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各位版主以及会员注意:近期举行发帖奖励新书活动!! 6 p% F# ^( ~& Y# P& u, R

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2009.02.24

0 M! c0 m! ^2 C7 a5 U6 O; k奖励新书名称: . n; a" D5 r+ h: k& G
Practical Design and Production of Optical Thin Films Second Edition, Revised and Expanded - i2 ~* Z% d# f# w. Y, a1 H7 `+ k
目录: 3 l& V  V3 g. `" X/ c  g
5 P2 u# q8 R1 Q9 C
1 Fundamentals of Thin Film Optics and the
3 Z( ~' F" C3 {- k3 k# v- {Use of Graphical Methods in Thin Film Design......................! * |: y- M# r- {8 ~" r4 s
1.1. INTRODUCTION .............................................................................................1
( H6 v; ^0 h; R% P: |8 H/ X1.2. REVIEW OF THIN FILM OPTICS PRINCIPLES ..........................................5 8 \, i, y9 @5 b$ W. d# Q
1.3. REFLECTANCE DIAGRAMS..........................................................................8 * L& g& T5 b: a- J/ n
1.3.1. Low Reflectors, Antireflection Coatings .............................................. 10
" E9 T' m) S; w- h3 B$ p$ A5 A5 _1.3.2. High Reflectors .................................................................................... 19 * U" Q( r/ r  G2 q! @2 t
1.3.3. Narrow Bandpass Pass Filters .............................................................22 6 b: a. I7 T" ]; M+ ?" {
1.3.4. Beamsplitters.........................................................................................30
) ]$ A/ A8 a* x' P1.3.5. Three-Layer AR Coating on Germanium, Example ..............................34
6 ~* C" ]3 U2 e3 g1.3.6. Example Four-Layer Broad Band AR Coating in the Visible...............36 . ~6 y4 ?- `( H" c, e& b
1.3.7. Physical Thickness versus Optical Thickness........................................36 / L6 n' L5 Y) n8 c$ C  n: w8 _
1.4. ADMITTANCE DIAGRAMS..........................................................................36 8 o4 d5 [/ ?0 [" f) a
1.5. TRIANGLE DIAGRAMS................................................................................39 $ q# ~$ J, W/ w2 K
1.5.1. Designing Coatings with Absorbing Materials......................................40 " u% G0 v/ B# \
1.6. APPROXIMATIONS OF INDICES AND DESIGNS.....................................61
, @5 A8 |+ R  P7 E4 `1.7. INHOMOGENEOUS INDEX FUNCTIONS ..................................................65 3 i1 x" |" x2 Z- e3 i) {, w
1.7.1. Low Index Limitations..........................................................................74
# Q7 }$ e: H3 F; N% x1.7.2. A Fourier Approach ..............................................................................77 - Y$ D- S7 g- Y# m5 P* x! r2 v# j
1.8. OPTIMIZATION.............................................................................................83 & a( K) Q. o- C, ^% f
1.8.1. Performance Goals and Weightings ......................................................84
+ ~; C; P& z, K6 ^viii Contents
9 z- k6 e2 G6 `  \9 v2 D6 N1.8.2. Constraints ............................................................................................85
" y. y; Y9 s" L1.8.3. Global versus Local Minima.................................................................85 7 `& W4 o  [/ w4 R
1.8.4. Some Optimizing Concepts................................................................... 86
' b4 N9 e3 j' M# `: @1.9. SUMMARY.....................................................................................................88 4 I  ^. `. l3 f% T  o. `( v; G0 c
1.10. REFERENCES............................................................................................... 88 + O. \/ m: f$ L( b* G) P" g
2 Estimating What Can Be Done Before Designing...............91 ' G" ?9 L, f% b; c0 ?! d
2.1. INTRODUCTION............................................................................................91
5 g! J, o6 H$ |1 g2.2. ANTIREFLECTION COATINGS ...................................................................91 0 d  b  s4 B8 L- ^
2.2.1. Procedure ..............................................................................................92 6 |9 O5 p7 p7 d5 |/ }' \
2.2.2. The Formula..........................................................................................93
/ Q; p# r: W+ a' Q+ f# P2.2.3. Results...................................................................................................95
8 s4 {% m' ^/ n5 c, h. m2.2.4. Summary of Antireflection Coating Estimation .................................. 101 " v6 w0 c  a' k% T8 K; R7 t
2.3. BANDPASS AND BLOCKER COATINGS ................................................. 101
, t2 h1 ^+ i9 Z2 ~2.3.1. Estimating the Width of a Blocking Band........................................... 102
5 _; e* Z: R; N: b3 z# x2.3.2. Estimating the Optical Density of a Blocking Band............................ 104 ( S( T. U9 ~* `' I% F0 B2 U
2.3.3. Estimating the Number of Layers and Thickness Needed................... 105
# O4 x& n' b* m# @7 o( i2 O4 A2.3.4. Estimating More Complex Coatings ................................................... 105 ! i# ^4 ~% Q; c& w) I& q
2.3.5. Estimating Edge Filter Passband Reflection Losses............................ 111 6 U; l6 Z1 F5 [& i# e& }4 h  e. t
2.4. DICHROIC REFLECTION COATINGS ...................................................... 121 . b" E) `6 c4 J2 S" F  I
2.5. DWDM FILTERS.......................................................................................... 123 ; w$ `; T  f$ T+ ]# q
2.6. SUMMARY................................................................................................... 127
% w7 v# |: }# Z0 x9 j5 _( K2.7. REFERENCES............................................................................................... 128
% d! o6 S& p: B3 Fourier Viewpoint of Optical Coatings..............................129
% q8 n) R: @7 a/ M3.1. INTRODUCTION ......................................................................................... 129 5 [' Y& v' u6 f! o; C
3.2. FOURIER CONCEPTS ................................................................................. 129 8 z- k; x# C% Y0 I5 \$ w
3.2.1. Background.........................................................................................130 5 c' b& `  H( A9 m
3.2.2. Some Limitations ................................................................................ 134
& y2 ]" J5 d' E7 S& m6 C3.2.3. A Method to Determine the Multiple Reflections............................... 137
4 J; J# ?( h5 |0 F+ C; A  m3.2.4. Overcoming Low Index Limitations with Thickness........................... 139
$ ?- [$ T4 \5 b8 }" _+ y- f3.3. DESIGNING A VERY BROAD BAND AR COATING............................... 147 3 d3 R1 a$ w) u! {& _
3.4. CONCLUSIONS............................................................................................ 148
. k1 E% [$ a+ m5 V* H  }' y. f3.5. REFERENCES .............................................................................................. 149 2 _& q: j- E7 c% A; x
4 Typical Equipment for Optical Coating Production ........150
6 z9 r1 R' m( h7 Y) G4.1. INTRODUCTION..........................................................................................150 # b" G+ `1 P. y5 ~
Contents ix ( Q8 q! b/ h- ]
4.2. GENERAL REQUIREMENTS...................................................................... 151 ) h1 U4 E8 a% S3 g$ o
4.2.1. The Vacuum........................................................................................ 152
5 m% @3 g% {+ q) F$ G  D4.2.2. Evaporation Sources............................................................................ 167
7 T! k9 z+ H( U: ^  ~/ s# |& v& B7 k4.2.3. Fixturing and Uniformity.................................................................... 191
/ K, _! {4 x' I  X4.2.4. Temperature Control...........................................................................201
0 e8 v3 }. d/ u% a5 B4.2.5. Process Control...................................................................................205 3 R- A# T1 l8 e5 a# h" ~
4.3. TYPICAL EQUIPMENT...............................................................................208 6 Z  C  u* @% k
4.4. ALTERNATIVE APPROACHES .................................................................213 8 J9 `- s4 V. \# j
4.5. UTILITIES.....................................................................................................213
% E: D2 T1 j1 r8 b4.6. REFERENCES...............................................................................................215
3 t( m) k: W1 c$ F0 q6 U3 R& j! L" p! _: f! _5 Materials and Process Know-How .....................................221 8 d5 G. ], M6 d/ s4 A, i4 T( Q
5.1. INTRODUCTION ........................................................................................221
2 g3 ]$ P) R3 E5.1.0. Measuring Spectral Results in the Real World...................................222
1 p% k. }* N! S5.1.1. Index ofRefraction Determination.....................................................232
. ]4 I& a  j& p/ p! c5.2. PROCESS KNOW-HOW.............................................................................243
% X" P' |  N- @5 H1 S5.2.1. Film Growth Models and Observations...............................................244 ' e- x: F% v# U  i5 [1 a4 H
5.2.2. Chiral and Sculptured Coatings...........................................................249 + @. B( N7 N# B2 b7 Z9 h4 U
5.2.3. Stress in Coatings................................................................................249
8 \% B( z4 H0 n- J. @) }7 {' g5.2.4. Laser Damage in Coatings...................................................................252 1 f% p- h( ~2 n! R
5.2.5. Rain Erosion of Coatings ....................................................................255 4 @( s# `% Z% ~9 y
5.3. MATERIALS................................................................................................257
2 [' V$ v: e3 W0 L2 A8 z5.3.1. Some Specific Materials.....................................................................258   W" h( t5 d) Y0 N  E' W) [! p* }
5.4. ION SOURCES............................................................................................. 308 0 m% S. [' ?* V, }+ j; R3 O
5.4.1. Cold Cathode Source.......................................................................... 310
$ h; i' U) v/ G8 z) J2 C- x5.4.2. End-Hall Source.................................................................................312 6 U4 a; }8 H, G# j  @! y2 @- b
5.4.3. PS1500 Plasma/Ion Source................................................................315 - V& L/ T6 w( m4 q! G4 E
5.5. OTHER PROCESSES TO CONSIDER .......................................................328
- l4 Y" P: P, u$ ^. j* B* @5.5.0. Surface Preparation and Cleaning......................................................328 4 f- s9 c+ _! U7 G; x
5.5.1. Physical Vapor Deposition.................................................................329 / I) J8 S  x! q& j* t! q
5.5.2. Dip, Spin, and Spray Coatings ...........................................................330 0 ?6 O& V1 w8 M) U, P$ X/ t8 Q# c
5.5.3. Chemical Vapor Deposition ...............................................................331
5 E: A9 B2 ~; v- q9 \5.5.4. Plasma-Enhanced CVD......................................................................331
- W5 E  C+ `1 e4 w  K% Q5.5.5. Plasma Polymerization.......................................................................332
* r9 q! |  L. i5.5.6. Hard Carbon Coatings........................................................................333 * F$ l7 J4 U' q! f- t
5.6. SUMMARY..................................................................................................334
' [& `$ q- f1 t5.7. REFERENCES..............................................................................................335
, F1 k. E& Q. G2 ~6 k+ M1 H5 n. i* p6 Process Development ...........................................................360 % ?! _7 F7 m- \4 q& ?. H8 j
6.1. INTRODUCTION ........................................................................................360
- K: L" ]2 [* U# @( i, G; E& _: C" X6.2. DESIGN OF EXPERIMENTS METHODOLOGY .....................................364 / f5 @/ k3 k5 T3 l7 S4 n
Contents : n& g9 Z, K1 v# W( \: r7 ]! u
6.2.1. Process Flow Diagram .......................................................................364 4 W7 h* i' n2 _5 z# G1 X& }' x
6.2.2. Cause-and-Effect Diagram ................................................................366 : i2 G8 K% j  E
6.2.3. Control, Noise, or Experiment ..........................................................366
8 l, s- j5 _4 H1 H" x6.2.4. Standard Operating Procedures .........................................................369 ( `* h6 E: v0 O2 h4 r+ Q
6.3. DESIGN OF THE EXPERIMENTS: EXAMPEES......................................369
3 Y/ u  p% G  Z" C- X% T6.3.1. A Central Composite Design for Aluminizing ...................................371 4 [% G; Y7 z/ X' W9 a
6.3.2. A Box-Behnken Design for IAD Deposition of TiO2 ........................375
+ x2 i7 W, Y9 ]# y) a7 o3 ^' K, Y6.4. SUMMARY..................................................................................................381
' b% y$ a6 w2 \% @/ g' n; F2 ]: T6.5. REFERENCES .............................................................................................381
: c" F# n7 h7 L8 W2 Q+ b$ Y0 r7 Monitoring and Control of Thin Film Growth .................382
* A2 @# z7 R+ W6 j2 p- n) B% N7.1. INTRODUCTION.........................................................................................382 & S, t- ]# E0 ?6 a- l
7.2. EFFECTS OF ERRORS ...............................................................................384
; V. K( Y; V8 i5 E( U  s7.3. WAYS TO MONITOR.................................................................................388
* r7 L* I( g$ q8 k% O6 ~7.3.1. Measured Charge.................................................................................388
2 _* Y- z9 \" O/ k0 c7.3.2. Time/Rate Monitoring.........................................................................390
" F8 N$ o' O9 E( i+ ?4 C' ]7.3.3. Crystal Monitoring..............................................................................391 7 _# O# k: S% {$ p/ ]. z- H/ p5 n* G
7.3.4. Optical Thickness Monitors ................................................................392 / n- r% l5 ]* x$ A/ `8 O- g
7.3.5. Trade-offs in Monitoring.....................................................................398 . l* {7 H* x9 A6 X4 r
7.4. ERROR COMPENSATION AND DEGREE OF CONTROE......................400 5 ]& y- @$ X  b/ n
7.4.1. Narrow Bandpass Filter Monitoring....................................................401 ' R1 C; I) `- H4 i* P
7.4.2. DWDM Filter Monitoring...................................................................405 # k2 d) s% s% a, ]
7.4.3. Error Compensation in Edge Filters....................................................427 , v) H# O' H) i* X" j, s" N. ~
7.4.4. Broad Band Monitoring Compensation ..............................................428
( x! J% ?4 Y& V3 z7.4.5. Effects of Thin Film Wedge on the Monitor Chip............................... 429 5 _# T: q. E# H# R
7.4.6. Error Due to Width of the Monitoring Passband.................................431
4 e$ L: q! r% Y& R4 ^7.5. CALIBRATIONS AND VARIATIONS .......................................................433
  D* S* P" W4 [. @" h2 Q1 }7.5.1. Tooling Factors ...................................................................................434
- ?: R- B+ C6 ]6 T1 X7.5.2. Variations............................................................................................435
+ J8 y& l" B8 H5 G7.5.3. The Optical Monitor with Crystal Method of Schroedter....................436 - _, z5 {* n; X. |( v! c% V$ W
7.5.4. Suggestion for Computer-Aided Monitoring ......................................438
3 I# D' }/ j* }$ u; m, k( `3 X7.6. SENSITIVITY AND STRATEGIES ............................................................439 $ ], b' z8 N( H3 p' n% h- N
7.6.1. Sensitivity versus Eayer Termination Point in Reflectance.................440
  l, n; G0 V, L; W7.6.2. Sensitivity versus g-Value...................................................................441
1 i9 |6 |  M$ \$ G0 D7.6.3. Precoated Monitor Chips.....................................................................445 ! C, H; V% Q2 _4 |
7.6.4. Eliminating the Precoated Chip...........................................................445
/ b" G% j% H4 ], e) d; Y7.6.5. Constant Level Monitoring Strategies.................................................453 ) _7 X; S+ \5 x1 v0 g4 I! F
7.6.6. Steering the Monitoring Signal Result ................................................458
- k6 ^( r: H8 Z: C7.6.7. Variation of Band-Edge Position with Monitoring Errors ..................467 4 l8 b  c1 g& C, x
7.6.8. Almost Achromatic Absentee Layers ..................................................476
1 _, s4 {5 @1 \# e! K" z; r7.7. PRACTICAL CONSIDERATIONS .............................................................479
, [8 F& ]2 f6 }. z( f% P4 e7.7.1. A Narrow Bandpass Filter...................................................................479
. D. s% Q) j2 c! _7 Y. k1 _0 XContents
& K& b7 Y. d9 g7 c& g7.7.2. A Special "Multichroic" Beamsplitter.................................................480 0 M3 @4 m7 ]6 g! G- L1 K) x
7.7.3. A Very Broadband Antireflection Coating..........................................481
. f) m: Y- a- ?( \+ P& Y. |7.7.4. Single Beam versus Double Beam Optical Monitors..........................488 8 L$ p/ \9 Q) {  T+ Q5 ]
7.7.5. Automation versus Manual Monitoring ..............................................489 " G, b8 C) ~  q, }/ N
7.8. SUMMARY...................................................................................................491 ) U! D1 L$ ?& J8 d6 e) i$ t$ X, Z' Y0 H
7.9. REFERENCES...............................................................................................492 & \" z! |8 p! v& `( V) O8 {0 J+ ^
Appendix: Metallic and Semiconductor Material Graphs .............................. 497 / N* [- k( {- x8 l) d3 M! I; ^
A.I. INTRODUCTION ............................................................................ 497
  |( ?  @3 R) a! {+ q0 ~0 \Author Index..................................................................................................... 513 " u, n' N* g0 M) C% W7 \( I
Subject Index.................................................................................................... 529

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发表于 2009-3-6 02:05:03 | 显示全部楼层
我是新来的,收到消息...2 d0 c& Y8 l4 s
期待意外.期待奇迹
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发表于 2009-3-6 20:04:50 | 显示全部楼层
收到。谢谢斑竹!
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发表于 2009-3-12 02:40:52 | 显示全部楼层
收到了,
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发表于 2009-3-12 17:43:07 | 显示全部楼层
看来比较难得到啊..
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发表于 2009-3-25 02:10:22 | 显示全部楼层
谢谢啊0 v" i( B: c9 p# H( Z) w2 q9 p8 T7 H
会努力的
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发表于 2009-3-28 17:00:15 | 显示全部楼层
xiexie                             谢谢   非常感谢
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发表于 2009-4-9 18:48:46 | 显示全部楼层
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期待精彩!
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发表于 2009-4-14 20:07:22 | 显示全部楼层
新来的,刚收到,期待,不过好像是英文版的哦
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发表于 2009-4-18 23:22:49 | 显示全部楼层
Could you send me this book?
! K/ }5 a6 o- U! v9 |Thanks a lot* m* b. }  u- v9 X: Q
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My email is newssg-mail@yahoo.com1 [( n% w: a9 M% n# Q

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