沃拉斯顿棱镜可见光区减反射膜研制

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沃拉斯顿棱镜可见光区减反射膜研制
" h) p) p  ]; @9 V8 w" S郝殿中 吴福全 王召兵 宋连科 刘涛 李国华曲阜师范大学激光研究所,山东曲阜273165摘　要:为了提高镀膜材料和冰洲石基底的附着力以及提高棱镜的透过比，拓宽有效使用带宽，借助于计算机辅助设计方法，设计了高性能多层减反射膜系；选用合适的光学薄膜材料，利用电子束蒸镀，借助于离子源辅助蒸镀，制作了高性能的宽带减反射膜．测试结果表明：e光，o光的平均剩余反射率小于0．5％，有效使用带宽覆盖可见光区；为了改善薄膜和基底问的附着力，采用Al2O3做过渡层。[著者文摘]
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关键词:薄膜光学 薄膜 沃拉斯顿棱镜 减反射膜 附着力 带宽
分类号:　O484.4[著者标引]文献标识码：A文章编号：1005-0086（2008）08-1143-02栏目信息：研究简报
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$ A/ J2 \: [2 v% O; ADevelopment of antireflection thin films based on wollaston prism in hole visible spectrumHAO Dian-zhong , WU Fu quan, WANG Zhao-bing, SONG Lian-ke, LIU Tao, LI Guo-hua Institute of Laser Research,Qufu Normal University,Qufu 273165,ChinaAbstract:In order to improve the adhesive power of coating materials to the Iceland crystal substraee and increase the transmittance and the bandwidth of the prism, a high-quality multilayer anti-reflecting coatings was designed. Suitable optical coating materials was evaporated by the dectron beam with ion assistance, and a broadband anti-reflecting film of high quality was obtained. The test results indicate that the average residual reflection of both e light and o light are below 0.5% ; the effective bandwidth covers with whole visible spectrum. In order to improve the adhesive power of the film to the substrate, Al2O3 was selected as the transition layer.[著者文摘]

Key words:film optical; thin film; wollaston prism; antireflection coatings; adhesion; bandwidth

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