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大家好，我们公司有一台日本showa的真空镀膜机出售，以下是机器的简要说明，如有兴趣可与我联系。我电话是13937381870。邮箱：adanning@hotmail.com . 联系人：安先生7 l$ p6 S4 S6 e0 }; n, U
1. Vintage: 2003
3 U, l& P- B9 W2 J6 `; M2. Chamber size: 1100 mm5 g% c+ f7 M% q4 D' L/ I& @ N
3. Low vacuum system: ULVAC VS2401 Rotary Pump+ULVAC PRC-012AS
) r4 J2 _& c( e* [ OHigh vacuum system: SHOWA SHINKU SFD-26C oil Diffusion Pump. Poly Cold R2000
' X6 j! `3 C5 _5 ~series" L8 }# i/ b* l' Z e7 r6 U' k+ M3 W
4. Two E-Beam Gun
" I& L1 g: ?9 J' r4 ^ 5. JEOL JST-10F EB-Source Power Supply
8 x- h) d5 q- W2 D; U 6. Kyosan 3KW RF GENERATOR for Assisted Deposition
4 o/ H/ U' w% w( Q" v/ E7. Inficon IC/5 Deposition Controller
! T" y& e% t; V# M8.Optical monitoring system, from 300 nm to 2500nm
" d- R0 Z% O3 x) U, ` R* a+ W1 }9. Substrate holding fixture: Dome. |
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发表于 2006-8-29 18:41:10
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