用复合监控法镀制的TEACO2激光器增透膜

用复合监控法镀制的TEACO2激光器增透膜杨春华 夏文建 李蓬 余文峰 程祖海华中科技大学激光技术国家重点实验室,武汉430074摘　要:比较了光学薄膜淀积过程中的晶振监控和光学监控各自的优缺点，提出了一种有效利用这两种监控方法各自优点的复合监控方法，利用该复合监控方法采用离子辅助镀工艺镀制的TEACO2激光器增透膜，其透射率高于99．5％，且具有良好的稳定性和重复性。[著者文摘]
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关键词:光学薄膜 膜厚监控 复合监控 TEA CO2激光器
; @( R, D. F5 }# X+ r分类号:　O484.4[著者标引]文献标识码：A文章编号：1672-3392（2007）01-0075-04栏目信息：光学薄膜
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Antireflect Film Used in TEA CO2 Laser Produced by Combination Thickness Monitoring MethodYANG Chun-hua XIA Wen-jian LI Peng YU Wen-feng CHENG Zu-hai State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074, ChinaAbstract:A combination thickness monitoring method is introduced to monitor optical thin film thickness in real time. The high accuracy of crystal oscillation monitoring method and the optical thickness measurement of turning point monitoring method can be used for real time monitoring on optical film deposition with high accuracy. Antireflection layers by IAD with this combination monitoring method show that the transmittance is more than 99.5 % at 10. 6 μm wavelength and the repeatability of film performance is improved.[著者文摘]
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9 u( J( Y5 W  F3 X7 KKey wordsptical thin film thickness monitoring monitoring combination TEA CO2 laser