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TiO2薄膜折射率的调控方法 摘 要:采用电子束蒸发技术及其辅助工艺制备了TiO2薄膜,利用X射线衍射(XRD)、X射线光电子能谱(XPS)和原子力显微镜(AFM)对薄膜的组织结构进行了表征,采用紫外可见分光光度计研究了TiO2薄膜的折射率变化.结果表明:传统电子束蒸发镀制的TiO2薄膜的折射率低于块体值,通过调节氧气压、沉积速率和衬底温度可在1.97~2.22范围内调控其折射率;采用离子束辅助轰击可使薄膜致密化,获得折射率在2.06~2.42范围内变化的TiO2薄膜;利用斜角入射沉积可控制薄膜生长角度与孔隙率,实现折射率在1.71~2.18范围内的调控.[著者文摘]3 c0 V9 g6 i: i V- L) r
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关键词:薄膜 折射率 电子束蒸发
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分类号: O484.41[著者标引]
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文章编号:1674-2974(2011)09-0059-05
6 U, l4 ?& y/ X# g. ~8 E, o/ o栏目信息:材料科学
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% z7 i+ e/ P" Y' _Regulation of the Refractive Index of TiO_2 FilmsZHOU Ling-ping,LUO Xiao-lan,ZHU Jia-jun,PENG Kun,LI De-yi,LI Shao-luCollege of Materials Science and Engineering,Hunan Univ,Changsha,Hunan 410082,ChinaAbstract:TiO2 films were prepared by electron beam evaporation(E-beam).X-ray diffraction(XRD),X-ray photoelectron spectroscopy(XPS) and atomic force microscope(AFM) were applied to characterize the film's structure.UV-visible spectrophotometer was used to analyze the changes of refractive index(RI).It has been found that the RI of TiO2 film prepared by E-beam is lower than that of the bulk.It can be regulated within 1.97~2.22 by controlling O2 pressure,deposition rate and substrate temperature.Compact film with RI within 2.06~2.42 is obtained by ion beam assisted deposition.Glancing angle deposition can realize the regulation of RI within 1.71~2.18 by controlling the growing angle and the porosity of films.[著者文摘]4 r1 f3 @" t+ g0 W6 W7 L/ [
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Key words:films; refractive index; electron beam evaporation
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( [6 _% ]7 Q( i# P: X' a' P6 ?TiO2薄膜折射率的调控方法.rar; Y9 G/ t+ w7 ^7 M `
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