreatment to 10.6μm/h with acid etching and then plated a thin copper film under same growth conditions. The plating copper can increase the conductivity of the cutting tools and help concentration of the electrons come from the hot filament around the surface of cutting tools under the bias voltage. These electrons accelerate the decomposition of hydrogen and acetone and result in the increase of growth rate of the diamond films. SEM images and Raman spectrum show that the diamond films prepared with high growth rate have high qualities.[著者文摘]
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Key words:diamond film ; growth rate ; copper plating ; cemented carbide

fanyushan

矩形直流离子源，电离乙炔气体，锗基地上加射频偏压应该可以。