薄膜和多层膜的X射线散射方法与应用
( S3 N+ T4 k; |张爱梅 吴小山南京大学固体微结构物理国家重点实验室南京大学物理系,210093摘 要:文章主要介绍了几种X射线散射技术,包括X射线小角反射技术、X射线漫散射技术、掠入射X射线衍射和多晶薄膜的小角衍射技术。通过具体的事例说明这些X射线散射方法在薄膜研究中的应用。[著者文摘]
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! w O7 J. b3 ~: c1 O$ A! ^8 k U关键词:薄膜 X射线散射 微结构 X( k6 A T: F2 ]6 g" a9 c4 q, I
分类号: TQ342.742[机标]文献标识码:文章编号:栏目信息:X射线衍射应用专题0 \) F# _* {7 A8 _6 F
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X-ray scattering methods for films and multilayers and their applicationsZHANG Ai-Mei, WU Xiao-Shan Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing 210093, ChinaAbstract:Several X-ray diffraction/scattering techniques, including grazing incident X-ray reflectivity, transverse X-ray diffuse scattering, grazing incident X-ray diffraction and X-ray small-angle diffraction, for the characterization of films and muhilayers are described. Three examples are given to show the application of these methods.[著者文摘]
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Key words:film, X-ray scattering, microstructure |