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<p class="MsoNormal"><span style="FONT-SIZE: 14pt; FONT-FAMILY: 黑体; mso-bidi-font-size: 12.0pt; mso-hansi-font-family: 宋体">一、减反射膜（增透膜）</span><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">减反射膜是用来减少光能在光学元件表面的反射损失。这种反射光的损失不仅减少了成像强度，而且还会由此造成杂散光到达像平面使像的衬度降低，分辨率下降。由于这种原因，常在透光面上镀一层折射率小于基板折射率的透明介质薄膜，利用干涉原理，使入射光在膜上下两个表面的反射光干涉相消，这就可使反射光能减小，透射光能相对增大。<span lang="EN-US"><p /></span></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">如图<span lang="EN-US">3－1所示，在折射率为<shapetype id="_x0000_t75" path=" m@4@5 l@4@11@9@11@9@5 xe" stroked="f" filled="f" o:spt="75" o:preferrelative="t" coordsize="21600,21600"> <stroke joinstyle="miter" /><formulas><f eqn="if lineDrawn pixelLineWidth 0 " /><f eqn="sum @0 1 0 " /><f eqn="sum 0 0 @1 " /><f eqn="prod @2 1 2 " /><f eqn="prod @3 21600 pixelWidth " /><f eqn="prod @3 21600 pixelHeight " /><f eqn="sum @0 0 1 " /><f eqn="prod @6 1 2 " /><f eqn="prod @7 21600 pixelWidth " /><f eqn="sum @8 21600 0 " /><f eqn="prod @7 21600 pixelHeight " /><f eqn="sum @10 21600 0 " /></formulas><path o:connecttype="rect" gradientshapeok="t" o:extrusionok="f" /><lock v:ext="edit" aspectratio="t" /></shapetype><shape id="_x0000_i1025" style="WIDTH: 12.75pt; HEIGHT: 14.25pt" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image001.wmz" /></shape>的玻璃上镀一层厚度为e，折射率为n的透明介质薄膜。当波长为<sub><shape id="_x0000_i1026" style="WIDTH: 11.25pt; HEIGHT: 14.25pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image003.wmz" /></shape></sub>的光垂直入射时，两束反射光的光程差<p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><sub><shape id="_x0000_i1027" style="WIDTH: 99.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image005.wmz" /></shape></sub><span style="mso-spacerun: yes"> </span><sub><shape id="_x0000_i1028" style="WIDTH: 9.75pt; HEIGHT: 14.25pt" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image007.wmz" /></shape></sub>=0,1,2……<p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">反射光因干涉而互相抵消。<span lang="EN-US"><p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><group id="_x0000_s1035" style="MARGIN-TOP: -0.35pt; Z-INDEX: -4; LEFT: 0px; MARGIN-LEFT: 80.65pt; WIDTH: 180.75pt; POSITION: absolute; HEIGHT: 144.05pt; TEXT-ALIGN: left" coordsize="3615,2881" coordorigin="4145,11334" wrapcoords="-90 0 -90 18112 21600 18112 21600 0 -90 0"><shape id="_x0000_s1036" style="LEFT: 4145px; WIDTH: 3615px; POSITION: absolute; TOP: 11334px; HEIGHT: 2430px; mso-position-horizontal: center" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image009.png" o:title="1" /></shape><shapetype id="_x0000_t202" path=" m0,0 l0,21600,21600,21600,21600,0 xe" o:spt="202" coordsize="21600,21600"><stroke joinstyle="miter" /><path o:connecttype="rect" gradientshapeok="t" /></shapetype><shape id="_x0000_s1037" style="LEFT: 5031px; WIDTH: 2541px; POSITION: absolute; TOP: 13850px; HEIGHT: 365px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 3.781pt; LEFT: auto; MARGIN-LEFT: 7.593pt; WIDTH: 112.687pt; TOP: auto; HEIGHT: 11.062pt"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal"><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">图</span><span lang="EN-US">3</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">－</span><span lang="EN-US">1 </span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">增透膜光路图</span></p></div></td></tr></tbody></table></textbox></shape></group><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal"><span style="FONT-SIZE: 14pt; FONT-FAMILY: 黑体; mso-bidi-font-size: 12.0pt; mso-hansi-font-family: 宋体">二、反射膜</span><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">与减反射膜的作用恰恰相反，反射膜的要求是把入射光能大部分或几乎全部反射回去。例如，光学仪器，激光器中使用的反射镜都需镀反射膜。其结构是在基片上交替镀制光学厚度为<span lang="EN-US"><sub><shape id="_x0000_i1040" style="WIDTH: 12.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image011.wmz" /></shape></sub>高、低折射率材料的膜层。</span></span><span style="COLOR: red; FONT-FAMILY: 宋体">如图<span lang="EN-US">3－2所示</span></span><span style="COLOR: black; FONT-FAMILY: 宋体">，用<span lang="EN-US">H表示<sub><shape id="_x0000_i1041" style="WIDTH: 12.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image011.wmz" /></shape></sub>的高折射率膜层，L表示<sub><shape id="_x0000_i1042" style="WIDTH: 12.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image011.wmz" /></shape></sub>的低折射率膜层。这种结构的膜系，当入射光从低折射率到高折射率材料的界面反射时，反射光有<sub><shape id="_x0000_i1043" style="WIDTH: 11.25pt; HEIGHT: 11.25pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image015.wmz" /></shape></sub>的位相变化。反之，从高折射率到低折射率界面反射时，没有位相变化，又由于膜层的光学厚度为<sub><shape id="_x0000_i1044" style="WIDTH: 12.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image011.wmz" /></shape></sub>，入射光经膜系的各个界面上发射出来的光束到达前表面时具有相同的位相，发生相长干涉，而实现高反射。<p /></span></span></p><p class="MsoNormal" style="TEXT-INDENT: 20pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.0pt; tab-stops: 57.75pt"><group id="_x0000_s1044" style="MARGIN-TOP: -0.3pt; Z-INDEX: 6; LEFT: 0px; MARGIN-LEFT: 105pt; WIDTH: 127.8pt; POSITION: absolute; HEIGHT: 140.7pt; TEXT-ALIGN: left" coordsize="2556,2814" coordorigin="3897,2370"><shape id="_x0000_s1045" style="LEFT: 3897px; WIDTH: 2415px; POSITION: absolute; TOP: 4716px; HEIGHT: 468px" stroked="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 3.593pt; LEFT: auto; MARGIN-LEFT: 7.187pt; WIDTH: 106.343pt; TOP: auto; HEIGHT: 16.218pt"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal"><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">图</span><span lang="EN-US">3-2 </span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">介质反射膜结构</span></p></div></td></tr></tbody></table></textbox></shape><shape id="_x0000_s1046" style="LEFT: 3978px; WIDTH: 2475px; POSITION: absolute; TOP: 2370px; HEIGHT: 2205px; mso-position-horizontal: center" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image018.jpg" o:title="Untitled" /></shape></group><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><br style="mso-ignore: vglayout" clear="all" /><p class="MsoNormal"><span style="FONT-SIZE: 14pt; FONT-FAMILY: 黑体; mso-bidi-font-size: 12.0pt; mso-hansi-font-family: 宋体">三、薄膜光学常数的测量</span><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">薄膜光学常数（折射率、膜厚等）是薄膜设计和制备所必需的参数。薄膜光学常数的稳定性和精确度直接影响到薄膜的光学性能。<span lang="EN-US"><p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><group id="_x0000_s1038" style="MARGIN-TOP: 10.3pt; Z-INDEX: -3; LEFT: 0px; MARGIN-LEFT: 0px; WIDTH: 199.5pt; POSITION: absolute; HEIGHT: 184.7pt; TEXT-ALIGN: left; mso-position-horizontal: left" coordsize="3990,3694" coordorigin="4646,6638"><shape id="_x0000_s1039" style="LEFT: 4646px; WIDTH: 3990px; POSITION: absolute; TOP: 6638px; HEIGHT: 3060px" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image020.png" o:title="4" /></shape><shape id="_x0000_s1040" style="LEFT: 5177px; WIDTH: 3340px; POSITION: absolute; TOP: 9923px; HEIGHT: 409px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 4.093pt; LEFT: auto; MARGIN-LEFT: 7.468pt; WIDTH: 152.625pt; TOP: auto; HEIGHT: 13.281pt; mso-next-textbox: #_x0000_s1040"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal" style="tab-stops: 57.75pt"><span style="COLOR: red; FONT-FAMILY: 宋体">图<span lang="EN-US">3－3 薄膜</span></span><span style="COLOR: black; FONT-FAMILY: 宋体">不儒斯特角分析</span><span lang="EN-US" style="COLOR: red; FONT-FAMILY: 宋体"><p /></span></p><p class="MsoNormal"><span lang="EN-US"> <p /></span></p></div></td></tr></tbody></table></textbox></shape><wrap type="square" /></group><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体">1.不儒斯特角法测薄膜折射率<p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">当单色的<span lang="EN-US">p偏振光（电场矢量E位于入射面）以不儒斯特角<sub><shape id="_x0000_i1045" style="WIDTH: 12pt; HEIGHT: 17.25pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image022.wmz" /></shape></sub>从空气（折射率n<sub>0</sub>＝1）射到镀在玻璃上的薄膜（折射率为n）时，</span></span><span style="COLOR: red; FONT-FAMILY: 宋体">如图<span lang="EN-US">3－3所示</span></span><span style="COLOR: black; FONT-FAMILY: 宋体">，空气与薄膜界面上<span lang="EN-US">p偏振光的反射比为零，即反射光的强度为零。此时不儒斯特角<sub><shape id="_x0000_i1046" style="WIDTH: 12pt; HEIGHT: 17.25pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image022.wmz" /></shape></sub>为<br /> <sub><shape id="_x0000_i1047" style="WIDTH: 68.25pt; HEIGHT: 33.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image025.wmz" /></shape></sub><p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: red; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">因此，通过照度表监测反射光的强度，当强度变为零时，测出此时的入射角，即不儒斯特角<span lang="EN-US"><sub><shape id="_x0000_i1048" style="WIDTH: 12pt; HEIGHT: 17.25pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image022.wmz" /></shape></sub>后，即可求出薄膜的折射率n.<p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><span style="mso-spacerun: yes"> </span>由于不儒斯特角法只需要测量样品表面的反射光强度，因此对那些不透明或半透明薄膜，折射率的测量，此法更具独特优势。<p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体">2.干涉法动态测定膜厚<p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 21pt; mso-char-indent-count: 2.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: red; FONT-FAMILY: 宋体">如图<span lang="EN-US">3－4所示</span></span><span style="COLOR: black; FONT-FAMILY: 宋体">，从光源<span lang="EN-US">S发出的光线由空气以入射角<sub><shape id="_x0000_i1049" style="WIDTH: 6.75pt; HEIGHT: 12.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image028.wmz" /></shape></sub>射到厚度为e的薄膜MN上。空气薄膜的折射率分别为n<sub>1</sub>和n<sub>2</sub>.光线a的透射光为a<sup>，</sup>，光线b的透射光线为b<sup>，</sup>。a<sup>，</sup>，b<sup>，</sup>两光线发自同一点光源S，满足相干条件。<p /></span></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">因<span lang="EN-US">a<sup>，</sup>光线是光线a折入薄膜后在点C和点B经两次连续反射，再透射出来的，这两次反射都是在光疏媒质界面上发生，不产生反射时的相位突变；光线b是由光线b直接射出的，<p /></span></span></p><p class="MsoNormal" style="TEXT-INDENT: 15pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.0pt; tab-stops: 57.75pt"><group id="_x0000_s1041" style="MARGIN-TOP: 0px; Z-INDEX: 5; LEFT: 0px; MARGIN-LEFT: 0px; WIDTH: 231.75pt; POSITION: absolute; HEIGHT: 189.45pt; TEXT-ALIGN: left; mso-position-horizontal: center" coordsize="4635,3789" coordorigin="3633,9495"><shape id="_x0000_s1042" style="LEFT: 3633px; WIDTH: 4635px; POSITION: absolute; TOP: 9495px; HEIGHT: 3425px" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image030.png" o:title="1" /></shape><shape id="_x0000_s1043" style="LEFT: 4107px; WIDTH: 4158px; POSITION: absolute; TOP: 12920px; HEIGHT: 364px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 3.812pt; LEFT: auto; MARGIN-LEFT: 7.625pt; WIDTH: 193.531pt; TOP: auto; HEIGHT: 11.031pt; mso-next-textbox: #_x0000_s1043"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal"><span style="COLOR: black; FONT-FAMILY: 宋体">图<span lang="EN-US">3-4<span style="mso-spacerun: yes"> </span>干涉法动态测定膜厚原理示意图 </span></span></p></div></td></tr></tbody></table></textbox></shape></group><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 15.75pt; mso-char-indent-count: 1.5; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><br style="mso-ignore: vglayout" clear="all" /><p class="MsoNormal" style="tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">也无相位突变，则这两束透射的相干光的光程差是<span lang="EN-US"><p /></span></span></p><p class="MsoNormal" style="TEXT-INDENT: 84pt; mso-char-indent-count: 8.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><sub><shape id="_x0000_i1050" style="WIDTH: 125.25pt; HEIGHT: 17.25pt" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image032.wmz" /></shape></sub><p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 52.5pt; mso-char-indent-count: 5.0; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><sub><shape id="_x0000_i1051" style="WIDTH: 228.75pt; HEIGHT: 33pt" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image034.wmz" /></shape></sub><p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">式中，<span lang="EN-US"><sub><shape id="_x0000_i1052" style="WIDTH: 9.75pt; HEIGHT: 12.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image036.wmz" /></shape></sub>为折射角。由折射定律：<sub><shape id="_x0000_i1053" style="WIDTH: 83.25pt; HEIGHT: 17.25pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image038.wmz" /></shape></sub>则<p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><sub><shape id="_x0000_i1054" style="WIDTH: 299.25pt; HEIGHT: 33.75pt" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image040.wmz" /></shape></sub><p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><group id="_x0000_s1026" style="MARGIN-TOP: 7.2pt; Z-INDEX: 1; LEFT: 0px; MARGIN-LEFT: 38.1pt; WIDTH: 276.9pt; POSITION: absolute; HEIGHT: 66.45pt; TEXT-ALIGN: left" coordsize="5538,1329" coordorigin="2559,11568"><shape id="_x0000_s1027" style="LEFT: 5322px; WIDTH: 2565px; POSITION: absolute; TOP: 11568px; HEIGHT: 480px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 4.031pt; LEFT: auto; MARGIN-LEFT: 7.906pt; WIDTH: 113.875pt; TOP: auto; HEIGHT: 16.781pt; mso-next-textbox: #_x0000_s1027"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal" style="TEXT-INDENT: 10.5pt; mso-char-indent-count: 1.0; mso-char-indent-size: 10.5pt"><span lang="EN-US" style="FONT-FAMILY: 宋体">K=0,1,2<span style="COLOR: black">……<span style="mso-spacerun: yes"> </span>加强</span><p /></span></p></div></td></tr></tbody></table></textbox></shape><shape id="_x0000_s1028" style="LEFT: 5562px; WIDTH: 2535px; POSITION: absolute; TOP: 12298px; HEIGHT: 530px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 3.75pt; LEFT: auto; MARGIN-LEFT: 7.906pt; WIDTH: 112.375pt; TOP: auto; HEIGHT: 19.312pt; mso-next-textbox: #_x0000_s1028"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal"><span lang="EN-US" style="FONT-FAMILY: 宋体">K=0,1,2<span style="COLOR: black">……<span style="mso-spacerun: yes"> </span>减弱</span><p /></span></p></div></td></tr></tbody></table></textbox></shape><shape id="_x0000_s1029" style="LEFT: 2559px; WIDTH: 2472px; POSITION: absolute; TOP: 11708px; HEIGHT: 1189px" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image042.wmz" /><textbox style="MARGIN-TOP: 4.25pt; LEFT: auto; MARGIN-LEFT: 7.75pt; WIDTH: 109.218pt; TOP: auto; HEIGHT: 52.281pt; mso-next-textbox: #_x0000_s1029" /></shape></group><span style="COLOR: black; FONT-FAMILY: 宋体">干涉条件可写为：<span lang="EN-US"><p /></span></span></p><p class="MsoNormal" style="MARGIN-LEFT: 46.2pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"><span style="mso-spacerun: yes"> </span><p /></span></p><p class="MsoNormal" style="MARGIN-LEFT: 46.2pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="MARGIN-LEFT: 46.2pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="MARGIN-LEFT: 89.65pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="TEXT-INDENT: 33.6pt; mso-char-indent-count: 3.2; mso-char-indent-size: 10.5pt; tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span style="COLOR: black; FONT-FAMILY: 宋体">如果光垂直入射，则膜的光学厚度（</span><span lang="EN-US" style="FONT-SIZE: 11.5pt; COLOR: black; FONT-FAMILY: 宋体; mso-bidi-font-size: 12.0pt">n<sub>2</sub>e</span><span style="COLOR: black; FONT-FAMILY: 宋体">）为<span lang="EN-US"><p /></span></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><group id="_x0000_s1030" style="MARGIN-TOP: 2.9pt; Z-INDEX: 2; LEFT: 0px; MARGIN-LEFT: 42.5pt; WIDTH: 262pt; POSITION: absolute; HEIGHT: 86.75pt; TEXT-ALIGN: left" coordsize="5240,1735" coordorigin="2647,1810"><group id="_x0000_s1031" style="LEFT: 5002px; WIDTH: 2885px; POSITION: absolute; TOP: 1810px; HEIGHT: 1502px" coordsize="2781,1460" coordorigin="5955,1805"><shape id="_x0000_s1032" style="LEFT: 5955px; WIDTH: 2541px; POSITION: absolute; TOP: 1805px; HEIGHT: 365px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 4.218pt; LEFT: auto; MARGIN-LEFT: 7.687pt; WIDTH: 117.406pt; TOP: auto; HEIGHT: 11.562pt; mso-next-textbox: #_x0000_s1032"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal" style="TEXT-INDENT: 10.5pt; mso-char-indent-count: 1.0; mso-char-indent-size: 10.5pt"><span lang="EN-US">K</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">＝</span><span lang="EN-US">0</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">，</span><span lang="EN-US">1</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">，</span><span lang="EN-US">2</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">……</span><span lang="EN-US"><span style="mso-spacerun: yes"> </span></span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">加强</span></p></div></td></tr></tbody></table></textbox></shape><shape id="_x0000_s1033" style="LEFT: 6195px; WIDTH: 2541px; POSITION: absolute; TOP: 2900px; HEIGHT: 365px" stroked="f" filled="f" coordsize="21600,21600" type="#_x0000_t202"><textbox style="MARGIN-TOP: 4.281pt; LEFT: auto; MARGIN-LEFT: 7.375pt; WIDTH: 117.437pt; TOP: auto; HEIGHT: 11.593pt; mso-next-textbox: #_x0000_s1033"><table cellspacing="0" cellpadding="0" width="100%"><tbody><tr><td><div><p class="MsoNormal"><span lang="EN-US">K</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">＝</span><span lang="EN-US">0</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">，</span><span lang="EN-US">1</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">，</span><span lang="EN-US">2</span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">……</span><span lang="EN-US"><span style="mso-spacerun: yes"> </span></span><span style="FONT-FAMILY: 宋体; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'">减弱</span></p></div></td></tr></tbody></table></textbox></shape></group><shape id="_x0000_s1034" style="LEFT: 2647px; WIDTH: 2040px; POSITION: absolute; TOP: 1865px; HEIGHT: 1680px" coordsize="21600,21600" type="#_x0000_t75"><imagedata src="./index34.files/image044.wmz" /><textbox style="MARGIN-TOP: 3.968pt; LEFT: auto; MARGIN-LEFT: 7.687pt; WIDTH: 87.625pt; TOP: auto; HEIGHT: 76.812pt; mso-next-textbox: #_x0000_s1034" /></shape></group><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal" style="tab-stops: 57.75pt"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><p class="MsoNormal"><span lang="EN-US" style="COLOR: black; FONT-FAMILY: 宋体"> <p /></span></p><br style="mso-ignore: vglayout" clear="all" /><p class="MsoNormal"><span style="COLOR: black; FONT-FAMILY: 宋体">在镀膜过程中，随着基片上膜层的不断增厚，透射光强就不断变化。当膜层的折射率大于基片的折射率，且其光学厚度为入射光的<span lang="EN-US">1/4波长（镀膜时的控制波长）的偶数倍时，光的干涉强度呈极大值；厚度为入射光的1/4波长的奇数倍时，光的干涉强度呈极小值。因此光强每经过一个周期的变化，膜层的厚度便增加了<sub><shape id="_x0000_i1029" style="WIDTH: 12.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image046.wmz" /></shape></sub>，光强从极大到极小变化了半个周期，膜厚便增加了<sub><shape id="_x0000_i1030" style="WIDTH: 12.75pt; HEIGHT: 30.75pt" coordsize="21600,21600" type="#_x0000_t75"> <imagedata src="./index34.files/image048.wmz" /></shape></sub>.在镀膜过程中，可将光的干涉强度机值的周期变化，经光电转换，直接从电表或数字显示器上观察出来，从而实现膜厚监测与控制。这种方法的优点，是可实现镀膜过程中，膜厚的动态控制。</span></span></p> |
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发表于 2006-11-15 09:02:42
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发表于 2007-4-11 03:56:37
