|
|
大家好,我们公司有一台日本showa的真空镀膜机出售,以下是机器的简要说明,如有兴趣可与我联系。我电话是13937381870。邮箱:adanning@hotmail.com . 联系人:安先生
9 q5 v4 G& h3 g# R1. Vintage: 2003
8 v3 m& |4 H* X) n6 f$ q2. Chamber size: 1100 mm
$ `% V! Z+ }3 s N4 Y3. Low vacuum system: ULVAC VS2401 Rotary Pump+ULVAC PRC-012AS
2 t; d. m: r* X0 ~, xHigh vacuum system: SHOWA SHINKU SFD-26C oil Diffusion Pump. Poly Cold R2000 3 b; M0 o4 g3 A8 o) q
series: n0 z4 [9 J. Z8 W5 X
4. Two E-Beam Gun
& t1 M5 B- s2 P+ M9 h4 X 5. JEOL JST-10F EB-Source Power Supply
! r* w3 }- Y8 ?$ R; k/ u Z 6. Kyosan 3KW RF GENERATOR for Assisted Deposition
! ]* T% h: C1 T: m+ r" R# f7 C D7. Inficon IC/5 Deposition Controller
, }. I/ N) k% p, W. m# c% [8.Optical monitoring system, from 300 nm to 2500nm
& V m! @& e4 ?5 e! {9. Substrate holding fixture: Dome. |
|