FDLC薄膜的化学结构对光学性能的影响

zyp

FDLC薄膜的化学结构对光学性能的影响
刘雄飞,张德恒,齐海兵  
中南大学物理科学与技术学院,长沙410083
) E; K3 ^$ c6 \+ S收稿日期   修回日期   网络版发布日期  2007-1-15   接受日期   
摘要   研究氟化类金刚石（FDLC）薄膜化学结构对光学性能的影响，用等离子体增强化学气相沉积
9 G/ y7 H$ H0 `+ B/ ^! V: ^, J
  f% H4 x' R5 C; x/ v0 ~+ q

0 w  f/ J* i6 K9 H2 ~; K9 V6 X（PECVD）法在玻璃基底上沉积氟化类金刚石（FDLC）薄膜，用俄歇能谱、傅里叶红外光谱(FTIR)、紫外?可见光分光光度计 (UV-VIS)对薄膜进行分析。分析结果表明：沉积薄膜是典型的类金刚石结构，薄膜中氟主要以C-F2键存在；随着沉积温度的提高，C-F2含量先增后减；随着F含量的增加，FDLC薄膜的sp3含量减少，sp2含量增加；光学带隙与sp2键含量密切相关，sp2含量越大，薄膜的光学带隙越小。
关键词   氟化类金刚石薄膜   等离子体增强化学气相沉积(PECVD)   光学带隙   沉积温度   
0 w  O, O! _, K
分类号 TN304-055   

Influence of chemistry structure of FDLC film on optical property
# p/ s' i- H9 y+ uLIU Xiong-fei,ZHANG De-heng,QI Hai-bing
9 H- V) v6 {; X0 C  @9 sSchool of Physics Science and Technology, Central South University, Changsha 410083,China

. D# ?% J1 G+ |. j& T  
/ q' B9 M+ X3 I: P4 t& \Abstract  In order to study the influence of chemistry structure of FDLC film on optical property, the fluorinated diamond-like carbon(FDLC) films were deposited on the glass substrate with the method of PECVD, and analyzed by AES, FTIR and UV-VIS. The result shows that the deposited films are typical diamond-like structure and the fluorine in the films exists in the form of C-F2 key; the content of C-F2, increases in the first period and then reduces as the temperature continuously rises in the deposition process; the sp3 content of FDLC films decreases and the sp2 content increases when the fluorine content increases; the optical band gap has a close relationship with the content of sp2 key, and the more the sp2 content is, the smaller the optical band gap will be.  
Key words   FDLC film   PECVD   optical band gap   deposition temperature

anguangdi

谢谢了 [s:1]  [s:1]  [s:1]  [s:1]  [s:1]

飞花无心

非常感谢!