沃拉斯顿棱镜可见光区减反射膜研制
沃拉斯顿棱镜可见光区减反射膜研制郝殿中 吴福全 王召兵 宋连科 刘涛 李国华曲阜师范大学激光研究所,山东曲阜273165摘 要:为了提高镀膜材料和冰洲石基底的附着力以及提高棱镜的透过比,拓宽有效使用带宽,借助于计算机辅助设计方法,设计了高性能多层减反射膜系;选用合适的光学薄膜材料,利用电子束蒸镀,借助于离子源辅助蒸镀,制作了高性能的宽带减反射膜.测试结果表明:e光,o光的平均剩余反射率小于0.5%,有效使用带宽覆盖可见光区;为了改善薄膜和基底问的附着力,采用Al2O3做过渡层。[著者文摘]
关键词:薄膜光学 薄膜 沃拉斯顿棱镜 减反射膜 附着力 带宽
分类号: O484.4[著者标引]文献标识码:A文章编号:1005-0086(2008)08-1143-02栏目信息:研究简报
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Development of antireflection thin films based on wollaston prism in hole visible spectrumHAO Dian-zhong , WU Fu quan, WANG Zhao-bing, SONG Lian-ke, LIU Tao, LI Guo-hua Institute of Laser Research,Qufu Normal University,Qufu 273165,ChinaAbstract:In order to improve the adhesive power of coating materials to the Iceland crystal substraee and increase the transmittance and the bandwidth of the prism, a high-quality multilayer anti-reflecting coatings was designed. Suitable optical coating materials was evaporated by the dectron beam with ion assistance, and a broadband anti-reflecting film of high quality was obtained. The test results indicate that the average residual reflection of both e light and o light are below 0.5% ; the effective bandwidth covers with whole visible spectrum. In order to improve the adhesive power of the film to the substrate, Al2O3 was selected as the transition layer.[著者文摘]
Key words:film optical; thin film; wollaston prism; antireflection coatings; adhesion; bandwidth 參考參考
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