光学薄膜的损耗测试与分析

xx_912 · 发表于 2008-12-23 06:07:15

光学薄膜的损耗测试与分析
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季一勤[1] 崔玉平[2] 刘华松[1] 宗杰[1] 宋洪君[1] 洪伟[1] 姜福灏[2] 孙赤权[3]
[1]天津津航技术物理研究所,天津300192 [2]北京自动化控制设备研究所,北京100074 [3]海装天津局驻天津兵器设备军代表室,天津300192 摘　要:随着激光基准系统和高精度激光测量系统的发展和应用,推动了超低损耗薄膜技术的发展,进一步控制损耗各分量的大小和分布,需要对光学薄膜总损耗进行测试分析。采用DIBS镀膜工艺在超光滑基底上镀制了高反膜和减反膜,给出了镀膜的工艺方法及工艺参数。通过分析时间衰减法测试总损耗的原理,分别采用时间衰减法和频率扫描法测试了光学薄膜的总损耗,在632.8nm波长点的测试结果为：高反膜层吸收为19.6×10^-6,反射率达到99.99686%;减反膜层总损耗为78×10^-6。最后对光学薄膜总损耗的构成和工艺改进进行了探讨。[著者文摘]

关键词:总损耗测试分析高反膜减反膜

分类号:O432[数理科学和化学 > 物理学 > 光学 > 光辐射、光度学、色度学]文献标识码：文章编号：相关文献:主题相关参考文献引用本文
Test and analysis of optics thin film lossJI Yi-qin, CUI Yu-ping, LIU Hua-song, ZONG Jie, SONG Hong-jun, HONG Wei, JIANG Fu-hao, SUN Chi-quan （1.Tianjin Jinhang Institute of Technical Physics, Tianjin 300192, China; 2.Beijing Automation Control Equipment Institute, Beijing 100074, China;3.Representative Office in Tianjin of Military Representatives Bureau of NED in Tianjin, Tianjin 300192, China）Abstract:With the development of laser standard systems and laser high precision measurement systems,the ultra-low loss thin film technology has been activated and developed. In order to control the magnitude and the distribution of various loss components, it is necessary to test and analyze the whole loss of optical thin film. In this paper, high reflective （HR） and anti-reflective （AR） films were coated on supersmooth substrates with the Dual Ion Beam Sputtering （DIBS）. The coating technological method and parameters were also reported. The whole loss of thin film was measured with the time attenuation method and frequency scanning method, respectively. The test results at 632.8 nm wavelength indicate that the absorption of the HR film is 19.6×10^6, its reflectivity reaches 99.996 86%, and the whole loss of the AR film is 78×10^6. Finally, the composition of the whole loss of thin film and the improvement of its technology were discussed..[著者文摘]
Key words:Whole loss; Test; Analysis; High reflection; Anti-reflection

longmin · 发表于 2008-12-23 13:31:05

謝謝樓主
提供新知

yikoulibu · 发表于 2009-3-27 14:16:11

感謝讓我看更多

doctor · 发表于 2009-8-3 00:28:30

文章确实很有水平,该单位在国内算是领先了吧!

doctor · 发表于 2009-8-6 10:59:46

文章的内容确实不错,

cgsolar · 发表于 2009-8-9 00:30:16

硕士论文：激光与光学材料相互作用分析@

wsminmin · 发表于 2009-9-16 05:03:51

请教大家个问题，大家做薄膜激光损伤测试时用的是什么激光器？

yuanyuan7854 · 发表于 2009-12-8 06:05:47

太感谢了，好东西

whzg · 发表于 2010-2-19 23:07:56

学习学习一下，谢谢了

蓝小尔 · 发表于 2010-3-10 23:59:15

谢谢楼主提供
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