用于强激光系统的取样光栅减反射膜的研究

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用于强激光系统的取样光栅减反射膜的研究
2 J9 }! m& L8 r( Y- n. j刘 全，吴建宏
1 ~9 I' V7 |$ d, }（苏州大学 信息光学工程研究所，苏州  215006）
: R& m1 r1 p+ u2 H9 K摘要  　使用严格的耦合波理论分析了强激光系统镀sol-gel减反膜的取样光栅(BSG)特性，详细的分析了仿形膜和平面膜的减反情况和取样效率的变化。结果表明，镀平面膜是一种可行的技术方案，裸光栅的深度d是12nm时，膜厚dp为60nm，即光学厚度为1/4波长：d+dp=72nm。此时的取样效率为0.241‰。或者保证取样效率是1‰，则有dp=60nm， d=25nm；与未镀膜的裸光栅相比，采用文中所述方法设计的镀膜光栅有很好的减反增透效果，具有良好的应用前景。

' p. g/ s) {2 `! Y- h9 i关键词  取样光栅；严格耦合波理论；减反膜；衍射效率
2 b$ t! C, A5 W, t( j6 y7 w( s中图分类号  O436.1   O484        文献标识码   A
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Rigorous Coupled-wave Analysis of Beam Sampling
Grating with AR coating
& e" J( b' r4 P% _0 b" u: rLIU Quan，WU Jian-hong
4 G( M4 W8 j* @3 H# S7 T(Information Optics Engineering Institute, Soochow University, Suzhou  215006, China)
Abstract  The characteristics of the BSG with anti-reflection coating(sol-gel), which is employed in the inertial confinement fusion(ICF) system, have been analyzed by using the rigorous coupled-wave theory. The anti-reflection characteristics of the BSG with conformal AR coating and planarizing AR coating have been discussed in detail. The results show that the planarizing AR coating is remarkable.
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" r8 q; r; G% R. ]3 QKey words  beam sampling grating(BSG); rigorous coupled-wave theory ; anti-reflective coating; diffraction efficiency