大口径光学元件薄膜厚度均匀性修正

大口径光学元件薄膜厚度均匀性修正

5 t+ T; |; ?6 u' D1 k
& [& ~0 @8 g+ W3 u3 M1 u& n
* N& `! ]$ v" c8 l% `
【英文篇名】 Correction for film thickness uniformity of large aperture optical components
【作者中文名】 王长军; 熊胜明;
/ n$ m* p7 U& i【作者英文名】 WANG Chang-jun1; 2; XIONG Sheng-ming1 （1.Institute of Optics and Electronics; Chinese Academy of Sciences; P.O.Box 350; Chengdu 610209; China; 2.Graduate University of the Chinese Academy of Sciences; Beijing 100039; China）;
! M: R8 `) x" K9 H# w+ g2 ~' \9 x【作者单位】 中国科学院光电技术研究所; 中国科学院光电技术研究所 成都; 中国科学院研究生院;
3 E& _- x$ p7 C4 ]3 R【文献出处】 强激光与粒子束, High Power Laser and Particle Beams, 编辑部邮箱 2007年 07期  
+ G) R, d2 p9 `8 N6 ^期刊荣誉：中文核心期刊要目总览  ASPT来源刊  中国期刊方阵  CJFD收录刊
【关键词】 大口径光学元件; 薄膜; 均匀性; 修正板; 修正;
【英文关键词】 Large aperture optical components; Film; Uniformity; Mask; Correction;
7 R* Q/ n2 g" t7 Q$ I) m* U【摘要】 研究了2.2 m高真空箱式镀膜机镀膜时的实际膜厚分布情况。对非球面和平面光学元件,分别采用行星夹具和平面公转夹具并利用修正板调节膜厚均匀性。从实验上实现了大口径薄膜均匀性的调节,并获得较为理想的结果。口径在700 mm范围内,对于凹面均匀性可以控制在0.7%以内,平面均匀性在1%以内;口径在1 200 mm范围内凹面元件均匀性可控制在1%以内,平面1 300 mm口径以内窗口均匀性可控制在1%以内。镀制了口径在400～1 300 mm的多种天文观测上使用的反射镜、增透膜等,获得了理想的光谱曲线与较好的使用效果。
0 @( C! l, _5 v) C$ F【英文摘要】 The actual distribution of film thickness of a 2.2 meter coating plant has been studied.The uniformity of film thickness has been adjusted by correction mask in experiments.Utilizing correction mask,preferable uniformity values of optical components using planet jigs and revolution jigs have been acquired respectively by experiment and the results for large aperture optical components are satisfactory.Uniformity value has been controlled within 0.7% for concave mirrors within 700 millimeter aperture.For pla...

shj1128

谢谢楼主！！！