格兰泰勒棱镜高性能宽带减反射膜的优化设计及性能测试

格兰泰勒棱镜高性能宽带减反射膜的优化设计及性能测试
, m# a+ `5 d3 [. `4 A  ^郝殿中 张霞 吴福全 马丽丽曲阜师范大学激光研究所,山东曲阜273165摘　要:格兰泰勒棱镜在光学领域有着重要的应用，透过比的高低和有效带宽的大小．直接影响着棱镜的品质．为了提高棱镜的透射率．拓宽有效使用带宽．借助于计算机辅助设计方法．设计了高性能多层减反射膜系：选用合适的光学薄膜材料．利用电子束蒸镀．借助于离子源辅助蒸镀．制作了高性能的宽带减反射膜．测试结果表明：平均剩余反射率小于0．5％．有效使用带宽在可见光区大于100nm，达到了设计要求，提升了棱镜的品质．[著者文摘]
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* h* E7 {/ p7 y% T! [1 A关键词:薄膜光学 格兰泰勒棱镜 减反射膜 带宽
分类号:　O484.4[著者标引]文献标识码：A文章编号：1005-4642（2006）09-0033-03栏目信息：集锦
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Refined design and test of high performance broad-hand antireflection coating for Glan-Taylor prismHAO Dian-zhong, ZHANG Xia, WU Fu-quan, MA Li-li Institute of Laser Research, Qufu Normal University, Qufu 273165, ChinaAbstract:Glan-Taylor prism has important applications in optical field. The quality of the prism is directly affected by the transmissivity and the bandwidth. To improve the transmissivity and the bandwidth, we have designed multi-layer antireflecting coating using the theory of film feature matrix. Selected optical film materials are evaporated using ion source assisted electron beam evaporation technique, and broadbandantireflecting film of high quality is obtained. The testingresu the average index of reflection is less than 0.5% and the effective bandwidth is 100 nm i region （400～700 nm）, it has achieved the aim of design and improved the performance of prism. ts show that n the visible Glan-Taylor prism.[著者文摘]

Key words:film optical; Glan-Taylor prism; antireflection coatings; bandwidth