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发表于 2009-2-25 02:04:17 | 显示全部楼层 |阅读模式
各位版主以及会员注意:近期举行发帖奖励新书活动!! 8 b$ W  R& u, M
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, h3 O" Z- p# l5 G6 x7 {2 h2 t/ z活动日期:2009.02.25-2009.03.30 # H# M0 s  o- I) I4 d/ ~4 \( W
xx_912 $ i6 p0 }" Q: L" ^: D3 Y
2009.02.24
7 P/ T5 ?- k( H2 Z1 L" l. r: ?0 X
奖励新书名称: 2 R; G' g" ]4 r! z$ ~/ H& |9 B
Practical Design and Production of Optical Thin Films Second Edition, Revised and Expanded
+ _8 f( `3 w- K8 ?3 j+ u目录:
1 s% Q& C6 u, O$ o; k
2 X0 a+ _' q1 ^3 ~% t1 Fundamentals of Thin Film Optics and the
2 w) I+ {% N/ i9 d  i5 m/ u7 \Use of Graphical Methods in Thin Film Design......................!
& @/ K5 c  J* f7 ^1.1. INTRODUCTION .............................................................................................1 ! l5 L2 @1 f+ U/ |) n
1.2. REVIEW OF THIN FILM OPTICS PRINCIPLES ..........................................5
) q/ d; n$ a* w) R1.3. REFLECTANCE DIAGRAMS..........................................................................8 1 S6 o+ |8 J. h. x
1.3.1. Low Reflectors, Antireflection Coatings .............................................. 10
7 O0 t: D3 t5 f1.3.2. High Reflectors .................................................................................... 19
' |+ z1 t6 e8 a0 e1.3.3. Narrow Bandpass Pass Filters .............................................................22 $ x, Z$ M% m# n3 Q
1.3.4. Beamsplitters.........................................................................................30
: i0 o7 r) \& T1.3.5. Three-Layer AR Coating on Germanium, Example ..............................34 5 U/ {. d6 i( e' ?- ]; H2 r& M
1.3.6. Example Four-Layer Broad Band AR Coating in the Visible...............36
! K2 k. y; l5 ]2 U: O1.3.7. Physical Thickness versus Optical Thickness........................................36 1 P& v2 T& m" P7 ]- B
1.4. ADMITTANCE DIAGRAMS..........................................................................36 ! z+ b+ T5 T6 V6 c% t$ A4 {, t, R
1.5. TRIANGLE DIAGRAMS................................................................................39 / g2 ?8 b* x. a5 z0 ]6 r. ]
1.5.1. Designing Coatings with Absorbing Materials......................................40
5 m  ]6 r, G" M- E1.6. APPROXIMATIONS OF INDICES AND DESIGNS.....................................61 1 Y; n) E7 t. x9 b3 Y, i; H) k, J& l3 s
1.7. INHOMOGENEOUS INDEX FUNCTIONS ..................................................65
0 J! {  R+ ?$ Y: R( _- U# Q1.7.1. Low Index Limitations..........................................................................74 - m5 }1 o' M7 a- Z& n! ]/ E' n5 d
1.7.2. A Fourier Approach ..............................................................................77 ) d5 r6 p1 @8 i/ @
1.8. OPTIMIZATION.............................................................................................83
, w& m1 Q+ q+ \/ ?0 P1.8.1. Performance Goals and Weightings ......................................................84 4 c2 \6 [6 N5 {  F* K
viii Contents ; N4 s% q5 l# E& W% `. S
1.8.2. Constraints ............................................................................................85 ( {, }( J) z8 _$ J. i
1.8.3. Global versus Local Minima.................................................................85
4 y/ n: i, D) N2 x1.8.4. Some Optimizing Concepts................................................................... 86
$ g9 m. i/ O3 ~$ y. n. B3 C1.9. SUMMARY.....................................................................................................88 8 D7 O/ G' L) p" }& g
1.10. REFERENCES............................................................................................... 88
- ?3 V9 l4 I  S2 Estimating What Can Be Done Before Designing...............91 / @5 n1 Q  j/ C6 ?$ E* [% T
2.1. INTRODUCTION............................................................................................91 / F- l0 K) n# a
2.2. ANTIREFLECTION COATINGS ...................................................................91 1 V. }) y4 \3 Z  D( }
2.2.1. Procedure ..............................................................................................92
& b) j! F. ?8 B2.2.2. The Formula..........................................................................................93 ( b5 t8 v: J- Z3 d2 z4 A& a* ~: G7 y  R4 t
2.2.3. Results...................................................................................................95 , P2 g4 e& G3 V7 B
2.2.4. Summary of Antireflection Coating Estimation .................................. 101
7 Z$ D0 }! Z0 ^9 I0 {2.3. BANDPASS AND BLOCKER COATINGS ................................................. 101
) d* k1 u' [' x& x2.3.1. Estimating the Width of a Blocking Band........................................... 102 6 I' Q/ \( s- L# O3 G1 B# G- ^5 i
2.3.2. Estimating the Optical Density of a Blocking Band............................ 104
9 q% `" R7 N& d2 T0 M$ O! j2.3.3. Estimating the Number of Layers and Thickness Needed................... 105 * ]  K0 Z0 K# w0 K5 b( x' L" c
2.3.4. Estimating More Complex Coatings ................................................... 105
2 T2 x! L$ e! E$ }! q: w& z" ?2.3.5. Estimating Edge Filter Passband Reflection Losses............................ 111 0 K3 P/ X, c  Z( J( P  Z
2.4. DICHROIC REFLECTION COATINGS ...................................................... 121 8 v+ f% I7 b: i7 M4 i3 w
2.5. DWDM FILTERS.......................................................................................... 123 + m5 i% m! v9 o: L& m
2.6. SUMMARY................................................................................................... 127
5 s2 \9 {6 w; P  s2.7. REFERENCES............................................................................................... 128 , k; y2 d. L" Z
3 Fourier Viewpoint of Optical Coatings..............................129
  w. O& {- _- E) B9 v# D' B3.1. INTRODUCTION ......................................................................................... 129 ' j7 Z( j4 d: A8 X7 p* S2 n) \
3.2. FOURIER CONCEPTS ................................................................................. 129 1 H7 U5 Z( w5 T: Q
3.2.1. Background.........................................................................................130
, D+ A" D$ u5 p3.2.2. Some Limitations ................................................................................ 134 . Y& b5 t' t# o2 \# ?7 Z( Y
3.2.3. A Method to Determine the Multiple Reflections............................... 137
: P" o; a* D* p* ]% z3.2.4. Overcoming Low Index Limitations with Thickness........................... 139 ( ]7 r, Z& R1 \+ e# q; [
3.3. DESIGNING A VERY BROAD BAND AR COATING............................... 147
! f, B- |( k3 s+ e3.4. CONCLUSIONS............................................................................................ 148 6 U4 }# @: i, t* G3 M7 q  F
3.5. REFERENCES .............................................................................................. 149 7 X$ B/ T# i; z. [: a: ]
4 Typical Equipment for Optical Coating Production ........150
" W8 r0 w$ z: K5 O6 c. x4.1. INTRODUCTION..........................................................................................150 / B- `8 K' m2 Q) `2 n1 `  D' a
Contents ix
. M+ U/ J: H9 e3 o1 s6 g4.2. GENERAL REQUIREMENTS...................................................................... 151 * I0 Q& s' A! T+ A/ B& E
4.2.1. The Vacuum........................................................................................ 152 . [" ?, `; n6 g) h* j
4.2.2. Evaporation Sources............................................................................ 167 4 ?' M/ l( H( T: G' Z
4.2.3. Fixturing and Uniformity.................................................................... 191
6 G6 H/ [. N7 }4.2.4. Temperature Control...........................................................................201 . ~2 N7 Q1 u& b6 }4 F8 v" h+ M
4.2.5. Process Control...................................................................................205 9 Y% T+ J1 @4 f
4.3. TYPICAL EQUIPMENT...............................................................................208 8 B# v# b6 O- X' [2 F$ `
4.4. ALTERNATIVE APPROACHES .................................................................213 + j4 q" J! Z0 ?$ L
4.5. UTILITIES.....................................................................................................213
- i6 x1 v9 \6 o7 f4.6. REFERENCES...............................................................................................215 # o5 O4 F! \' P- Y! A
5 Materials and Process Know-How .....................................221 . N/ R9 y4 O3 Q+ |! t! E* @9 N
5.1. INTRODUCTION ........................................................................................221
3 f2 ^) S: ]" s' q8 b% a/ z( f5.1.0. Measuring Spectral Results in the Real World...................................222
. J8 L. a$ |7 F2 \5.1.1. Index ofRefraction Determination.....................................................232
+ {2 n! N9 f0 }) N, c7 r+ u5.2. PROCESS KNOW-HOW.............................................................................243
& T/ X  P" H" v, T+ A- G5.2.1. Film Growth Models and Observations...............................................244 % Q& s) z! a  _4 V7 H! r/ x% R$ N
5.2.2. Chiral and Sculptured Coatings...........................................................249
4 q3 {/ e" d* m$ k+ u5.2.3. Stress in Coatings................................................................................249 5 q5 R# x2 a' j, T( H. ]" L
5.2.4. Laser Damage in Coatings...................................................................252
" e, `  l  g5 m: K5.2.5. Rain Erosion of Coatings ....................................................................255 ! U' R9 Z/ j. D3 P( q2 J8 [2 d
5.3. MATERIALS................................................................................................257
" S( c: e- z+ c: G7 f8 E* G5.3.1. Some Specific Materials.....................................................................258 3 F: ?+ k" I4 M8 A" f* K$ ]
5.4. ION SOURCES............................................................................................. 308 0 e8 F, e2 N$ g2 v% G9 A
5.4.1. Cold Cathode Source.......................................................................... 310
) Z/ `: p0 u! m" U9 Q/ ^5.4.2. End-Hall Source.................................................................................312
5 p! X: m- Y( m; e/ z" C: P$ Y2 p5.4.3. PS1500 Plasma/Ion Source................................................................315 7 A! K3 l1 x: O- z7 v. T, b* L4 {
5.5. OTHER PROCESSES TO CONSIDER .......................................................328 3 D) X  H8 \1 z
5.5.0. Surface Preparation and Cleaning......................................................328
0 @. {) _. H8 N& Q5.5.1. Physical Vapor Deposition.................................................................329
2 U2 F7 e- ^! e" t& H5.5.2. Dip, Spin, and Spray Coatings ...........................................................330
3 }% g5 a" \4 x# K7 a: v5.5.3. Chemical Vapor Deposition ...............................................................331
+ t) S9 v, v" E( o, D) B5.5.4. Plasma-Enhanced CVD......................................................................331 " O6 }% }% v' m- f7 k8 N# ]
5.5.5. Plasma Polymerization.......................................................................332
) c$ l; G8 X) E! f8 b3 [5.5.6. Hard Carbon Coatings........................................................................333
  h; U: c$ Y% G  d3 `% c+ B: X5.6. SUMMARY..................................................................................................334 $ j) k1 r; J# N( ^+ @0 {3 _
5.7. REFERENCES..............................................................................................335 , v: ?! l. U4 B5 u3 T/ o6 x
6 Process Development ...........................................................360
4 A7 V; u* E) l. T& [* P6.1. INTRODUCTION ........................................................................................360 / q0 T$ ]. Y. z- Z5 q' w! k
6.2. DESIGN OF EXPERIMENTS METHODOLOGY .....................................364 5 C! V2 U2 s$ h/ I1 @$ T( v$ [% b
Contents 3 q1 V# M- s$ a5 y# C7 n
6.2.1. Process Flow Diagram .......................................................................364 1 h6 ]# X' y9 O" c+ m0 P3 l* q
6.2.2. Cause-and-Effect Diagram ................................................................366 6 E$ e: c/ A. Q2 M
6.2.3. Control, Noise, or Experiment ..........................................................366 6 J5 w1 X* E5 k* d/ F* d" d. h$ s
6.2.4. Standard Operating Procedures .........................................................369 + ^" w( s0 w4 U% {. B
6.3. DESIGN OF THE EXPERIMENTS: EXAMPEES......................................369 + h. ]$ y* v  f/ X
6.3.1. A Central Composite Design for Aluminizing ...................................371 / B: |. X1 h" i# \4 C5 i
6.3.2. A Box-Behnken Design for IAD Deposition of TiO2 ........................375 - J! `% |( J' `% V) S/ a8 b
6.4. SUMMARY..................................................................................................381 - k" _! T: K3 R5 |8 q
6.5. REFERENCES .............................................................................................381
" @2 S- p. C" u% `7 Monitoring and Control of Thin Film Growth .................382
) v% Y' d1 X0 b6 x7.1. INTRODUCTION.........................................................................................382
( s9 c6 A' J0 ]$ D& N7.2. EFFECTS OF ERRORS ...............................................................................384 6 ?# h: [0 ~* _- ~) ?# U7 u
7.3. WAYS TO MONITOR.................................................................................388
, l  G& b& m6 l) G" @7.3.1. Measured Charge.................................................................................388
7 n( E8 @) r0 g& k5 m3 N7.3.2. Time/Rate Monitoring.........................................................................390
" c/ ?/ f" W/ x3 u9 U7.3.3. Crystal Monitoring..............................................................................391 ! e/ ]0 f! k  `0 s
7.3.4. Optical Thickness Monitors ................................................................392
2 x8 _! @6 r  r! V' `" w8 k7.3.5. Trade-offs in Monitoring.....................................................................398
3 G* r, K% S3 m" B; m) s7.4. ERROR COMPENSATION AND DEGREE OF CONTROE......................400
) X& [6 y! a4 y% J0 [7.4.1. Narrow Bandpass Filter Monitoring....................................................401
  i2 {* p! Q2 C' k0 G7.4.2. DWDM Filter Monitoring...................................................................405 , V# I/ p) t2 f; w# }) R4 n
7.4.3. Error Compensation in Edge Filters....................................................427 ) `# U0 A: t/ y1 }# w9 L
7.4.4. Broad Band Monitoring Compensation ..............................................428
, C5 v; V' e( E: J# }7.4.5. Effects of Thin Film Wedge on the Monitor Chip............................... 429 2 G$ z& c  e4 o8 d  [' }% E8 v
7.4.6. Error Due to Width of the Monitoring Passband.................................431 : ^3 d" |8 F2 {
7.5. CALIBRATIONS AND VARIATIONS .......................................................433
' ^6 X" j9 d$ y0 f( N7.5.1. Tooling Factors ...................................................................................434 ( S/ W  X- t" B0 y" }1 b2 E" h1 U
7.5.2. Variations............................................................................................435 ' K+ ^. m& i1 |, ^4 v& [  V
7.5.3. The Optical Monitor with Crystal Method of Schroedter....................436
* X5 P) [9 g1 v7.5.4. Suggestion for Computer-Aided Monitoring ......................................438
" N$ q; P1 E5 O- {  _2 I  j* G7.6. SENSITIVITY AND STRATEGIES ............................................................439
" a% d  }* u' a; ?! v, ~7.6.1. Sensitivity versus Eayer Termination Point in Reflectance.................440 . q1 e2 i  t! w4 D% `3 x0 r( p. U' ]
7.6.2. Sensitivity versus g-Value...................................................................441
5 N. d. m2 i5 W7 t7.6.3. Precoated Monitor Chips.....................................................................445 / b0 d8 N! _6 z( }5 f: P
7.6.4. Eliminating the Precoated Chip...........................................................445
" v' z# w: o8 O# `% b3 T7 T* x+ G7.6.5. Constant Level Monitoring Strategies.................................................453
+ C/ @% @* t* I( w; X7.6.6. Steering the Monitoring Signal Result ................................................458
. N& N* N5 x  r$ b7.6.7. Variation of Band-Edge Position with Monitoring Errors ..................467 , O2 T' l) n; c3 Z$ o7 T3 Y
7.6.8. Almost Achromatic Absentee Layers ..................................................476
. [! d* m9 n) k/ L4 Q. G* l2 m* z7.7. PRACTICAL CONSIDERATIONS .............................................................479 5 o! K) r& L' H5 F0 \
7.7.1. A Narrow Bandpass Filter...................................................................479 1 g8 D$ y2 I5 o4 I- `, [- g
Contents
" F, }" Y% K8 D" m6 d7.7.2. A Special "Multichroic" Beamsplitter.................................................480
9 h. {7 f- C' I. l0 Q: q9 F7.7.3. A Very Broadband Antireflection Coating..........................................481 8 |- ^$ c. k; U
7.7.4. Single Beam versus Double Beam Optical Monitors..........................488
. H& D# C3 Q& T1 o. ?6 B: q6 [7.7.5. Automation versus Manual Monitoring ..............................................489
2 A& O; c" i9 b" c9 _, V7.8. SUMMARY...................................................................................................491 , ^  t1 {8 B8 f( C
7.9. REFERENCES...............................................................................................492 ' S% s8 H7 d) g0 {0 b$ Q( V
Appendix: Metallic and Semiconductor Material Graphs .............................. 497
, {+ {* e5 G- }: i# F, G! u' jA.I. INTRODUCTION ............................................................................ 497
+ q, V; |$ s- }0 k' f5 {$ `Author Index..................................................................................................... 513 # B! l9 y" V0 U8 u  K( j) |# h
Subject Index.................................................................................................... 529

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发表于 2009-3-6 02:05:03 | 显示全部楼层
我是新来的,收到消息...
0 u  M1 \2 O1 r1 k9 ]! ]; ]! T( P 期待意外.期待奇迹
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发表于 2009-3-6 20:04:50 | 显示全部楼层
收到。谢谢斑竹!
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发表于 2009-3-12 02:40:52 | 显示全部楼层
收到了,
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发表于 2009-3-12 17:43:07 | 显示全部楼层
看来比较难得到啊..
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发表于 2009-3-25 02:10:22 | 显示全部楼层
谢谢啊
% }3 G8 P0 U! K4 `2 f: j6 l# P2 e会努力的
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发表于 2009-3-28 17:00:15 | 显示全部楼层
xiexie                             谢谢   非常感谢
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发表于 2009-4-9 18:48:46 | 显示全部楼层
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期待精彩!
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发表于 2009-4-14 20:07:22 | 显示全部楼层
新来的,刚收到,期待,不过好像是英文版的哦
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发表于 2009-4-18 23:22:49 | 显示全部楼层
Could you send me this book?4 e7 M0 C+ V- k  ^4 c$ F+ }  G
Thanks a lot/ m/ l) j5 }  {. _; _
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My email is newssg-mail@yahoo.com1 f" l1 }* h1 d0 {9 n5 G; t

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  o4 G3 ?& w4 d& Bredarmy123
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