线性渐变滤光片镀制挡板设计

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线性渐变滤光片镀制挡板设计秦洁玉 罗崇泰 马勉军兰州物理研究所,表面工程技术国家级重点实验室,甘肃兰州730000摘　要:提出了一种膜厚修正挡板的设计方法，分析给出了使用挡板情况下基片膜厚和监控片膜厚的关系，对线性渐变滤光片镀制挡板进行了设计，给出了设计结果。用设计的挡板成功镀制了线性渐变滤光片，并给出了镀制结果。[著者文摘]
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3 h/ P. k. w5 r' g7 w% k% D- |关键词:薄膜厚度 修正挡板 设计
分类号:　O484.221[著者标引]文献标识码：A文章编号：1006-7086（2007）01-0057-06栏目信息：知识与进展
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MASK DESIGN FOR LINEAR VARIABLE FILTERSQIN Jie-yu, LUO Chong-tai, MA Mian-jun National Key Lab. Of Surface Engineering, Lanzhou Institute of Physics, Lanzhou 730000, China Abstract:A method of mask for adjusting the thin film thickness design was described. Relation between the film thickness on the substrates and that on the chips was analyzed when a mask is used. The mask for linear variable filters was designed. Some linear variable filters were successfully fabricated and the results Were given.[著者文摘]

Key words:film thickness; modifying mask; design