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红光Nd:YAG激光器用光学薄膜的研制
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黄庆新 付秀华
3 O9 V$ V# ^' d; C长春理工大学光电工程学院,长春130022 摘 要:从产生660nm红光Nd:YAG激光器制作机理出发,分析了其使用的几种光学薄膜,采用光学薄膜理论的矢量合成方法,利用计算机膜系设计软件优化,并经过适当修正后得到便于控制的短波通膜系、二倍频高反射膜系,选择适当的薄膜材料和工艺参数,制备出与理论计算结果相吻合的几种光学薄膜,满足技术指标要求。[著者文摘]$ J# ~4 X2 \8 w8 J" r/ q( W
; I( f. _. H1 p# h关键词:Nd:YAG激光器 光学薄膜 膜系设计 二倍频 ) D# s2 q/ P( |1 f1 P
3 _6 ?4 z0 Z9 O3 p分类号:TN304.055[工业技术 > 无线电电子学、电信技术 > 半导体技术 > 一般性问题 > 材料 > 一般性问题 > 制取方法与设备 > 半导体薄膜技术]文献标识码:文章编号:相关文献:主题相关 参考文献 引用本文4 C, Q) A3 ^* B" _4 K# `
Development of Optical Thin Films for Red Nd'YAG LaserHUANG Qingxin, FU Xiuhua ( Changchun University of Science and Technology, Changchun 130022)Abstract:Based on the manufacturing theory of 660nm red Nd:YAG laser, A series of optical thin film for the laser system were analyzed, using vetorial resultant method ofoptical thin-film theoretical design, utilizing computer coating optimization methods based on the starting design, after appropriate amendment, we have obtained the controllable film system of short-wavelength pass and doubling frequency high reflectance, selected appropriate thin-film material and technological parameter, the results show that there is good compatibility, deposited films can meet the practical requirement..[著者文摘]8 a# v1 o* r- A) `# O; F
Key words:Nd:YAG laser; optical thin films; design of film system; frequency doubled |
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