利用功率谱密度函数表征光学薄膜基底表面粗糙度

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利用功率谱密度函数表征光学薄膜基底表面粗糙度沈摘　要:光学表面的表面粗糙度通常利用两个传统参数方根粗糙度σ和相关长度l来进行表征。主要就如何引入功率谱密度函数（PSD）表征表面微观形貌进行了初步研究。说明了一维和二维功率谱密度（PSD）函数的数学计算方法、PSD函数的物理意义，同时给出了PSD函数与传统的表面评价指标σ和l之间的关系。利用不同仪器对多种样品进行测试，在分析比较测试结果的基础上，总结了利用PSD函数评价光学表面粗糙度的优点。功率谱密度函数作为一个全面的光学表面评价参数，正得到越来越广泛的重视和应用。[著者文摘]

( o! D. E: |8 e" @4 g2 @关键词:光学基底 表面粗糙度 均方根值 功率谱密度
% S% @- ]2 _- g' {0 i" B6 L分类号:　O434 TB43[免标]文献标识码：A文章编号：1005-5630（2006）04-0141-05栏目信息：薄膜制备与特性测试
; @% J1 K) A9 X& o* p相关文献:主题相关

1 N  k7 x) k( b/ vSpecifying surface roughness of optical film substrate using the power spectral densitySHEN Zheng-xiang, WANG Zhan-shan, MA Bin, XU Jing, CHEN Ling-yan Department of Physics,Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, ChinaAbstract:Surface roughness measurements are usually fitted to models of the finish correlation function which are parameterized in terms of two types of conventional length parameters root-meansquare （rms） roughness, a and the correlation length l. The Power Spectral Density （PSD）, in its twodimensional form, has been designated as the preferred quantity for specifying surface roughness on an international drawing standard for surface texture. In this paper, the PSD function is introduced, which is the most appropriate way to characterize the microroughness of a surface with a spatial wavelength range from several centimeters to a few hundred nanometers. The calculation of the PSD from surface profile data is given and the relation between two types of conventional length parameters, a and l, and PSD function is shown. Furthermore, the physical meaning and advantages of using PSD functions in estimating optics surface quality are discussed.[著者文摘]

; E5 M% z( T& ~1 n3 d) y2 }Key wordsptical substrate ;surface roughness ; rms roughness ; power spectral density

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