A Beam Line Test Stand for Automation and Ion Source Developments

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A Beam Line Test Stand for Automation and Ion Source Developments
! Z! f! f0 z1 |2 uAmir Al-Bayati", Majeed Foadb, Tony Marina, Paul Young', Ron Macklin", and Noreen Connolly"
3 N* b* N( D1 d& [7 F0 }  m1 Da AppliedMaterials, Implant Division, 9020 Capital of Texas H m , Building I , Suite 170, Austin TX 78759 USA
# }7 P; k( \6 H/ a( x+ q7 h0 w5 Y" ^b Applied Materials, Implant Division, Horsham, West Sussex, RH13 SPY UK
Abstract - A highly automated test stand for the development
of advanced ion sources is described The main goal is to
develop fully automated ion sources which operate with long
9 L1 `- \5 V6 ?; Q- {3 K# ulifetime, high beam current stability, and wide beam current
( c7 \( Q4 R/ Ldynamic range. The source chamber is designed to accommodate
Bernas, Freeman and other type ion sources. A
microprocessor-based system is used for studies of improved
  |  a# S0 e2 N* hsoftware codes for control of ion sources and auto-tuning. The
' C# v: K2 _2 E' n' E& Aquality of the extracted beam and the extraction optics is
studied using a current density beam profiler, an emittance
monitor, and ion beam simulation. In this paper, we will
9 T2 D5 B0 q+ \0 ?3 v6 {describe the layout and hardware of the test stand, and will
. P% W( s, l. gdiscuss the requirements and criteria used in the design and
% n* S4 B) ^) S* @6 q! Pdevelopment of the ion source and beam line. Preliminary data
of Langmuir probe measorements obtained from the Bernas
3 @& @* R1 }4 a: B$ l1 A- Jand Freeman source will be presented