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离子束辅助沉积红外增透薄膜工艺. p0 J; O4 A% f S5 R
傅晶晶 付秀华 邢政长春理工大学光电工程学院,长春130022摘 要:光纤接入网络的快速发展对光纤传输的光学性能方面提出了严格的要求。文中阐述了电子束离子辅助沉积系统在室温下镀制光纤端面近红外1520hm~1580hm范围增透膜的应用。讨论了膜料的选择、膜系的设计以及镀制过程中光学监控的工艺参数,制备出了光学性能较好的薄膜。[著者文摘]
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! A: P2 q- W8 n0 Q关键词:离子束辅助沉积 红外增透膜 光纤 膜厚控制
* y: W+ I5 p3 c分类号: TB43[著者标引]文献标识码:A文章编号:1672-9870(2008)02-0043-03栏目信息:
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IAD Process for Infrared Antireflection Coating ApplicationFU Jingjing, FU Xiuhua, XING Zheng School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022Abstract:The requirement for the performance of optical fiber device has been raised as the highspeed development of access network. The applications of ion source in ion assistant deposition for an antireflection coating in optical fiber at 1520nm - 1580nm as the near-infrared range under the low temperature are described. Choosing coating materials, designing the coating and manufacture are also discussed. The result of measuring turned out that both the optical quality got the require.[著者文摘]
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) T7 E- v1 j) F1 J8 J4 aKey words:ion assistant deposition; infrared antireflection coating; optical fiber; monitoring of film thickness |
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