模具钢表面连续激光沉积TiN类薄膜的研究

模具钢表面连续激光沉积TiN类薄膜的研究葛柏青 段来根 郎荣兴常州机电职业技术学院模具技术系,江苏常州213164摘　要:利用波长为10．6μm的CO2连续激光诱导化学气相沉积的方法，在模具钢基体上沉积TiN类薄膜。采用XRD、OM、SEM、EDS等手段分析薄膜的组织和相结构。实验表明，当激光功率为600W，扫描速度为2mm／s时，通过H2、N2和TiCl4之间的化学反应，在模具钢表面获得了均匀致密的枝晶组织，其显微硬度最高可达2500HV。[著者文摘]

3 R; k9 _4 z" \: K) ?5 I关键词:模具钢 激光化学气相沉积 薄膜
7 _6 C) ^; L5 K2 S分类号:　TG156.99[著者标引]文献标识码：A文章编号：1673-4971（2007）01-0007-03栏目信息：试验研究
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7 s  t  \$ q+ U. \5 ?$ U9 n/ gStudy on Continuous Laser Deposition of TiN Thin Films on Die Steel SubstrateGE Bai-qing, DUAN Lai-gen, LANG Rong-xing Changzhou Institute of Mechatronic Technology,Changzhou Jiangsu 213164, ChinaAbstract:The TiN thin films were produced on die steel substrate by wavelength of 10.6 m CO2 continual laser chemical vapor deposition （LCVD）. The microstructures and morphology of the TiN thin films were characterized by X-ray diffraction （XRD）, optical microscope （OM）, scanning electron microscope （SEM）, and energy disperse spectrometer （EDS）. The results indicated that, only when the laser power is 600 W and scanning velocity is 2 mm/s, through the reaction of H2, N2 and TiCl4, the TiN films were deposited on die steel substrate by LCVD. And they have dense dendritic structure. Its microhardness is 2500 HV.[著者文摘]

Key words:Die steel; LCVD; Thin films