单层SiO_2和ZrO_2薄膜激光辐照损伤的对比
单层SiO_2和ZrO_2薄膜激光辐照损伤的对比
【英文篇名】Contrast Study of Laser-induced Damage of Monolayer SiO_2 and ZrO_2 Films
【作者中文名】章春来; 郭袁俊; 吕海兵; 袁晓东; 蒋晓东; 祖小涛;
【作者英文名】ZHANG Chunlai1; 2; GUO Yuanjun2; LV Haibing1; YUAN Xiaodong1; JIANG Xiaodong1; ZU Xiaotao2（1.Research Center of Laser Fusion; China Academy of Engineering Physics; Mianyang 621900; China; 2.School of Physical Electronics; University of Electronic Science and Technology of China; Chengdu 610054; China）;
【作者单位】中国工程物理研究院激光聚变研究中心; 电子科技大学物理电子学院;
【文献出处】压电与声光, Piezoelectrics & Acoustooptics, 编辑部邮箱 2011年 01期
期刊荣誉：中文核心期刊要目总览ASPT来源刊中国期刊方阵CJFD收录刊
【关键词】SiO2/ZrO2薄膜; 孔隙率; 热吸收; 激光损伤阈值; 损伤形貌;
【英文关键词】SiO2/ZrO2 films; porous ratio; thermal absorption; LIDT; damage morphology;
【摘要】分别采用物理气相沉积和溶胶-凝胶技术在K9基片上镀制了4块光学厚度相近的Si O2和ZrO2单层膜。分别采用椭偏仪、透射式光热透镜和原子力显微镜对两类薄膜的孔隙率、热吸收和微观表面形貌进行了表征;利用Nd∶YAG激光器测试了样品的激光损伤阈值(LIDT;1 064 nm/8.1 ns),并用光学显微镜观察了两类薄膜的损伤形貌。结果表明,化学膜的孔隙率和表面粗糙度均大于相应的物理膜;对同一类薄膜而言,Si O2化学膜的孔隙率和表面粗糙度都比ZrO2化学膜大,物理膜则相反。化学膜有更小的热吸收,其损伤阈值普遍比物理膜高出1倍,其损伤形貌多为热熔型,而物理膜多为应力型。
【英文摘要】Four pieces of the monolayer SiO2 and ZrO2 films with similar optical thickness were deposited on K9 glass substrates with the electron beam evaporation method(PVD) and dip-coating method(Sol-Gel),respectively.The porous ratio,thermal absorption and surface morphologies were investigated by the ellipsometer,Stanford photo-thermal solutions and atomic force microscopy,respectively.The laser-induced damage threshold(LIDT) of the two kinds of films was measured by Nd∶YAG laser(1 064 nm/ 8.1 ns).The optical mic...
【基金】国家“八六三”基金资助项目(2008AA8040508);; 中央高校基本科研业务费专项基金资助项目(ZYGX2009X007)
【DOI】CNKI:SUN:YDSG.0.2011-01-032
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