真空镀膜技术基础(英文)介绍目录

xx_912 · 发表于 2006-3-18 18:26:48

NOYES PUBLICATIONS
WILLIAM ANDREW PUBLISHING
Norwich, New York, U.S.A.
Copyright © 2003, Noyes Publications / William Andrew Publishing. All rights reserved.
No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical,
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in writing from the Publisher.
Cover Art © 2003 by Brent Beckley / William Andrew Publishing
Library of Congress Catalog Card Number: 2003004260
ISBN: 0-8155-1495-6
Published in the United States of America by
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Library of Congress Cataloging-in-Publication Data
Mattox, D. M.
The foundations of vacuum coating technology / Donald M. Mattox.
p. cm.
ISBN 0-8155-1495-6 (alk. paper)
1. Vacuum metallurgy--Congresses. 2. Metal coating--Congresses. I. Title.
TN686.5.V3M38 2003
669'.028'4--dc21
2003004260
Notice: To the best of our knowledge the information in this publication is accurate; however the Publisher
does not assume any responsibility or liability for the accuracy or completeness of, or consequences arising
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commercial products does not constitute endorsement or recommendation for use by the Publisher. Final
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Manufactured in the United States of America.

The author would like to dedicate this book to his wife, Vivienne,
without whose support and encouragement this book would not have been written.
He would also like to dedicate the book to his granddaughter, Lindsey,
with the hope that when she grows up she will study the history
of those subjects that are of interest to her.

The author assumes responsibility for all errors of commission and omission and would like to encourage
comments, corrections, and additions to be sent to donmattox@mpinm.com. The author would like to acknowledge
Collin Alexander for providing material from the “proceedings” of the 1943 U.S. Army-sponsored conference
on “Application of Metallic Fluoride Reflection Reducing Films to Optical Elements”—the text of which
may be found on the SVC Web Site at www.svc.org; Ric Shimshock for the reference to the early work on
magnetron sputtering on webs; Bob Cormia for his comments on the early development of planar magnetrons; and
Angus Macleod for input on the early work in optical coatings. Russ Hill made some important contributions, as
did Bob Waits, who called my attention to Fred Wehner’s discussion on the etymology of the term “sputtering.”
The author would like to express thanks to Phil Baumeister for calling attention to the very important RLG patent
and thus to some interesting patent litigation.
The author would particularly like to thank Julie Filatoff for her expert editing and formatting of this book,
Linnea Dueker for her excellent job of scanning the illustrations, and Julie Romig for her critical reading of the
manuscript. The SVC Oral History Project, located on the SVC Web Site at www.svc.org/H/H_OralInterviews.html,
has also contributed some interesting details. Don Mattox would like to encourage anyone with historical papers,
patents, pictures, or other materials related to the history of vacuum coating to contact him at
donmattox@mpinm.com.

Vacuum coating processes consist of a source of vapor (atomic or molecular) of the material to be deposited,
transport of the vapor to the surface to be coated, and condensation on the surface to form a thin film or coating
with the desired properties. In the case of reactive deposition, availability of the reactive gas at the surface of the
growing film and “activation” of the reactive gas are important.
Generally all the necessary ingredients for different vacuum-coating processes were present long before the
process was used in production. In some cases, such as Edison’s “Gold Moulded” cylinder phonograph record
production (1902–1912), a vacuum coating process (“electrical evaporation,” “cathodic disintegration” or, as it
was later called, “sputtering”) was the “enabling technology” that allowed mass production of the records. In
other cases the use of vacuum coating processes has supplanted the use of other coating processes, such as
electroplating, with a more environmentally friendly process. In still other cases the existence of vacuum coating
processes allowed new applications and markets to be developed. An example is the deposition of “decorativefunctional”
coatings that have both a pleasing appearance (gold, brass, or gray-black for example) and wear
resistance.
As with many ideas, inventions, and inventors, it is often difficult to establish the originator of any particular
idea or invention. The search is complicated by the information being in both the patent literature and the scientific/
technical literature. Patents seldom cite relevant technical papers and technical papers seldom cite relevant
patent literature.
The field of vacuum coating is continually evolving and new processes, materials, and applications provide a
fertile field for the historian.
“Those that do not know the history of their field are doomed to repeat
its mistakes or end up in patent litigation.” (G. Santayana, paraphrased)

Preface ................................................................................................................................................................. vii
Introduction ........................................................................................................................................................... 1
Early Vacuum Science and Technology ................................................................................................................. 2
Early Electricity and Magnetism ............................................................................................................................ 5
Early Plasma Physics and Chemistry ..................................................................................................................... 7
Some Scientific and Engineering Societies and Publications ................................................................................ 9
Patents and the U.S. Patent Office ....................................................................................................................... 10
Deposition Processes ........................................................................................................................................... 11
Sputter Deposition ........................................................................................................................................ 11
Thermal Evaporation .................................................................................................................................... 19
Arc Vapor Deposition ................................................................................................................................... 24
Chemical Vapor Deposition ........................................................................................................................... 27
Ion Plating ..................................................................................................................................................... 30
Surface Preparation ............................................................................................................................................. 34
Summary ............................................................................................................................................................. 37
Endnotes .............................................................................................................................................................. 39
References............................................................................................................................................................ 43
Acronyms Used in Vacuum Coating .................................................................................................................... 61
Glossary of Terms for Vacuum Coating .............................................................................................................. 69

自由风 · 发表于 2006-4-11 20:23:41

楼主，我看到你的很多帖都非常好，这个呢，不大好说

自由风 · 发表于 2006-4-11 20:24:33

应该是粘贴的时候出点问题

自由风 · 发表于 2006-4-11 20:25:12

我相信楼主，支持之

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真空镀膜技术基础(英文)介绍目录

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