薄膜厚度和光学常数的主要测试方法

xx_912 · 发表于 2007-7-26 09:17:55

[/free]薄膜厚度和光学常数的主要测试方法
陈燕平余飞鸿浙江大学现代光学仪器国家重点实验室,浙江杭州310027摘　要:准确地测量和控制薄膜厚度和光学常数等参数，在薄膜制备和分析和应用都是极为重要的。对薄膜的厚度和光学常数测试方法作了归纳和分类，并对几种主要的测试方法作了简要的介绍，分析了各自的特点及存在的问题。在测量薄膜的厚度和光学常数时，必须根据待测样品和测量精度要求选择合适的方法。[著者文摘]

关键词:薄膜厚度光学常数探针测量光谱测量椭偏测量
分类号:　O484.32[著者标引]文献标识码：A文章编号：1005-5630（2006）06-0084-05栏目信息：
相关文献:主题相关全文快照　　　

Test methods for film thickness and optical constantsCHEN Yan-ping, YU Fei-hong State Key Laboratory of Modern Optical Instrumentation, Zhejiang University,Hangzhou 310027,ChinaAbstract:It is very important to measure thickness and fabrication, research and application. Most test methods have optical constants accurately for film been concluded and assorted, some primary methods are presented briefly,and their characteristics and problems are analysed respectively. Correct method should be used based on samples and measurement precision requirement.[著者文摘]

Key words:film thickness; optical constants probe measurement; spectroscopy measurement ellipsometry measurement
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sekowa · 发表于 2006-1-6 13:41:53

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xx_912 xx_912 当前离线积分 421784 窥视卡雷达卡	发表于 2007-7-26 09:17:55 \| 显示全部楼层 \|阅读模式 [/free]薄膜厚度和光学常数的主要测试方法陈燕平余飞鸿浙江大学现代光学仪器国家重点实验室,浙江杭州310027摘　要:准确地测量和控制薄膜厚度和光学常数等参数，在薄膜制备和分析和应用都是极为重要的。对薄膜的厚度和光学常数测试方法作了归纳和分类，并对几种主要的测试方法作了简要的介绍，分析了各自的特点及存在的问题。在测量薄膜的厚度和光学常数时，必须根据待测样品和测量精度要求选择合适的方法。[著者文摘] 关键词:薄膜厚度光学常数探针测量光谱测量椭偏测量分类号:　O484.32[著者标引]文献标识码：A文章编号：1005-5630（2006）06-0084-05栏目信息：相关文献:主题相关全文快照　　　 Test methods for film thickness and optical constantsCHEN Yan-ping, YU Fei-hong State Key Laboratory of Modern Optical Instrumentation, Zhejiang University,Hangzhou 310027,ChinaAbstract:It is very important to measure thickness and fabrication, research and application. Most test methods have optical constants accurately for film been concluded and assorted, some primary methods are presented briefly,and their characteristics and problems are analysed respectively. Correct method should be used based on samples and measurement precision requirement.[著者文摘] Key words:film thickness; optical constants probe measurement; spectroscopy measurement ellipsometry measurement [free] 购买主题本主题需向作者支付 30 RMB金钱才能浏览
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