薄膜和多层膜的X射线散射方法与应用

薄膜和多层膜的X射线散射方法与应用
$ X4 O3 y. I2 d) o8 J  Q" H3 {张爱梅 吴小山南京大学固体微结构物理国家重点实验室南京大学物理系,210093摘　要:文章主要介绍了几种X射线散射技术，包括X射线小角反射技术、X射线漫散射技术、掠入射X射线衍射和多晶薄膜的小角衍射技术。通过具体的事例说明这些X射线散射方法在薄膜研究中的应用。[著者文摘]

关键词:薄膜 X射线散射 微结构
分类号:　TQ342.742[机标]文献标识码：文章编号：栏目信息：X射线衍射应用专题
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; M$ X( I; c5 y2 KX-ray scattering methods for films and multilayers and their applicationsZHANG Ai-Mei, WU Xiao-Shan Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing 210093, ChinaAbstract:Several X-ray diffraction/scattering techniques, including grazing incident X-ray reflectivity, transverse X-ray diffuse scattering, grazing incident X-ray diffraction and X-ray small-angle diffraction, for the characterization of films and muhilayers are described. Three examples are given to show the application of these methods.[著者文摘]

+ O( m2 z+ }5 V/ Q+ n3 dKey words:film, X-ray scattering, microstructure