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大家好,我们公司有一台日本showa的真空镀膜机出售,以下是机器的简要说明,如有兴趣可与我联系。我电话是13937381870。邮箱:adanning@hotmail.com . 联系人:安先生) Z- ^2 X# s) r! m
1. Vintage: 20033 Z5 E' K0 y- i
2. Chamber size: 1100 mm, B% T* i$ }# d7 }9 u( B P
3. Low vacuum system: ULVAC VS2401 Rotary Pump+ULVAC PRC-012AS' L- x/ M) T1 P" X9 |) X7 i/ e u
High vacuum system: SHOWA SHINKU SFD-26C oil Diffusion Pump. Poly Cold R2000
9 S7 |. ]% X0 zseries* w) P0 P$ F @2 x/ |) g4 m9 p
4. Two E-Beam Gun
, L3 \ D7 k& ~* P4 u) L+ i 5. JEOL JST-10F EB-Source Power Supply; i* |- q& v- V2 U6 _+ s' ~
6. Kyosan 3KW RF GENERATOR for Assisted Deposition& y8 |+ J/ B9 r
7. Inficon IC/5 Deposition Controller ) e! d1 G$ R3 {& G
8.Optical monitoring system, from 300 nm to 2500nm) C: t( x r* v) B$ A
9. Substrate holding fixture: Dome. |
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