红外光学薄膜材料光学常量计算和在宽带增透膜中的应用

zyp

红外光学薄膜材料光学常量计算和在宽带增透膜中的应用

2 V, Z- P8 s7 A苏伟涛 李斌 刘定权 李大琪 张凤山中国科学院上海技术物理研究所,上海200083摘要：使用经典洛伦兹谐振子模型对热蒸发制备的锗、硫化锌以及低吸收稀土氟化物薄膜的红外透射光谱进行拟合，得出这些材料在中长波红外区的光学常量．使用这三种材料设计并制备了锗窗口7．7～15μm宽带增透膜系，通过优化设计并且使用长波红外区吸收小的低折射率材料，在长波区（13～15μm）的透过率测量值有明显提高，15μm处的透过率为89．9％．

KeyWord：Optical c oating; Optical constants Lorenz oscillator model ; Infrared antireflection coating
: Q, R% c3 ~, \: R5 n
关键词：光学薄膜 光学常量 洛伦兹谐振子模型 红外增透膜
6 o# m3 Q, `0 F% B( e2 Q+ i
分类号：TB443[著者标引]文献标识码：A文章编号：1004-4213（2008）03-0490-4
0 u( \( l/ j! d+ o5 bThe Fitting of Optical Constants of Infrared Coating Materials and Application in Broadband Antireflection Coatings SU Wei-tao,LI Bin,LIU Ding-quan,LI Da-qi,ZHANG Feng-shan Shanghai Institute of TechnoLogy Physics, Chinese Academy of Science, Shanghai 200083, China
- S( V  b& m; J1 l+ M: {7 zAbstract：The middle and long wave infrared optical constants of evaporated films,such as germanium,zinc sulphide,low absorption rare earth fluoride, etc, were obtained by fitting the transmission spectrum based on classical Lorenz oscillator model. Broad band antireflective coating from 7.7 μm to 15 μm had been designed and fabricated using these three materials. The measured transmission in the long wave region （13-15μm） had been improved greatly by refining the design and using the low absorption materials. The measured transmission at 15μm is 89.9%.

KeyWord：Optical c oating; Optical constants Lorenz oscillator model ; Infrared antireflection coating