A Beam Line Test Stand for Automation and Ion Source Developments

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A Beam Line Test Stand for Automation and Ion Source Developments
Amir Al-Bayati", Majeed Foadb, Tony Marina, Paul Young', Ron Macklin", and Noreen Connolly"
a AppliedMaterials, Implant Division, 9020 Capital of Texas H m , Building I , Suite 170, Austin TX 78759 USA
3 \- a. R- @: L3 V- Bb Applied Materials, Implant Division, Horsham, West Sussex, RH13 SPY UK
Abstract - A highly automated test stand for the development
5 ?, A8 X" C0 {/ j6 lof advanced ion sources is described The main goal is to
; k: e: [% j6 u7 m6 @; M) {develop fully automated ion sources which operate with long
lifetime, high beam current stability, and wide beam current
1 \4 n+ d; E  n/ a# Y( e* c9 _dynamic range. The source chamber is designed to accommodate
2 n. y$ r! y* wBernas, Freeman and other type ion sources. A
) o; t, e4 B7 I8 @" u0 w! Omicroprocessor-based system is used for studies of improved
software codes for control of ion sources and auto-tuning. The
quality of the extracted beam and the extraction optics is
$ t- g. r% ^' y! s! [' }. Gstudied using a current density beam profiler, an emittance
1 r5 h1 S8 b# W9 Nmonitor, and ion beam simulation. In this paper, we will
describe the layout and hardware of the test stand, and will
5 n; Q$ s7 d% M6 }- k. w. Idiscuss the requirements and criteria used in the design and
development of the ion source and beam line. Preliminary data
of Langmuir probe measorements obtained from the Bernas
" x" S) O& r3 H+ P7 Qand Freeman source will be presented