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Analysis of material modifications induced during laser damage in SiO2 thin films+ d4 W( |! M( w
L. Gallais *, J. Capoulade, F. Wagner, J.Y. Natoli, M. Commandre´
( [* ~1 D( s: c8 R+ x1 gInstitut Fresnel (UMR CNRS), Ecole Ge´ne´raliste d’Inge´nieurs de Marseille, Universite´ de Provence, Universite´ Paul Cezanne,
9 j2 n s+ \2 Q4 C9 g9 V: t5 iDomaine Universitaire de St Je´roˆme, 13397 Marseille Cedex 20, France
! ^5 `8 ]5 S& ^( H/ T9 IReceived 21 August 2006; received in revised form 13 November 2006; accepted 15 November 2006& [; g- Z# i( E0 P
Abstract* n5 A8 i% t* X- f
The damage mechanisms in silica thin films exposed to high fluence 1064 nm nano-second laser pulses are investigated. The thin films
% i7 R; G# ^9 `3 bunder study are made with different techniques (evaporation and sputtering, with and without ion assistance) and the results are compared.% g1 L+ x6 @- W+ S) k6 u/ Q
The material morphological, optical and structural modifications are locally analyzed with optical microscopy and profilometry,- G+ `- ~! b# N" B
photoluminescence and absorption microscopies. These observations are made for fluences near and above the laser damage threshold,
. N* e9 K1 p7 G* w- Vand also in the case of multiple pulse irradiations. An increase in absorption in and around the damages is observed, as well as the generation
, m$ C. A5 H. [3 W! i! P. mof different defects that we spatially resolve with absorption and luminescence mappings.
9 y2 }9 T- L6 L5 T 2006 Elsevier B.V. All rights reserved. |
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