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CCD Image Sensors in Deep-Ultraviolet% s) |: F; w- O* }9 Z" k+ t+ ~
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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) " N) P( ?4 R4 @! y1 ~
by Flora Li and Arokia Nathan
! y: o& ^; ?5 x; I! {3 S* HHardcover: 231 pages
& U: h, L' v, T2 W: l7 hPublisher: Springer; 1 edition (April 19, 2005)
/ [5 g0 T3 A4 z e- h! DLanguage: English
8 U0 s) C, R# V! {ISBN-10: 354022680X
7 o) W0 y/ y' v, ?ISBN-13: 9783540226802% p, Y5 m3 @# {/ Y, k
Product Description' k8 g" l0 `& g; I: B4 r+ @
In order to facilitate the inspection of deep sub-micron features in integrated circuits, a new generation of semiconductor inspection systems is being pushed to new limits to image at ever shorter wavelengths - using deep-UV (DUV) sensitive cameras. However, conventional CCD cameras have very poor responsivity in the DUV and their stability upon prolonged DUV exposure is a relevant concern. This book investigates the causes of CCD degradation and the damage mechanisms due to DUV exposure, as well as reporting new results for device performance at these wavelengths.
0 m( D& ]3 D# u' ?! ]% Nhttp://www.filesonic.com/file/22379257/354022680X.rar |
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