表面热透镜技术测量光学薄膜样品表面热变形

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表面热透镜技术测量光学薄膜样品表面热变形
王艳茹[1,2] 李斌成[1] 刘明强[1][1]中国科学院光电技术研究所,成都610209 [2]中国科学院研究生院,北京100039摘　要:给出了连续调制激励光照射下光学薄膜样品表面热变形场的理论分布,并由此定义了表面热透镜（STL）信号。根据表面热透镜理论实验测量了一个BK7基底高反膜样品的形变,给出了表面热透镜信号随调制频率的变化曲线。实验结果表明：在采用的STL实验构型中,探测了最小1.985 nm的直流形变,对应不调制时的形变为3.97 nm,相应的形变探测灵敏度达到了10 pm量级;直流形变与功率成线性关系;交流表面热透镜信号随着频率增大而减小,在高频端近似成线性减小。[著者文摘]
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; P* {4 ?( v& b% [8 h# C关键词:热变形 光学薄膜样品 表面热透镜 吸收 探测灵敏度
分类号:　O484.5[著者标引]文献标识码：A文章编号：1001-4322（2010）08-1805-05栏目信息：第十九届全国激光技术会议专辑
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; x  Z% p2 q) \( J. ~( Z( TMeasurement of thermal deformation using surface thermal lens techniqueWang Yanru,Li Bincheng,Liu Mingqiang1.Institute of Optics and Electronics,Chinese Academy of Sciences,P.O.Box 350,Chengdu 610209,China）（2.Graduate University of Chinese Academy of Sciences,Beijing 100039,ChinaAbstract:A theoretical model to describe the three-dimensional deformation distribution of an optical sample irradiated by a square-wave modulated laser is presented.The surface thermal lens（STL） signal is defined based on the deformation theory simultaneously.According to STL theory,the deformation of a highly reflective sample with BK7 substrate is measured experimentally.The results are in good agreement with deformation model.With our experiment configuration,a minimal 1.985 nm direct current（DC） deformation is measured,corresponding to 3.97 nm without modulation.The 10 pm detect limit for the deformation measurement is achieved in our experiment.The AC STL signal is also presented in the frequency domain.[著者文摘]

) P! U3 @& T6 C& ?8 ~0 L7 }Key words:thermal deformation; optical coating sample; surface thermal lens; absorptance; detecting limitation

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