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3 ?! R; V, j, F2 {) N! y' z活动日期:2009.02.25-2009.03.30
) V2 D1 O' [ ^1 G n! Fxx_912
4 K5 Z! ?- I: ^- G9 v4 _8 b: j2009.02.24 f# y: m0 H) q$ g
奖励新书名称:
# y0 d$ J+ x) h6 ]( MPractical Design and Production of Optical Thin Films Second Edition, Revised and Expanded
* l3 A' U& b5 t1 O* U目录: " c5 ^/ g8 r2 Y2 v0 z4 N$ U
0 |/ ~, M! {5 t% Z4 z1 Fundamentals of Thin Film Optics and the + Z+ v, H! U7 p/ P S
Use of Graphical Methods in Thin Film Design......................! ! o) P2 V0 U0 ?, K% I& _* O
1.1. INTRODUCTION .............................................................................................1 ! x0 r! [9 B( M
1.2. REVIEW OF THIN FILM OPTICS PRINCIPLES ..........................................5 2 T% |$ [3 z* G! F V
1.3. REFLECTANCE DIAGRAMS..........................................................................8
$ K! @! E; Q3 Y& F1.3.1. Low Reflectors, Antireflection Coatings .............................................. 10
' t9 ]6 k, K, y1.3.2. High Reflectors .................................................................................... 19 * M8 g( z% r8 y1 X9 r. {3 K
1.3.3. Narrow Bandpass Pass Filters .............................................................22
' l: a5 `' V9 x, w1.3.4. Beamsplitters.........................................................................................30 , ]+ T* H2 W$ K* {' D
1.3.5. Three-Layer AR Coating on Germanium, Example ..............................34
/ u/ \# H: y* J4 @5 G7 S8 v% C1.3.6. Example Four-Layer Broad Band AR Coating in the Visible...............36
0 ~9 {1 x" H8 [1 c1.3.7. Physical Thickness versus Optical Thickness........................................36 0 X: c% u. X+ \: o7 o
1.4. ADMITTANCE DIAGRAMS..........................................................................36
- E; l7 D8 n- ^- @8 O) a& T1.5. TRIANGLE DIAGRAMS................................................................................39
+ ]: q5 G: {" ?1.5.1. Designing Coatings with Absorbing Materials......................................40
: k0 D) b9 e7 M+ ?; H5 p) e+ @1.6. APPROXIMATIONS OF INDICES AND DESIGNS.....................................61 $ \' |" I! a' t& E% ?% x8 ~
1.7. INHOMOGENEOUS INDEX FUNCTIONS ..................................................65 6 h( ]% a' p+ |& [/ ]( |
1.7.1. Low Index Limitations..........................................................................74 . w/ ]# @1 B( l5 ^. s1 _2 e$ z" @
1.7.2. A Fourier Approach ..............................................................................77 / N/ p* f+ v$ C4 _; L) p" S; w- {. J
1.8. OPTIMIZATION.............................................................................................83 + K4 F6 A3 F5 `& t/ {# \6 ?
1.8.1. Performance Goals and Weightings ......................................................84
+ E, C; D# o/ t( u7 b0 \viii Contents
+ i9 U9 ?1 T5 x3 i: S% K1.8.2. Constraints ............................................................................................85
0 Z& t) u# g4 L. i5 S- x# G1.8.3. Global versus Local Minima.................................................................85 8 S, p9 r2 u: E; ^2 `* I
1.8.4. Some Optimizing Concepts................................................................... 86
; \) S. S2 @) T" y. U; f' a1.9. SUMMARY.....................................................................................................88 ( K+ C" G0 N: X- C
1.10. REFERENCES............................................................................................... 88 ' A" Q9 h! n( S4 X. \4 ]% J
2 Estimating What Can Be Done Before Designing...............91 1 q7 {1 V. \3 `0 K
2.1. INTRODUCTION............................................................................................91
U! G% x0 X. O7 Y2.2. ANTIREFLECTION COATINGS ...................................................................91
: j' n5 i$ P1 c" e2.2.1. Procedure ..............................................................................................92 ; u! M, S1 x. R# U* U9 j
2.2.2. The Formula..........................................................................................93
3 }8 H1 p; {8 e4 G+ o0 y2.2.3. Results...................................................................................................95 5 ? }1 q1 d$ P3 Y, j! E( h& {
2.2.4. Summary of Antireflection Coating Estimation .................................. 101 $ P: {5 n6 a% N8 p2 E
2.3. BANDPASS AND BLOCKER COATINGS ................................................. 101 + N0 p" f+ H8 c: I
2.3.1. Estimating the Width of a Blocking Band........................................... 102 : a- ~& Q( G: N
2.3.2. Estimating the Optical Density of a Blocking Band............................ 104
+ T& f3 D6 _, e% A2.3.3. Estimating the Number of Layers and Thickness Needed................... 105
. n: i7 K5 Z( w# L2.3.4. Estimating More Complex Coatings ................................................... 105 3 P& M" u2 N, F
2.3.5. Estimating Edge Filter Passband Reflection Losses............................ 111
6 D; D9 N7 u) f. J) n, j2.4. DICHROIC REFLECTION COATINGS ...................................................... 121 $ A2 `' ]- W& M
2.5. DWDM FILTERS.......................................................................................... 123 # }6 s7 t& n2 A( @
2.6. SUMMARY................................................................................................... 127
& u" r& [' ^1 G" w' ~/ N, Z2.7. REFERENCES............................................................................................... 128
: \2 W' l8 u! i5 J9 F, p3 Fourier Viewpoint of Optical Coatings..............................129 ! C& L( M: G# q, ?
3.1. INTRODUCTION ......................................................................................... 129
/ m d# U; C9 D% O3.2. FOURIER CONCEPTS ................................................................................. 129 " i2 j( o) |: k- c0 U7 a" W# Q8 J
3.2.1. Background.........................................................................................130 6 K7 C7 e6 V. n# I
3.2.2. Some Limitations ................................................................................ 134
* [; E& \5 H! Z: j2 r/ r3.2.3. A Method to Determine the Multiple Reflections............................... 137 r' w) ~! X8 M, Y3 f1 |, n
3.2.4. Overcoming Low Index Limitations with Thickness........................... 139 ) _0 R- r+ W6 v7 _
3.3. DESIGNING A VERY BROAD BAND AR COATING............................... 147
8 U! T8 ]! @2 ~5 T3.4. CONCLUSIONS............................................................................................ 148
) r3 p }0 d$ y. J2 e+ n3.5. REFERENCES .............................................................................................. 149
; Q2 S) a8 p1 I) ?! M/ d/ ?% N4 Typical Equipment for Optical Coating Production ........150 6 M2 V+ i3 Z, C
4.1. INTRODUCTION..........................................................................................150
3 |. J8 }- g* H" BContents ix
: d4 N9 ^9 x" e8 o8 ^. ~" ]4.2. GENERAL REQUIREMENTS...................................................................... 151 # R2 k( w& C n8 x V' |
4.2.1. The Vacuum........................................................................................ 152
, ]2 {! Z2 W; a3 w4.2.2. Evaporation Sources............................................................................ 167
6 D1 K! z2 v6 x1 A: y* y. V8 G5 Z4.2.3. Fixturing and Uniformity.................................................................... 191 % A9 I2 J. l9 k% c& T
4.2.4. Temperature Control...........................................................................201 2 x- p$ i- v1 g
4.2.5. Process Control...................................................................................205
+ H/ C% f- p6 U8 ^8 f4.3. TYPICAL EQUIPMENT...............................................................................208
2 ]4 D& f2 z& F5 j4.4. ALTERNATIVE APPROACHES .................................................................213
$ r5 G( p, C# j: j6 R4.5. UTILITIES.....................................................................................................213
3 d# O2 B- b1 R& o* N4.6. REFERENCES...............................................................................................215
4 ^9 g) A0 ~/ s1 g0 y y3 v3 l+ K5 Materials and Process Know-How .....................................221
7 a2 R$ q! f, j3 [. p" F A5.1. INTRODUCTION ........................................................................................221 5 u) Y. c0 g6 L: Z
5.1.0. Measuring Spectral Results in the Real World...................................222
$ y2 G4 ^# ^+ C) m5.1.1. Index ofRefraction Determination.....................................................232 ! s r2 Y/ T$ U( v
5.2. PROCESS KNOW-HOW.............................................................................243
1 V; a e# Z* ^5.2.1. Film Growth Models and Observations...............................................244
/ [% J( [5 h2 _5 ~4 J& F5.2.2. Chiral and Sculptured Coatings...........................................................249 ( k, \* d7 _7 I+ y2 @2 V% C
5.2.3. Stress in Coatings................................................................................249 $ B( U9 B6 L0 }# m, G
5.2.4. Laser Damage in Coatings...................................................................252 : t- c: c- i5 a: m$ F3 j& J7 ]
5.2.5. Rain Erosion of Coatings ....................................................................255
" Z1 A. F) Y" a, _% ]/ C5.3. MATERIALS................................................................................................257 6 n0 w6 }# @* z/ N
5.3.1. Some Specific Materials.....................................................................258 ' T o) ?& E! t8 H9 Y4 G
5.4. ION SOURCES............................................................................................. 308
0 E- `6 ^ g9 n5.4.1. Cold Cathode Source.......................................................................... 310 ; I; f. y! j" h U
5.4.2. End-Hall Source.................................................................................312 3 c- q, q( t1 ?5 ^
5.4.3. PS1500 Plasma/Ion Source................................................................315 : K" \3 r8 h5 ]. a v; L8 V% V( g# ^
5.5. OTHER PROCESSES TO CONSIDER .......................................................328
( ~0 E8 O3 ?: U5.5.0. Surface Preparation and Cleaning......................................................328
7 h# j% L6 i' E5.5.1. Physical Vapor Deposition.................................................................329 + j1 j6 {, d- d! V2 S
5.5.2. Dip, Spin, and Spray Coatings ...........................................................330 . ]6 c0 F; S- C u5 a- W* V* T; Z
5.5.3. Chemical Vapor Deposition ...............................................................331 ) l& z* f- a% l' [1 G" ~
5.5.4. Plasma-Enhanced CVD......................................................................331 3 w$ J& @1 R4 C6 j$ a0 n
5.5.5. Plasma Polymerization.......................................................................332 : S* ~$ q" ?, g+ o# S+ U+ N
5.5.6. Hard Carbon Coatings........................................................................333
& c3 C1 Z6 q6 w G1 O* C5.6. SUMMARY..................................................................................................334 \4 Y6 ~) n+ b% i( r' C/ y
5.7. REFERENCES..............................................................................................335 8 h H1 c# H+ M$ r3 z: v
6 Process Development ...........................................................360 ! ~/ u( j& W( S1 A, m
6.1. INTRODUCTION ........................................................................................360 Q- q- z5 V% r! Z
6.2. DESIGN OF EXPERIMENTS METHODOLOGY .....................................364 4 i' W' \- H! ~
Contents 9 h. b' T, i/ }; ?' W
6.2.1. Process Flow Diagram .......................................................................364
( ]4 b) y) J$ k* L6.2.2. Cause-and-Effect Diagram ................................................................366
) H$ `' ~, j! h4 M Y" r6.2.3. Control, Noise, or Experiment ..........................................................366
2 G& D5 }1 Z& K% u8 L' I3 @6.2.4. Standard Operating Procedures .........................................................369 0 R/ I5 E4 p N8 ]5 L# ^1 c
6.3. DESIGN OF THE EXPERIMENTS: EXAMPEES......................................369 . }, g4 A& ~0 ]* w& K o
6.3.1. A Central Composite Design for Aluminizing ...................................371
3 h( A# |: K0 l" r6.3.2. A Box-Behnken Design for IAD Deposition of TiO2 ........................375 / V ~& x) `2 v- v: j
6.4. SUMMARY..................................................................................................381 5 I6 w, G: l2 z( I$ M- ^, l3 f
6.5. REFERENCES .............................................................................................381
2 Z5 G7 w7 O+ E) P9 c7 e7 Monitoring and Control of Thin Film Growth .................382 + u8 `2 q+ _5 L$ A
7.1. INTRODUCTION.........................................................................................382
+ \ n B9 P7 \$ b9 [7.2. EFFECTS OF ERRORS ...............................................................................384 ' G2 O+ @0 F3 i
7.3. WAYS TO MONITOR.................................................................................388 " `, M) i; K, k6 N9 _& d' R
7.3.1. Measured Charge.................................................................................388 2 F$ Q3 Q# \, D0 _* y9 C
7.3.2. Time/Rate Monitoring.........................................................................390 9 a" v3 s+ a4 A! I1 S; }6 j
7.3.3. Crystal Monitoring..............................................................................391
y) k7 {. d: n* I0 G7.3.4. Optical Thickness Monitors ................................................................392
( P6 k$ X/ [" m! G4 ^; ], z7.3.5. Trade-offs in Monitoring.....................................................................398
6 ]! {& l; r' v L3 L0 n7.4. ERROR COMPENSATION AND DEGREE OF CONTROE......................400
+ W& m# t# U5 [7.4.1. Narrow Bandpass Filter Monitoring....................................................401
' H0 ^2 w: F# c7.4.2. DWDM Filter Monitoring...................................................................405
2 ?! @9 s8 Z) X/ d# j7.4.3. Error Compensation in Edge Filters....................................................427
- D# H& W4 Q, L- D7.4.4. Broad Band Monitoring Compensation ..............................................428
r7 \$ c; @" g+ r6 j- x2 p& m7.4.5. Effects of Thin Film Wedge on the Monitor Chip............................... 429 ( [/ l0 x$ i: x$ a% `' t3 |. ~
7.4.6. Error Due to Width of the Monitoring Passband.................................431
6 M# [( v7 Q0 g! I0 F7.5. CALIBRATIONS AND VARIATIONS .......................................................433 2 J( ~# C* ^: N, A5 J: z
7.5.1. Tooling Factors ...................................................................................434 ! o8 \0 i7 i5 n" t
7.5.2. Variations............................................................................................435 - }0 K. s0 ?5 E( L3 q
7.5.3. The Optical Monitor with Crystal Method of Schroedter....................436
[8 f! |5 Z* U( j7.5.4. Suggestion for Computer-Aided Monitoring ......................................438 6 `! x, a7 l# ~: X) l# n4 ?4 U/ }. n
7.6. SENSITIVITY AND STRATEGIES ............................................................439 / o: @" W# h9 s- R. V- h
7.6.1. Sensitivity versus Eayer Termination Point in Reflectance.................440 / y7 w6 O8 g. I8 t
7.6.2. Sensitivity versus g-Value...................................................................441
! y' }3 x9 q4 I6 J6 n) h$ j2 X* S7.6.3. Precoated Monitor Chips.....................................................................445
, v5 p7 S0 N+ A5 X& z) u7.6.4. Eliminating the Precoated Chip...........................................................445
( |* j2 D5 d# ]! g8 T0 F7.6.5. Constant Level Monitoring Strategies.................................................453
9 ^7 h' \* E6 l7.6.6. Steering the Monitoring Signal Result ................................................458
6 V1 b% F7 S1 I) Q1 Q) C$ T9 Z7.6.7. Variation of Band-Edge Position with Monitoring Errors ..................467 . B) y" ]2 P; K' r! V( `& u# j
7.6.8. Almost Achromatic Absentee Layers ..................................................476 9 W& J; q2 c6 c3 ]/ ]. M" ]
7.7. PRACTICAL CONSIDERATIONS .............................................................479
* R# P' n/ Q8 B; a! c6 u& \7.7.1. A Narrow Bandpass Filter...................................................................479 + N! I/ J7 d$ O% p
Contents F. o0 n- G0 } \$ ]
7.7.2. A Special "Multichroic" Beamsplitter.................................................480
5 B: d/ x7 B3 q- P9 ^4 |- W7.7.3. A Very Broadband Antireflection Coating..........................................481 , B& q) }6 ~9 {
7.7.4. Single Beam versus Double Beam Optical Monitors..........................488 + q0 U; u( Y/ G3 y/ v
7.7.5. Automation versus Manual Monitoring ..............................................489 * G$ w8 X- }6 P. t: a! \
7.8. SUMMARY...................................................................................................491
, k! Y, W# ~+ x- a' U4 o. n& h7.9. REFERENCES...............................................................................................492
% V' b6 S7 U0 ^0 X( O8 R; gAppendix: Metallic and Semiconductor Material Graphs .............................. 497 + k! m9 }; M& f5 @" q) i
A.I. INTRODUCTION ............................................................................ 497
+ k, R' u/ ?9 {) ZAuthor Index..................................................................................................... 513
0 T' O5 o! k$ V' fSubject Index.................................................................................................... 529 |
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