多层结构钛酸锶铅薄膜及介电调谐与温度稳定性

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多层结构钛酸锶铅薄膜及介电调谐与温度稳定性
吴文彪 周栋义 金灯仁 孟中岩上海大学材料科学与工程学院,上海200072摘要：在研究组分、溶胶浓度对钛酸锶铅（10ST）薄膜结构、介电、调谐性能等影响的基础上，设计一种以低损耗-高调谐-低损耗组分交替沉积的方法，研制了三明治多层结构的PST薄膜（PST20-40-20）．研究结果表明，这种三明治多层结构的薄膜表面致密，晶粒均匀，同时具有调谐率高、损耗低等特点，综合性能比单组分要好，其调谐率、优值分别为52和45．在20～100℃范围内调谐率变化幅度小于8％，提高了温度稳定性．

KeyWord：sol-gel technique ; PST thin films ; muhilayer; dielectric tunability properties ; temperature stability
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+ m* O8 Q& b) ^( q0 ^% J% D7 X( o关键词：溶胶凝胶法 钛酸锶铅薄膜 多层结构 介电调谐性能 温度稳定性
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/ f6 I% L+ u6 b分类号：TQ17[著者标引]文献标识码：A文章编号：1007-2861（2008）05-0498-05
) J; X6 @5 Y' N7 a. G! I' sPreparation of Sandwich-Like Multilayered PbxSr1-xTiO3 Thin Film with Study of Dielectric Tunability and Temperature Stability WU Wen-biao, ZHOU Dong-yi, JIN Deng-ren, MENG Zhong-yan School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
( h- i# L0 z' A! ~6 |- sAbstract：A sandwich-like muhilayered lead strontium titanate PbxSr1-xTiO3 （PST20-40） thin film was fabricated on Pt/Ti/SiO2/Si substrates using the sol-gel technique. PST20-40-20 thin films have high tunability and low loss tangent. Tunability and FOM of PST20-40-20 thin films are 52 and 45, respectively. PST20-40-20 thin films have weaker temperature dependence, and the decreasing rate of tunability for PST20-40-20 thin films is about 8% at 20 ℃ to 100 ℃.

KeyWord：sol-gel technique ; PST thin films ; muhilayer; dielectric tunability properties ; temperature stability

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