具有定向及自控制功能的真空镀膜系统

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具有定向及自控制功能的真空镀膜系统
徐仁军 贺天民 王魁香吉林大学物理学院,吉林长春130023摘　要:对现有真空镀膜系统进行了改进。在原系统中增加了定向装置和5个控制装置，可实现定向镀膜和有效地控制膜厚。进而显著提高膜层质量．[著者文摘]
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2 y7 Z; S  S4 p& G: R关键词:真空镀膜 自动控制 膜厚
! ]- w& ]" v# H3 Q$ ~分类号:　TB75[著者标引]文献标识码：A文章编号：1005-4642（2005）09-0045-03栏目信息：学生园地
$ }/ O; R, w! q0 y' ~" |* u相关文献:主题相关

: f9 I9 W/ z/ J$ T- d6 c# J" Z7 c. BVacuum deposition system with directionalism and autocontrol functionsXu RenJun;He TianMin;Wang KuiXiangXu RenJun;He TianMin;Wang KuiXiangAbstract:A common vacuum deposition system is improved that a directional device and five autocontrol devices are equipped, so that the directional deposition and the effective control of film thickness can be achieved. Thus the quality of deposition film is remarkably enhanced.[著者文摘]

* U2 P+ c/ r* C; l# l: M/ y6 uKey words:vacuum deposition; autocontrol; film thickness