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- Some Materials Science Aspects of PVD Hard Coatings
复制代码 Christian Mitterer1 and Paul H. Mayrhofer2
/ u6 M- T5 h+ x# ?0 ~# y1 Materials Center Leoben, Department of Physical Metallurgy and Materials
& D: R/ N, z$ @Testing, University of Leoben
+ S) D6 t4 h1 M; m. ]Franz-Josef-Strasse 18, A-8700 Leoben, Austria! j6 i/ @; q" h6 w6 u# O
2 Department of Physical Metallurgy and Materials Testing, University of Leoben \4 p, [ N+ D, R S
Franz-Josef-Strasse 18, A-8700 Leoben, Austria* B& r) I7 A) g* D( K* l
Abstract. Hard coatings deposited by Physical Vapor Deposition (PVD) based3 e3 b2 D5 P/ G2 f: M
on the transition element nitrides are nowadays widely applied to reduce wear and+ m, r+ m1 J2 g/ Q7 D/ I
corrosion of tools. In the last two decades, tremendous advances have been achieved
: q" J' [ }, j4 |5 e& j' Rin the development of deposition and application technology of hard coatings. The
) u* Y- h( l. E" w; k/ Nmethods to be applied to optimize coating properties are known from materials ?- d) w0 U9 S. r
science, however, only in the last few years significant attempts have been made
! [, Y+ {- n6 e( j& t. \3 m3 ~to use them for designing coatings showing the properties required. The aim of- W& f/ c* {% O8 f2 K; T
this paper is to show the interrelationships between microstructural parameters
* l, Y& P$ g' O3 [: K3 H2 Q6 Qlike grain size or microstress and mechanical coating properties and their thermal) {( E" x6 S4 T1 Z# K
stability. This is demonstrated using conventional coating systems like TiN and% @1 Z7 h D4 T9 |) A; q" _
CrN as well as nanocomposite coating systems like TiN–TiB2 and TiC–TiB2. |
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