FDLC薄膜的化学结构对光学性能的影响

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FDLC薄膜的化学结构对光学性能的影响
4 X2 x$ ]& k) U0 O- u刘雄飞,张德恒,齐海兵  
. [) y0 e+ e5 J6 L! x; ?% N' ?0 x中南大学物理科学与技术学院,长沙410083
% I3 x) r+ `% W收稿日期   修回日期   网络版发布日期  2007-1-15   接受日期   
# J  `( x- M1 `, R: I摘要   研究氟化类金刚石（FDLC）薄膜化学结构对光学性能的影响，用等离子体增强化学气相沉积
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（PECVD）法在玻璃基底上沉积氟化类金刚石（FDLC）薄膜，用俄歇能谱、傅里叶红外光谱(FTIR)、紫外?可见光分光光度计 (UV-VIS)对薄膜进行分析。分析结果表明：沉积薄膜是典型的类金刚石结构，薄膜中氟主要以C-F2键存在；随着沉积温度的提高，C-F2含量先增后减；随着F含量的增加，FDLC薄膜的sp3含量减少，sp2含量增加；光学带隙与sp2键含量密切相关，sp2含量越大，薄膜的光学带隙越小。
7 x# p6 H. ^- K; C$ r: n8 d关键词   氟化类金刚石薄膜   等离子体增强化学气相沉积(PECVD)   光学带隙   沉积温度   

分类号 TN304-055   

3 X' D1 B3 F* @; ]" WInfluence of chemistry structure of FDLC film on optical property
* d5 a9 s7 F- c6 M3 m9 Z: x+ q0 d1 m, fLIU Xiong-fei,ZHANG De-heng,QI Hai-bing
4 _9 X# F- ]1 e- |' d5 aSchool of Physics Science and Technology, Central South University, Changsha 410083,China
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. B$ Z0 C- ]: s) ^Abstract  In order to study the influence of chemistry structure of FDLC film on optical property, the fluorinated diamond-like carbon(FDLC) films were deposited on the glass substrate with the method of PECVD, and analyzed by AES, FTIR and UV-VIS. The result shows that the deposited films are typical diamond-like structure and the fluorine in the films exists in the form of C-F2 key; the content of C-F2, increases in the first period and then reduces as the temperature continuously rises in the deposition process; the sp3 content of FDLC films decreases and the sp2 content increases when the fluorine content increases; the optical band gap has a close relationship with the content of sp2 key, and the more the sp2 content is, the smaller the optical band gap will be.  
( v" V' X# l" x* t5 Q- t, qKey words   FDLC film   PECVD   optical band gap   deposition temperature

anguangdi

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飞花无心

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