用于薄膜制备的射频宽束离子源的设计

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[Point=40]<FONT color=#6633ff><a href="http://cluster2.gbaopan.com/Gbaopan.web.beta1/d0d1303333d4441cb01ba0e0939dd250.gbp?name=%e7%94%a8%e4%ba%8e%e8%96%84%e8%86%9c%e5%88%b6%e5%a4%87%e7%9a%84%e5%b0%84%e9%a2%91%e5%ae%bd%e6%9d%9f%e7%a6%bb%e5%ad%90%e6%ba%90%e7%9a%84%e8%ae%be%e8%ae%a1.PDF&amp;type=pdf&amp;place=blog&amp;blogkey=Yz4Rxt0wovr2KP%2fmvQkjy3s9kOUoSM3X4UUUgTk%2fOS6IsJ4S19pPbzJksLIvLO%2bX" target="_blank" >用于薄膜制备的射频宽束离子源的设计</A></FONT>[/Point]