A Beam Line Test Stand for Automation and Ion Source Developments

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A Beam Line Test Stand for Automation and Ion Source Developments
Amir Al-Bayati", Majeed Foadb, Tony Marina, Paul Young', Ron Macklin", and Noreen Connolly"
  o! p: ~7 R" I; p, v! q9 L$ Na AppliedMaterials, Implant Division, 9020 Capital of Texas H m , Building I , Suite 170, Austin TX 78759 USA
b Applied Materials, Implant Division, Horsham, West Sussex, RH13 SPY UK
Abstract - A highly automated test stand for the development
of advanced ion sources is described The main goal is to
develop fully automated ion sources which operate with long
lifetime, high beam current stability, and wide beam current
" j# c/ V/ x2 P. _dynamic range. The source chamber is designed to accommodate
Bernas, Freeman and other type ion sources. A
, I1 S# B: J/ p, bmicroprocessor-based system is used for studies of improved
software codes for control of ion sources and auto-tuning. The
quality of the extracted beam and the extraction optics is
studied using a current density beam profiler, an emittance
monitor, and ion beam simulation. In this paper, we will
8 o: e) l$ u) Ldescribe the layout and hardware of the test stand, and will
discuss the requirements and criteria used in the design and
development of the ion source and beam line. Preliminary data
of Langmuir probe measorements obtained from the Bernas
and Freeman source will be presented