TiO2薄膜在玻璃材料上的亲水性研究

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TiO2薄膜在玻璃材料上的亲水性研究
汪宇炎[1] 汪洋[1,2][1]浙江理工大学,浙江杭州310018 [2]兰州交通大学光电子技术和智能控制重点实验室,甘肃兰州730070摘　要:用真空蒸镀法在玻璃基片上制备TiO2薄膜，分别在300、400、500、600℃下退火。用紫外-可见吸收光谱、X射线衍射（XRD）、扫描电镜（SEM）、接触角测定等分析方法研究蒸镀时间、退火温度和退火时间对薄膜亲水性的影响，找出真空蒸镀法制备亲水性TiO2薄膜的最佳工艺条件。结果表明：经紫外光照射1h后，所有TiO2薄膜都能被水润湿，在蒸镀时间为45s，退火温度为500℃，退火时间为2h备件下制得的薄膜样品亲水性能最佳。[著者文摘]

关键词:TiO2薄膜 真空蒸镀 退火 玻璃 亲水性
分类号:　O647.11 TN304.055[著者标引]文献标识码：A文章编号：1001-3660（2009）02-0052-03栏目信息：工艺研究
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Study on Hydrophilic Properties of TiO2 Thin Films Prepared on GlassWANG Yu-yan, WANG Yang 1. Zhejinag University of Science and Technology, Hangzhou 310081, China; 2. Key Laboratory of Opto-electronic Technology and Intelligent Control, Lanzhou Jiaotong University, Lanzhou 730070, ChinaAbstract:TiO2 thin films were prepared by vacuum deposition on the glass substrates and annealed at 300℃, 400℃ , 500℃ and 600℃ respectively. The influences of deposition time, annealing temperature and annealing time on hydrophilicity of the TiO2 thin films were studied by using UV-vis abosorption spectrum, X-ray diffraction, scanning electron microscopy and contact angle measurement the aim was to find the optimum technology of preparing hydrophilic TiO2 thin films by vacuum deposition. The results reveal that TiO2 thin films Can be wetted by water after UV light illuminating for 1 h, the sample shows optimum hydrophilicity after depositing for 45s and anneding for 2h at 500℃.[著者文摘]

. ]' K' b) ^3 D* {1 W3 F5 JKey words:TiO2 thin films ; Vacuum deposition ; Annealing; Glass ; Hydrophilicity

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