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发表于 2009-2-25 02:04:17 | 显示全部楼层 |阅读模式
各位版主以及会员注意:近期举行发帖奖励新书活动!!
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8 p5 M) s- B, I- `为了进一步活跃论坛气氛,给大家提供一个更好的光学薄膜论坛交流平台,近期举行发帖奖励新书活动!! - l4 F6 f2 n1 A7 o$ s' t
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# U/ n, T& S  `7 D: [- d2.一般会员所发的原创主题贴大于30贴,并且有一篇评为精华者奖励! : A6 ?2 u; Z) A, A1 t; u3 z8 y, Z
活动日期:2009.02.25-2009.03.30
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3 @  k( q+ ~* |& n2009.02.24
3 ?7 u; l3 q, U+ ~# I: T  U
奖励新书名称: % C5 ~$ w% X  Y
Practical Design and Production of Optical Thin Films Second Edition, Revised and Expanded , M4 l1 w9 U" L# _5 `
目录: ; c% K+ `  a  ]  t

; W3 X/ z  e3 ^  L1 Fundamentals of Thin Film Optics and the
8 d9 S  [6 H4 x1 u. hUse of Graphical Methods in Thin Film Design......................!
9 r$ O* B, U+ N& D7 M4 x& Q# F  y1.1. INTRODUCTION .............................................................................................1
' ~( v0 A$ o! j9 N; G. i: y( \; H  C1.2. REVIEW OF THIN FILM OPTICS PRINCIPLES ..........................................5
$ c) Y" B, z- b1.3. REFLECTANCE DIAGRAMS..........................................................................8
8 u, {8 [* v+ _4 L- b0 x4 m1.3.1. Low Reflectors, Antireflection Coatings .............................................. 10 ! |/ w+ s6 T6 B, F7 I/ z. H) l7 S
1.3.2. High Reflectors .................................................................................... 19
# s9 \5 S& O; X  [7 @1.3.3. Narrow Bandpass Pass Filters .............................................................22 8 ]' D9 {7 V7 d; V2 D5 _
1.3.4. Beamsplitters.........................................................................................30
7 H- k6 M' L! d  e/ M9 z: c1 l1.3.5. Three-Layer AR Coating on Germanium, Example ..............................34 * I) @( W2 u3 p* @4 ^
1.3.6. Example Four-Layer Broad Band AR Coating in the Visible...............36 ; f+ I: N! M- U% j& A& j1 v
1.3.7. Physical Thickness versus Optical Thickness........................................36 $ Y1 h8 u8 W& i3 @2 F/ A4 M/ @0 Z: f
1.4. ADMITTANCE DIAGRAMS..........................................................................36
, ?% D# V; @4 [7 k( {1.5. TRIANGLE DIAGRAMS................................................................................39 * V/ E, _( t0 f) ?3 j
1.5.1. Designing Coatings with Absorbing Materials......................................40 1 a6 J# o4 H' W, `  Y" N' _
1.6. APPROXIMATIONS OF INDICES AND DESIGNS.....................................61
0 y  L2 q, z- J1.7. INHOMOGENEOUS INDEX FUNCTIONS ..................................................65 ) I$ E% x$ B# e& ]
1.7.1. Low Index Limitations..........................................................................74
$ l: p( e& Q0 F7 a9 _- U1.7.2. A Fourier Approach ..............................................................................77
1 t. e8 @- C) Y1 i( E# n1.8. OPTIMIZATION.............................................................................................83
' u% x, e- W; K1.8.1. Performance Goals and Weightings ......................................................84 3 ^6 M+ P, I! {$ a
viii Contents ( ^7 M( l2 O7 d6 `" ?
1.8.2. Constraints ............................................................................................85 , ?* K% G* w# T6 k0 h5 t
1.8.3. Global versus Local Minima.................................................................85
' B* |) _! B- x" K: Y) g2 G1.8.4. Some Optimizing Concepts................................................................... 86
: ^# t" ^8 z& U2 U- e1 d. P/ U1.9. SUMMARY.....................................................................................................88
0 b3 q% L, Z3 e$ f$ A1.10. REFERENCES............................................................................................... 88 8 g! S( r6 l6 a6 p# }( a/ B
2 Estimating What Can Be Done Before Designing...............91 % \  c5 f  f6 Z1 T
2.1. INTRODUCTION............................................................................................91 3 l/ H$ n% p* r: ^" `7 r
2.2. ANTIREFLECTION COATINGS ...................................................................91
( @' U! l3 [! @7 t8 B" W& ]3 y2.2.1. Procedure ..............................................................................................92
$ ^& S1 {: N: J+ P7 E- s2.2.2. The Formula..........................................................................................93
4 h: Y/ E( f3 K  \2 f' W& d2.2.3. Results...................................................................................................95 7 n3 e" X9 x$ r6 p) R# {
2.2.4. Summary of Antireflection Coating Estimation .................................. 101 - m2 Q" R6 M6 {9 }# j7 f  S1 q
2.3. BANDPASS AND BLOCKER COATINGS ................................................. 101
: K# \# k0 t) h; A2.3.1. Estimating the Width of a Blocking Band........................................... 102 5 @" @/ T: `/ q9 k2 C3 o& a
2.3.2. Estimating the Optical Density of a Blocking Band............................ 104
/ Q" B) f' c! A( o2.3.3. Estimating the Number of Layers and Thickness Needed................... 105 - j0 t- N/ F: N  J' |
2.3.4. Estimating More Complex Coatings ................................................... 105 ! Y3 l$ n) L6 t' \
2.3.5. Estimating Edge Filter Passband Reflection Losses............................ 111
# a, p4 Y: {/ T0 i" O2.4. DICHROIC REFLECTION COATINGS ...................................................... 121 + ]6 `; {2 K0 y1 }
2.5. DWDM FILTERS.......................................................................................... 123 % P* l/ x$ h0 F3 _- A4 j4 l! x
2.6. SUMMARY................................................................................................... 127 - l. U; e9 a% |- \( O
2.7. REFERENCES............................................................................................... 128
0 Y( C, e& R  g0 G. ^% P+ x  R3 Fourier Viewpoint of Optical Coatings..............................129 - H. U2 I( q2 N$ K) |8 m  |: K$ ^
3.1. INTRODUCTION ......................................................................................... 129   A; o2 {8 v  [
3.2. FOURIER CONCEPTS ................................................................................. 129
$ \$ G: |0 J% A- R6 Z3.2.1. Background.........................................................................................130
  R; J* K1 u# X; |& U7 t6 W! a3.2.2. Some Limitations ................................................................................ 134
: [1 y2 y& [; }" c- r3.2.3. A Method to Determine the Multiple Reflections............................... 137
* l1 N$ P+ O1 G" X/ M3.2.4. Overcoming Low Index Limitations with Thickness........................... 139
) `) \1 g0 J: G) {! o# b9 C( j3.3. DESIGNING A VERY BROAD BAND AR COATING............................... 147
4 O- k4 o  ~1 N- L, X3.4. CONCLUSIONS............................................................................................ 148   f" v6 Z% i3 I# r: |, [' _
3.5. REFERENCES .............................................................................................. 149 - I$ D% |5 q5 E2 G# [! i1 b0 I% g
4 Typical Equipment for Optical Coating Production ........150
. T7 n: s: ?+ z) O+ u( Q! I- O! G4.1. INTRODUCTION..........................................................................................150
" Y; |) V' R! Z% y& GContents ix - t$ @, |! ~0 x3 K0 w
4.2. GENERAL REQUIREMENTS...................................................................... 151
1 v8 M2 Y& c" y; B1 a4.2.1. The Vacuum........................................................................................ 152 + w( A+ p& w1 O4 g0 I7 ?8 n
4.2.2. Evaporation Sources............................................................................ 167 " ~3 e, N, J+ H7 C- s5 t. H" j
4.2.3. Fixturing and Uniformity.................................................................... 191 1 _3 n3 l* u2 Q# X
4.2.4. Temperature Control...........................................................................201 ; {2 \' h0 O" M* ?
4.2.5. Process Control...................................................................................205 # u  p# G3 o+ v; K7 M. v
4.3. TYPICAL EQUIPMENT...............................................................................208
7 d7 Q7 R. O9 t, t4.4. ALTERNATIVE APPROACHES .................................................................213
, G( D4 Y8 O6 d0 x4.5. UTILITIES.....................................................................................................213
9 D; _0 v' \% ?4.6. REFERENCES...............................................................................................215 2 b; W, V" e, _4 q  ~3 |/ j
5 Materials and Process Know-How .....................................221
2 O: y" g6 @" ?5.1. INTRODUCTION ........................................................................................221 $ R( |7 z/ V$ S: G, j; e
5.1.0. Measuring Spectral Results in the Real World...................................222
. ^0 Z6 `7 s/ B, {5.1.1. Index ofRefraction Determination.....................................................232 " g. ^" f& `+ P, d5 y. H
5.2. PROCESS KNOW-HOW.............................................................................243
! ?' g% Y/ o4 a  h9 X5.2.1. Film Growth Models and Observations...............................................244 ( z/ Y( {8 l& j; I9 j0 S" g- {
5.2.2. Chiral and Sculptured Coatings...........................................................249
, K+ x/ i: L2 t2 _0 E0 C' E5.2.3. Stress in Coatings................................................................................249 9 f& o; N* O! [# d! v. H$ G
5.2.4. Laser Damage in Coatings...................................................................252
) c9 d( |! f, D& n5.2.5. Rain Erosion of Coatings ....................................................................255 - Q' L- p( Z3 n# B! g1 X
5.3. MATERIALS................................................................................................257
% r! d! F  t6 M5 d0 M5.3.1. Some Specific Materials.....................................................................258 9 c! a& V* @/ [) V
5.4. ION SOURCES............................................................................................. 308 4 W% @5 ?, B9 j4 v
5.4.1. Cold Cathode Source.......................................................................... 310
: X& y0 o% Z$ }! g- C; S+ H7 V5.4.2. End-Hall Source.................................................................................312
* B9 D) q" z9 f' O5.4.3. PS1500 Plasma/Ion Source................................................................315
& Y1 z# d; R6 ?: `5 l9 w( b5.5. OTHER PROCESSES TO CONSIDER .......................................................328
  J! P: a' N& D2 ]5.5.0. Surface Preparation and Cleaning......................................................328
! ?0 f: y. y1 W3 |5.5.1. Physical Vapor Deposition.................................................................329
3 N! \7 z  i% d; z5 U6 O$ ~" \5.5.2. Dip, Spin, and Spray Coatings ...........................................................330 , {! S+ `6 r$ E  c4 W9 Y8 W2 s& `
5.5.3. Chemical Vapor Deposition ...............................................................331 ) k- b4 p7 H: ~* T, S9 [% y
5.5.4. Plasma-Enhanced CVD......................................................................331 / k+ y4 B# e' z6 h5 V; P4 O
5.5.5. Plasma Polymerization.......................................................................332
( ]4 x4 n; l( z- N5.5.6. Hard Carbon Coatings........................................................................333 2 X. z$ t8 u( X/ y
5.6. SUMMARY..................................................................................................334
5 x/ t+ D( x4 R6 j5.7. REFERENCES..............................................................................................335
- q; E( ^* C8 N4 _  m6 Process Development ...........................................................360 - }* O& r! E3 b# A/ e9 S
6.1. INTRODUCTION ........................................................................................360 % t# Y, g+ f. N" n
6.2. DESIGN OF EXPERIMENTS METHODOLOGY .....................................364
) {5 F- ~# Q* k  s; w( O9 BContents
% ?' q8 s& f9 B5 R4 y  f1 A6.2.1. Process Flow Diagram .......................................................................364
: S# k) e9 T9 q+ U6.2.2. Cause-and-Effect Diagram ................................................................366
( S3 j# e* `5 b4 h6.2.3. Control, Noise, or Experiment ..........................................................366
5 g( G# A# s) B/ c6.2.4. Standard Operating Procedures .........................................................369
& E! D2 V2 ^5 j! ]5 I* l& b6.3. DESIGN OF THE EXPERIMENTS: EXAMPEES......................................369 1 D6 N! r6 D9 d" i; U
6.3.1. A Central Composite Design for Aluminizing ...................................371 ! b, @1 q5 B8 @  h$ o6 j
6.3.2. A Box-Behnken Design for IAD Deposition of TiO2 ........................375 ( {+ ~& d, F+ ~( w( {2 d3 g
6.4. SUMMARY..................................................................................................381 7 w- C% l% t6 C9 F+ ~
6.5. REFERENCES .............................................................................................381 6 g3 |) N/ v1 q
7 Monitoring and Control of Thin Film Growth .................382 8 Z% j: Z7 Y+ L! e* ~! u
7.1. INTRODUCTION.........................................................................................382
8 l# y" F' ^& T3 f8 F4 P7.2. EFFECTS OF ERRORS ...............................................................................384 : ~4 |; `# m3 {  _# w
7.3. WAYS TO MONITOR.................................................................................388 2 E) W/ `& j" h9 A1 v9 ]
7.3.1. Measured Charge.................................................................................388
& @$ R* {" \& d* g0 |$ ^7.3.2. Time/Rate Monitoring.........................................................................390
; o7 y% Z  F; q/ _1 v* @7.3.3. Crystal Monitoring..............................................................................391
2 I8 Z8 r# {! X7 e0 O/ Z$ j7.3.4. Optical Thickness Monitors ................................................................392
( k8 m/ ]6 }- ~6 ?6 Z  W- ]7.3.5. Trade-offs in Monitoring.....................................................................398 $ `0 M/ d" I0 {, A$ B8 i* H( J. J
7.4. ERROR COMPENSATION AND DEGREE OF CONTROE......................400
7 H# A5 J) n$ z7.4.1. Narrow Bandpass Filter Monitoring....................................................401
( Y5 T2 u( ]$ c) g7.4.2. DWDM Filter Monitoring...................................................................405
3 P, T7 b0 }9 U* n8 e& k4 c' n7.4.3. Error Compensation in Edge Filters....................................................427
- g/ R3 c4 p: z) R! Z2 C( _7.4.4. Broad Band Monitoring Compensation ..............................................428   A# M6 s# k) Z$ V5 L- s
7.4.5. Effects of Thin Film Wedge on the Monitor Chip............................... 429
: F% p% [" P9 H3 s+ e3 g7.4.6. Error Due to Width of the Monitoring Passband.................................431
% e' D: ~. m, l& B7 n7.5. CALIBRATIONS AND VARIATIONS .......................................................433 : c; C8 M6 [6 f- o  k
7.5.1. Tooling Factors ...................................................................................434 " b7 A$ o9 s$ l: ~- H' Y/ c
7.5.2. Variations............................................................................................435
  s% F% D, f1 ?1 T- I( l7 \7.5.3. The Optical Monitor with Crystal Method of Schroedter....................436
. I& `4 v7 n( D2 d7.5.4. Suggestion for Computer-Aided Monitoring ......................................438
1 ~& O4 Y: V9 w3 L+ ]0 Z2 V7.6. SENSITIVITY AND STRATEGIES ............................................................439 ' m$ w6 }8 e  e  ^6 ]
7.6.1. Sensitivity versus Eayer Termination Point in Reflectance.................440 - r2 H6 k1 v9 q- q: ]$ {
7.6.2. Sensitivity versus g-Value...................................................................441
2 M' \( r& j$ W# D0 }2 p# c7.6.3. Precoated Monitor Chips.....................................................................445 * h/ D* Q2 u+ W8 L1 {9 ^9 g$ [
7.6.4. Eliminating the Precoated Chip...........................................................445
: l  `) l8 ~# D/ d5 l7.6.5. Constant Level Monitoring Strategies.................................................453
3 o  P$ {% w' w( S. s) L- G; ~5 }9 V* t7.6.6. Steering the Monitoring Signal Result ................................................458 # Y# e( x; y: E# a! W
7.6.7. Variation of Band-Edge Position with Monitoring Errors ..................467
9 ]( M  e% d4 D, d7 i' r3 n7.6.8. Almost Achromatic Absentee Layers ..................................................476
1 d( a2 `$ M% A# P0 s$ z7.7. PRACTICAL CONSIDERATIONS .............................................................479 1 l, ]2 j  q4 G( M* w: `2 _  t( f
7.7.1. A Narrow Bandpass Filter...................................................................479 - W0 z7 H5 R8 c' h* j( j2 j& T
Contents 3 J4 I# P; ~2 w5 r8 P& n. B
7.7.2. A Special "Multichroic" Beamsplitter.................................................480 , E2 {: R9 ?( U7 Z
7.7.3. A Very Broadband Antireflection Coating..........................................481 & m! [& g, x. e& `8 V: u
7.7.4. Single Beam versus Double Beam Optical Monitors..........................488 9 h( |+ ~& t  p! o7 a4 D
7.7.5. Automation versus Manual Monitoring ..............................................489
& A4 H9 V7 I6 u3 O4 V1 m* U0 j7.8. SUMMARY...................................................................................................491
2 T1 x$ V$ ~( g; }; u( [7.9. REFERENCES...............................................................................................492
& Q1 d6 q2 l4 ]/ r: Z" kAppendix: Metallic and Semiconductor Material Graphs .............................. 497
/ ?3 V1 f4 V5 x! ~% ~A.I. INTRODUCTION ............................................................................ 497
/ _/ b' x' t0 vAuthor Index..................................................................................................... 513
' |* q& P  Z+ G4 K# H5 n& ASubject Index.................................................................................................... 529

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发表于 2009-3-6 02:05:03 | 显示全部楼层
我是新来的,收到消息...
# w9 {$ w6 v+ q( f 期待意外.期待奇迹
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发表于 2009-3-6 20:04:50 | 显示全部楼层
收到。谢谢斑竹!
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发表于 2009-3-12 02:40:52 | 显示全部楼层
收到了,
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发表于 2009-3-12 17:43:07 | 显示全部楼层
看来比较难得到啊..
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发表于 2009-3-25 02:10:22 | 显示全部楼层
谢谢啊
4 U. p2 ]; F* {2 x) k# p会努力的
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发表于 2009-3-28 17:00:15 | 显示全部楼层
xiexie                             谢谢   非常感谢
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发表于 2009-4-9 18:48:46 | 显示全部楼层
* A- v2 n9 H: M! o
期待精彩!
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发表于 2009-4-14 20:07:22 | 显示全部楼层
新来的,刚收到,期待,不过好像是英文版的哦
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发表于 2009-4-18 23:22:49 | 显示全部楼层
Could you send me this book?
' t$ o: Z7 b  C# W* x  T4 TThanks a lot
" H& E1 _2 C& H! t9 z3 q! i: n9 [' i$ Q) Y% r
My email is newssg-mail@yahoo.com1 u0 \! P' g! P, }1 w
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. K* u4 B& E7 |5 Y0 ~redarmy123
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