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CCD Image Sensors in Deep-Ultraviolet/ w/ A! I' _, ?% }5 n
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; Q4 d0 R# d6 l4 h+ t5 G1 a0 P2 nCCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) & L( u5 F/ J9 L- t @# Z
by Flora Li and Arokia Nathan9 a, r e7 ^ {3 ?3 ~
Hardcover: 231 pages 9 H8 w, j- q) X% K2 b
Publisher: Springer; 1 edition (April 19, 2005)
% s7 p3 {( Q5 v! r+ N0 E( G8 KLanguage: English
: A" ?! _6 Z+ Z* ~ISBN-10: 354022680X 7 v- Y% P8 u1 U3 r: E
ISBN-13: 9783540226802
2 [! C& x; T3 j4 f+ zProduct Description/ j! e8 \' @$ l' H2 i
In order to facilitate the inspection of deep sub-micron features in integrated circuits, a new generation of semiconductor inspection systems is being pushed to new limits to image at ever shorter wavelengths - using deep-UV (DUV) sensitive cameras. However, conventional CCD cameras have very poor responsivity in the DUV and their stability upon prolonged DUV exposure is a relevant concern. This book investigates the causes of CCD degradation and the damage mechanisms due to DUV exposure, as well as reporting new results for device performance at these wavelengths.
, l; S$ E5 ?/ C) B) \# A bhttp://www.filesonic.com/file/22379257/354022680X.rar |
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