薄膜和多层膜的X射线散射方法与应用

薄膜和多层膜的X射线散射方法与应用
3 x. [; W6 A3 j. r3 l- g张爱梅 吴小山南京大学固体微结构物理国家重点实验室南京大学物理系,210093摘　要:文章主要介绍了几种X射线散射技术，包括X射线小角反射技术、X射线漫散射技术、掠入射X射线衍射和多晶薄膜的小角衍射技术。通过具体的事例说明这些X射线散射方法在薄膜研究中的应用。[著者文摘]
" d6 Y3 r! p6 q2 d4 E4 U0 q5 V
0 Q) e. l3 l& I1 N# l% _9 ~0 Z3 V/ L关键词:薄膜 X射线散射 微结构
, M. P8 @( E8 ?分类号:　TQ342.742[机标]文献标识码：文章编号：栏目信息：X射线衍射应用专题
相关文献:主题相关 全文快照　　　

X-ray scattering methods for films and multilayers and their applicationsZHANG Ai-Mei, WU Xiao-Shan Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing 210093, ChinaAbstract:Several X-ray diffraction/scattering techniques, including grazing incident X-ray reflectivity, transverse X-ray diffuse scattering, grazing incident X-ray diffraction and X-ray small-angle diffraction, for the characterization of films and muhilayers are described. Three examples are given to show the application of these methods.[著者文摘]
5 M- A/ `% f/ Z& G  n9 z
$ O0 B- K/ B' d. eKey words:film, X-ray scattering, microstructure