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4 H7 H a% G8 m" l, D* n9 O活动日期:2009.02.25-2009.03.30
/ n: A: w2 }) U- L7 kxx_912 & _- ?' d5 Y2 n& L
2009.02.24
3 x7 v* H6 U: U( r H奖励新书名称: + J- O& h0 x n& ^' l/ c4 W) T8 q: h
Practical Design and Production of Optical Thin Films Second Edition, Revised and Expanded
8 Q3 U9 A& q2 f7 |7 P1 W目录:
5 k+ n6 J3 o; S0 Z% x
$ p6 z8 ?$ Y s* K1 Fundamentals of Thin Film Optics and the
8 U: U7 W# e. d5 Q9 kUse of Graphical Methods in Thin Film Design......................! . U( z. U% K! G, h; h
1.1. INTRODUCTION .............................................................................................1
: \! ]/ ^0 U+ w6 t' {1.2. REVIEW OF THIN FILM OPTICS PRINCIPLES ..........................................5 1 X. i9 F5 h: s: e! t; a
1.3. REFLECTANCE DIAGRAMS..........................................................................8
, X; _. f- _: ~2 u) U u; X1.3.1. Low Reflectors, Antireflection Coatings .............................................. 10
( @) }, u' T+ I2 u; U1.3.2. High Reflectors .................................................................................... 19 2 D* F$ k5 ]3 }. c! Y
1.3.3. Narrow Bandpass Pass Filters .............................................................22
2 I R7 t0 C, u5 S4 l+ l1.3.4. Beamsplitters.........................................................................................30 ; p1 N6 P" |% `1 b1 }2 r
1.3.5. Three-Layer AR Coating on Germanium, Example ..............................34
0 {4 o" l& z6 q: d1.3.6. Example Four-Layer Broad Band AR Coating in the Visible...............36
. i9 i0 D8 y( l' m: g) u1.3.7. Physical Thickness versus Optical Thickness........................................36
! ]& G- X6 R" z- M. d( B1.4. ADMITTANCE DIAGRAMS..........................................................................36 % b# N8 m3 w, F' d% D( j
1.5. TRIANGLE DIAGRAMS................................................................................39
2 ^' T; b# J+ X" e @8 D0 K% ?# ~1.5.1. Designing Coatings with Absorbing Materials......................................40
: ]% G* `, E: y1.6. APPROXIMATIONS OF INDICES AND DESIGNS.....................................61 # `1 X; P+ b _ e, ~. f- m
1.7. INHOMOGENEOUS INDEX FUNCTIONS ..................................................65 # `% t4 t2 X7 @1 q3 u
1.7.1. Low Index Limitations..........................................................................74 & Q' S6 Z/ p$ `) [; M; M
1.7.2. A Fourier Approach ..............................................................................77
2 ^" t( j) t; l1.8. OPTIMIZATION.............................................................................................83
' G& c" k& W) S3 a* U. M1.8.1. Performance Goals and Weightings ......................................................84
6 z4 V# j& I: @/ [, K/ Rviii Contents 1 k5 _/ i+ t, S! V! e6 D
1.8.2. Constraints ............................................................................................85
; v9 n5 h: i/ D& G E0 d. h1.8.3. Global versus Local Minima.................................................................85 1 ?/ u( X8 s' ]( ^! Y
1.8.4. Some Optimizing Concepts................................................................... 86
9 ~( P6 Z; L7 b8 C/ r! F1.9. SUMMARY.....................................................................................................88 4 Y* K4 e- f7 K* N7 G1 G u
1.10. REFERENCES............................................................................................... 88
1 N( [. q! c6 v2 Estimating What Can Be Done Before Designing...............91 4 W+ I0 a4 C: I$ D6 W
2.1. INTRODUCTION............................................................................................91
# \; l7 `% D( d5 G3 L$ w G2.2. ANTIREFLECTION COATINGS ...................................................................91 . b0 Q( C/ L7 ?2 L
2.2.1. Procedure ..............................................................................................92
6 F: ^9 n: C# w2.2.2. The Formula..........................................................................................93
6 ]# L6 r1 H! q- h" H: O0 e' L2.2.3. Results...................................................................................................95
+ X4 W0 [6 p, Y! @2.2.4. Summary of Antireflection Coating Estimation .................................. 101
2 a8 E# K+ _2 M& Q9 P2.3. BANDPASS AND BLOCKER COATINGS ................................................. 101
3 j0 o2 B) t" Y; A: Y8 ^, T2.3.1. Estimating the Width of a Blocking Band........................................... 102 / a6 k( J* ]; {# p# |
2.3.2. Estimating the Optical Density of a Blocking Band............................ 104
' V5 f8 K* }# y: J. E- i2.3.3. Estimating the Number of Layers and Thickness Needed................... 105 , y' O! S! z. p) }7 x' O
2.3.4. Estimating More Complex Coatings ................................................... 105
, D3 ` d% i2 E3 m' \! [2.3.5. Estimating Edge Filter Passband Reflection Losses............................ 111 & F) r+ T- p, `5 g: I
2.4. DICHROIC REFLECTION COATINGS ...................................................... 121 5 P3 B" f! l, b( E, x! f
2.5. DWDM FILTERS.......................................................................................... 123
; C( X$ o# C+ q; X6 V9 h2.6. SUMMARY................................................................................................... 127
' b. ^. {1 B! g2 D# R2.7. REFERENCES............................................................................................... 128
% o) n7 q- Q# p& ~% h) h$ s3 Fourier Viewpoint of Optical Coatings..............................129
3 F7 _' l% f1 X- F& [. E3.1. INTRODUCTION ......................................................................................... 129 ! Q1 i ~$ S# G( F
3.2. FOURIER CONCEPTS ................................................................................. 129 $ K4 D3 X/ e- M! n9 T4 N- d* R
3.2.1. Background.........................................................................................130 @4 s f \, n. _) Z
3.2.2. Some Limitations ................................................................................ 134
# v+ @" i% Z# P* Q: f* v3.2.3. A Method to Determine the Multiple Reflections............................... 137
3 l% l# p6 x/ o+ y: k2 }3.2.4. Overcoming Low Index Limitations with Thickness........................... 139
6 J$ b% K8 P0 c7 |' K! k3.3. DESIGNING A VERY BROAD BAND AR COATING............................... 147 ! l- ^% H' c$ }1 T, {' R
3.4. CONCLUSIONS............................................................................................ 148 + ?7 y: d: L( m5 T: J
3.5. REFERENCES .............................................................................................. 149 , {7 c7 k+ n+ i' w! Y; x
4 Typical Equipment for Optical Coating Production ........150 : h+ A: c- e* x% O5 m3 {( I
4.1. INTRODUCTION..........................................................................................150 9 E4 B' Q. ?4 ^8 V
Contents ix
; r# L( k9 }+ z- |1 `4 ?# Z" s. m4.2. GENERAL REQUIREMENTS...................................................................... 151 3 E t4 u% a% Y2 V A0 x1 o3 P# A
4.2.1. The Vacuum........................................................................................ 152 % o, K1 D) q/ ^) J1 _
4.2.2. Evaporation Sources............................................................................ 167 0 P4 q, x7 _ ~! q8 _* W2 k- c
4.2.3. Fixturing and Uniformity.................................................................... 191
6 g; V5 x$ O* v& i! f( H( R4.2.4. Temperature Control...........................................................................201
8 T9 h: k6 h9 k' I4.2.5. Process Control...................................................................................205 I5 o0 N: Q% D
4.3. TYPICAL EQUIPMENT...............................................................................208
% v# |% t2 `& X( i) M9 y4.4. ALTERNATIVE APPROACHES .................................................................213 5 O2 s' |6 N' {3 h2 R6 g$ f h& H
4.5. UTILITIES.....................................................................................................213 ' h$ {8 Z+ ~3 j1 j
4.6. REFERENCES...............................................................................................215 ( s. X' h0 Y# R3 g
5 Materials and Process Know-How .....................................221
0 w/ n0 B4 ^# q- D5.1. INTRODUCTION ........................................................................................221
8 w! o& [& F, R3 e: e; {5.1.0. Measuring Spectral Results in the Real World...................................222 0 I4 w/ q, p) [, F
5.1.1. Index ofRefraction Determination.....................................................232 5 }) O7 ?% s$ h* Y# {$ J& b
5.2. PROCESS KNOW-HOW.............................................................................243
( l/ l% N; T% d5 E5 d" c' d5.2.1. Film Growth Models and Observations...............................................244
* D# ^! M2 \& o% i. ~% }) N( w5.2.2. Chiral and Sculptured Coatings...........................................................249
% i5 O1 d' ?) w7 x m5 Y2 Z2 _5.2.3. Stress in Coatings................................................................................249
- |1 B' E z! i: n$ @0 D" a! B/ Y5.2.4. Laser Damage in Coatings...................................................................252
* L5 o- P4 P) k% l' A& ?6 i5.2.5. Rain Erosion of Coatings ....................................................................255
" M/ O* [. G& P7 m* n- h8 R+ s9 O1 ]5.3. MATERIALS................................................................................................257 & n! L, Y: n7 J1 q
5.3.1. Some Specific Materials.....................................................................258 ! p* _, s) j- x* r0 d1 F3 y
5.4. ION SOURCES............................................................................................. 308 ) ~6 ~ L$ N% b2 O, T% B. o$ v% _
5.4.1. Cold Cathode Source.......................................................................... 310
. P6 \; @& t A0 [, w# e6 z5.4.2. End-Hall Source.................................................................................312
9 _/ Q4 G( _7 M$ G5.4.3. PS1500 Plasma/Ion Source................................................................315
# D! {) Y6 [$ @ b1 Y( S5.5. OTHER PROCESSES TO CONSIDER .......................................................328 / M3 c( U) B/ O, A7 D
5.5.0. Surface Preparation and Cleaning......................................................328
}( ^: E+ J. r9 e2 p5 p/ v5.5.1. Physical Vapor Deposition.................................................................329 9 c/ ~- V5 } h0 X* A
5.5.2. Dip, Spin, and Spray Coatings ...........................................................330
5 y/ R; h& x! y5 S5.5.3. Chemical Vapor Deposition ...............................................................331
4 Q6 K p1 y: l1 V) T; ~6 }9 f" B0 K5.5.4. Plasma-Enhanced CVD......................................................................331 0 E" b$ b3 _1 ^2 `4 S# G3 ~
5.5.5. Plasma Polymerization.......................................................................332
, V* r J% Z l& N% G0 _5.5.6. Hard Carbon Coatings........................................................................333 + ~# m1 ]5 Q* Z: w
5.6. SUMMARY..................................................................................................334 3 M- q2 _. `0 T9 [
5.7. REFERENCES..............................................................................................335 7 d0 C* P1 u( m1 Y. s. s
6 Process Development ...........................................................360 3 x6 H8 E. O+ ^- |9 a
6.1. INTRODUCTION ........................................................................................360 0 E8 z: m6 J' {( R
6.2. DESIGN OF EXPERIMENTS METHODOLOGY .....................................364 ] y: V' m, [* ]5 l; {- a
Contents & Q4 @) p' b# l2 [2 F( ~1 F- {: |
6.2.1. Process Flow Diagram .......................................................................364 8 c# y& ^% r9 [3 |5 {
6.2.2. Cause-and-Effect Diagram ................................................................366
. m! s0 i8 d1 P6.2.3. Control, Noise, or Experiment ..........................................................366
. y# c' p; _2 B4 v1 a" ]; q" _% t$ s6.2.4. Standard Operating Procedures .........................................................369
8 @0 |: y O7 j5 ?6.3. DESIGN OF THE EXPERIMENTS: EXAMPEES......................................369
/ w; S! P: V$ i9 L# t$ N6.3.1. A Central Composite Design for Aluminizing ...................................371
6 {0 j' A& ] A v6.3.2. A Box-Behnken Design for IAD Deposition of TiO2 ........................375
( F% q1 X$ x! e5 n @5 F& f+ `7 i6.4. SUMMARY..................................................................................................381
) k5 O. S; m0 y- G6.5. REFERENCES .............................................................................................381
' ?6 b, h4 ^+ u- R0 V7 Monitoring and Control of Thin Film Growth .................382 * x6 x2 a1 P" l `5 m/ P6 C
7.1. INTRODUCTION.........................................................................................382
! Y- d* g( {9 r; s' N8 b. T7.2. EFFECTS OF ERRORS ...............................................................................384
( N2 a& Q S6 T( P' H$ `7.3. WAYS TO MONITOR.................................................................................388
+ ?/ d7 c* Y: u! H* \$ f5 B/ Z7.3.1. Measured Charge.................................................................................388 - X ^9 b* O, N1 V7 t6 V |
7.3.2. Time/Rate Monitoring.........................................................................390
7 N$ Z. a9 X$ {/ b2 `" q; R) L4 v9 S7.3.3. Crystal Monitoring..............................................................................391 . @2 X( u+ [, B6 |
7.3.4. Optical Thickness Monitors ................................................................392
$ C8 E3 O6 E2 V. m; X) g7.3.5. Trade-offs in Monitoring.....................................................................398 ! f( O6 a( Y7 W# S7 k+ @/ C
7.4. ERROR COMPENSATION AND DEGREE OF CONTROE......................400 ; v# y" Z' C( j* P
7.4.1. Narrow Bandpass Filter Monitoring....................................................401
( N6 O! Q. z0 N7.4.2. DWDM Filter Monitoring...................................................................405
: b3 [! F% }, e( O+ c+ R3 Y, @- ?7.4.3. Error Compensation in Edge Filters....................................................427 3 C2 t/ _. w/ V) M
7.4.4. Broad Band Monitoring Compensation ..............................................428
3 x4 q& I$ B2 J7.4.5. Effects of Thin Film Wedge on the Monitor Chip............................... 429 9 \3 C8 ~3 s, W1 N
7.4.6. Error Due to Width of the Monitoring Passband.................................431 m; f8 o, H# I, e& s
7.5. CALIBRATIONS AND VARIATIONS .......................................................433 * s( ?* M4 c; t; b7 Q7 ~8 L: y
7.5.1. Tooling Factors ...................................................................................434
/ r: \6 |+ C' W' T1 n1 t+ A+ E6 J0 X4 }7.5.2. Variations............................................................................................435 - s; s$ Z) M3 O$ F
7.5.3. The Optical Monitor with Crystal Method of Schroedter....................436 + M8 R5 t" f" Q4 T' t
7.5.4. Suggestion for Computer-Aided Monitoring ......................................438
# ?) p- p6 G8 w7.6. SENSITIVITY AND STRATEGIES ............................................................439
1 K6 M. {+ ~# @3 @- ~8 C% {7.6.1. Sensitivity versus Eayer Termination Point in Reflectance.................440
8 N( Z) f, C& I3 i3 R7.6.2. Sensitivity versus g-Value...................................................................441
2 b. ~! X, j- B5 X( A7.6.3. Precoated Monitor Chips.....................................................................445 0 N8 Y2 i0 j3 b% S0 ~
7.6.4. Eliminating the Precoated Chip...........................................................445
% h+ Q: |( |: {7 s5 D7 c7.6.5. Constant Level Monitoring Strategies.................................................453 D* W( J& h: S6 y" O0 z
7.6.6. Steering the Monitoring Signal Result ................................................458
5 y' P" `1 M& w1 T7.6.7. Variation of Band-Edge Position with Monitoring Errors ..................467
* M6 w, e. t0 y' s7.6.8. Almost Achromatic Absentee Layers ..................................................476 ) K. x5 {: [/ |
7.7. PRACTICAL CONSIDERATIONS .............................................................479
" f7 w4 O( r @ _1 W7.7.1. A Narrow Bandpass Filter...................................................................479 6 _# _. J7 s$ H' ]. E4 W
Contents 7 F; U/ g4 ~2 K7 R: \
7.7.2. A Special "Multichroic" Beamsplitter.................................................480 ; ^4 t( h8 d1 `5 i6 c' k: `0 u
7.7.3. A Very Broadband Antireflection Coating..........................................481 # G( [% f7 B# [
7.7.4. Single Beam versus Double Beam Optical Monitors..........................488
4 S# E; y0 x1 b# f+ K' P7 c7.7.5. Automation versus Manual Monitoring ..............................................489
$ ?4 v. N, B6 `: H. }7.8. SUMMARY...................................................................................................491
1 N' w& h0 y7 [5 ^; g+ H7.9. REFERENCES...............................................................................................492 ; }$ j+ n9 W/ X, c6 q; Z
Appendix: Metallic and Semiconductor Material Graphs .............................. 497
: f- k$ N; x% l4 U4 n! O0 XA.I. INTRODUCTION ............................................................................ 497
+ W0 b2 W$ W$ a# SAuthor Index..................................................................................................... 513
# q. J: J0 _" |9 G, ]Subject Index.................................................................................................... 529 |
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