重磅外文最新书籍：Optical Thin Films and Coatings
Woodhead Publishing Series in Electronic
and Optical Materials
Optical Thin Films and
Coatings
From Materials to Applications
Second Edition
Edited by
Angela Piegari
Contents
Contributors ............................................................................................................xix
Preface to the First Edition ................................................................................. xxiii
Preface ................................................................................................................ xxvii
PART I DESIGN AND MANUFACTURING OF OPTICAL
THIN FILMS AND COATINGS
CHAPTER 1 Recent developments in deposition techniques
for optical thin films and coatings...............................3
H. Angus Macleod
1.1 Introduction.....................................................................................3
1.2 Early Processes for the Deposition of Optical Coatings ...............4
1.3 The Energetic Processes .................................................................6
1.3.1 Ion-Assisted Deposition........................................................6
1.3.2 Ion Plating.............................................................................8
1.3.3 Sputtering............................................................................10
1.4 Cathodic Arc Evaporation ............................................................15
1.5 Pulsed Laser Deposition ...............................................................15
1.6 Chemical Vapor Deposition .........................................................16
1.7 Atomic Layer Deposition .............................................................17
1.8 Sol-Gel Processes .........................................................................18
1.9 Etching ..........................................................................................18
1.10 Other Techniques..........................................................................19
1.11 Conclusion ....................................................................................19
References.....................................................................................20
CHAPTER 2 Design of complex optical coatings...........................25
Pierre G. Verly, Daniel Poitras
2.1 Introduction...................................................................................25
2.2 Modern Numerical Thin Film Synthesis Techniques ..................27
2.2.1 Fourier Transform Method.................................................27
2.2.2 Inhomogeneous Refinement ...............................................30
2.2.3 Needle Method ...................................................................32
2.2.4 Global Optimization ...........................................................34
2.3 Manufacturability Issues...............................................................37
2.4 Hybrid Design...............................................................................40
2.4.1 Waveguide Facet Coatings.................................................41
2.4.2 Structured Coatings ............................................................44
2.4.3 Solar Cells...........................................................................48
2.5 Conclusion ....................................................................................52
References.....................................................................................53
Further Reading ............................................................................64
CHAPTER 3 Optical monitoring strategies for optical coating
manufacturing .............................................................65
Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana
V. Amotchkina
3.1 Introduction...................................................................................65
3.2 Classification of Optical Monitoring Strategies ..........................67
3.3 Turning Point Optical Monitoring and Error Self-Compensation
Effect.............................................................................................69
3.4 Level Monitoring: Passive and Active Monochromatic
Monitoring Strategies ...................................................................75
3.5 Monitoring by Swing Values .......................................................85
3.6 Direct Broadband Optical Monitoring .........................................89
3.7 Indirect Optical Monitoring Strategies.........................................92
3.8 Conclusion ....................................................................................97
References.....................................................................................99
CHAPTER 4 Production strategies for high-precision optical
coatings .................................................................... 103
Henrik Ehlers, Detlev Ristau
4.1 Introduction.................................................................................103
4.2 Basic Concept of Deterministic Production...............................105
4.3 Optical Broadband Monitoring ..................................................107
4.4 Hybrid Thickness Monitoring Concepts ....................................112
4.5 Virtual Deposition System .........................................................114
4.5.1 Deposition System............................................................115
4.5.2 Online Measurement System............................................116
4.5.3 Process-Tracing Algorithm...............................................116
4.5.4 Application Example for a VDP Analysis .......................117
4.6 Direct Online Correction Tools..................................................118
4.7 Design Stability in Production Processes...................................120
4.8 Deposition Control of Coating Systems with Continuous
Refractive Index Variation .........................................................125
4.8.1 Production of Material Mixtures......................................126
4.8.2 Deposition Control of Rugate Filters ...............................132
4.9 Conclusion ..................................................................................135
References...................................................................................136
Further Reading ..........................................................................140
vi ContentsPART II UNCONVENTIONAL FEATURES OF OPTICAL THIN
FILMS AND COATINGS
CHAPTER 5 Complex materials with subwavelength inclusions
for optical thin film applications ............................. 143
Anna Sytchkova
5.1 Introduction.................................................................................143
5.2 Physics of Some Classes of Novel Materials with
Subwavelength Inclusions ..........................................................145
5.3 Ceramic Matrix With Embedded Nanostructures......................147
5.3.1 Materials With Quantum Dots .........................................148
5.3.2 Nanoclusters in Periodic Arrays (Metamaterials)............149
5.3.3 Effect of Small Random Disorders and Imperfections
in Metamaterials ...............................................................154
5.3.4 Composites of Random Elements ....................................154
5.3.5 Coatings Containing Thin and Ultrathin Metal Layers
and Coatings Containing Metasurfaces............................155
5.4 Searching for Alternative Materials for Resonating
Inclusions ....................................................................................156
5.4.1 Alloys and Intermetallics: Novel Metal Materials ..........157
5.4.2 Semiconductors and Dielectrics .......................................160
5.5 Characterization of Novel Materials with Subwavelength
Inclusions ....................................................................................162
5.5.1 Optical Characterization Techniques for Complex
Materials ...........................................................................163
5.5.2 Local Properties of Nanostructured Materials .................165
5.5.3 Effective Macroscopic Parameters...................................166
5.5.4 Complex Materials and Ultrathin Metals in Multilayers.168
5.6 Conclusions.................................................................................172
References...................................................................................173
CHAPTER 6 Scattering properties of random structures
in thin films............................................................... 187
Gerard Berginc, Alexei A. Maradudin
6.1 Introduction.................................................................................187
6.2 Numerical Solution of Reduced Rayleigh Equations
for Scattering of Light From Dielectric Films With 1D
Rough Surfaces...........................................................................189
6.2.1 A Film With a 1D Randomly Rough Vacuum-Dielectric
Interface Deposited on the Planar Surface of a Perfect
Conductor..........................................................................1906.2.2 A Film With a Planar Vacuum-Dielectric Interface
Deposited on a 1D Randomly Rough Perfectly
Conducting Surface ..........................................................196
6.3 Reduced Rayleigh equations for the scattering of P- and
S-Polarized Light From, and Its Transmission through, a Film
With Two 1D Rough Surfaces ...................................................200
6.3.1 p-Polarization....................................................................203
6.3.2 s-Polarization ....................................................................207
6.3.3 Results...............................................................................209
6.4 Numerical Solution of the Reduced Rayleigh Equation
for the Scattering of Light From a 2D Randomly Rough
Penetrable Surface ......................................................................213
6.5 Scattering of Light From a Dielectric Film With a 2D Randomly
Rough Surface Deposited on a Planar Metal Substrate.............216
6.5.1 Scattering of Light From a Dielectric Film With a 2D
Randomly Rough Surface Deposited on a Planar Metal
Substrate............................................................................218
6.5.2 A Dielectric Film With a Planar Interface With a
Dielectric Superstrate and a 2D Randomly Rough
Interface With a Dielectric Substrate...............................224
6.6 Analytical Methods for the Scattering From a 3D Film With
Randomly Rough Surfaces .........................................................229
6.6.1 Definition of the Scattering Matrix..................................230
6.6.2 The SSA and the SPM for a 2D Rough Surface .............233
6.6.3 The SSA and the SPM for Slabs With Randomly
Rough Boundaries ............................................................240
6.6.4 Conclusions.......................................................................247
6.7 Theoretical Methods for the Scattering of Polarized Light
From Randomly Rough Interfaces and Random Media............247
6.7.1 Specific Intensity and Cross Section................................248
6.7.2 Specific Intensity and Bethe-Salpeter Equations.............253
6.7.3 Effective Permittivity .......................................................255
6.7.4 Expression of the Intensity Operator P11 .........................256
6.7.5 Expression for the Incoherent Intensity and the Green
Tensors P11 .......................................................................259
6.7.6 Coherent Backscattering...................................................265
6.7.7 Conclusion ........................................................................273
6.8 Applications ................................................................................273
6.9 Conclusion ..................................................................................281
Appendix.....................................................................................281
viii ContentsA.1 Definitions of the Scattering Matrices for a Single Rough
Surface ................................................................................281
A.2 Mueller Matrix and Tensor ................................................282
Acknowledgments ......................................................................284
References...................................................................................284
Further Reading ..........................................................................289
CHAPTER 7 Optical properties of thin film materials at short
wavelengths .............................................................. 291
Juan I. Larruquert
7.1 Introduction.................................................................................291
7.2 Material Behavior Over the Spectrum .......................................291
7.3 Reflection and Transmission in Absorbent Materials ...............294
7.3.1 Roughness and Scattering ................................................296
7.4 The Optical Constants of Materials at Short Wavelengths .......299
7.4.1 Interaction Mechanisms Between Photons
and Matter.........................................................................299
7.4.2 Transparency Cutoff of Dielectrics ..................................300
7.4.3 Free Electron Metals ........................................................301
7.4.4 Tightly Bound Electrons: Atomic Scattering
Factors...............................................................................303
7.4.5 Absorption Edges..............................................................306
7.4.6 Optical Properties at Higher Energies..............................309
7.5 Link Between n and k: Kramers-Kronig Analysis.....................314
7.6 Experimental Determination of Optical Constants ....................315
7.7 Specifics of Optical Coatings at Short Wavelengths.................318
7.7.1 Transmission Filters .........................................................318
7.7.2 High-Reflectance Coatings...............................................321
7.7.3 Linear Polarizers and Phase Retarders.............................332
7.8 Conclusion ..................................................................................341
Acknowledgements.....................................................................342
References...................................................................................342
CHAPTER 8 Controlling thermal radiation from surfaces............ 357
Carl G. Ribbing
8.1 Introduction.................................................................................357
8.2 Blackbody Radiation ..................................................................359
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